Patent | Date |
---|
Substrate Transport Device And Substrate Transport Method App 20220301912 - KUWAHARA; Joji | 2022-09-22 |
Substrate treating apparatus and substrate transporting method Grant 11,443,968 - Kuwahara September 13, 2 | 2022-09-13 |
Substrate treating apparatus and substrate transporting method Grant 11,348,812 - Kuwahara May 31, 2 | 2022-05-31 |
Substrate treating system and substrate transporting method Grant 11,339,011 - Kuwahara May 24, 2 | 2022-05-24 |
Substrate Treating Apparatus And Substrate Transporting Method App 20220134389 - KUWAHARA; Joji ;   et al. | 2022-05-05 |
Substrate carrier apparatus and substrate carrying method Grant 11,302,543 - Kuwahara April 12, 2 | 2022-04-12 |
Substrate treating apparatus Grant 11,295,974 - Kuwahara April 5, 2 | 2022-04-05 |
Peripheral Processing Method App 20220082942 - KUWAHARA; Joji ;   et al. | 2022-03-17 |
Substrate treating apparatus and substrate transporting method Grant 11,260,429 - Kuwahara , et al. March 1, 2 | 2022-03-01 |
Substrate treating apparatus, carrier transporting method, and carrier buffer device Grant 11,251,060 - Kuwahara February 15, 2 | 2022-02-15 |
Peripheral processing apparatus and peripheral processing method Grant 11,231,651 - Kuwahara , et al. January 25, 2 | 2022-01-25 |
Substrate treating apparatus and substrate treating method Grant 11,152,233 - Inagaki , et al. October 19, 2 | 2021-10-19 |
Substrate treating apparatus and method for controlling substrate treating apparatus Grant 11,152,242 - Kuwahara , et al. October 19, 2 | 2021-10-19 |
Substrate treating apparatus and substrate transporting method Grant 11,139,192 - Kuwahara , et al. October 5, 2 | 2021-10-05 |
Substrate treating apparatus and substrate transporting method Grant 11,127,613 - Kuwahara September 21, 2 | 2021-09-21 |
Substrate treating apparatus Grant 11,101,156 - Kuwahara , et al. August 24, 2 | 2021-08-24 |
Indexer apparatus, substrate treating apparatus, method for controlling indexer apparatus, and method for controlling substrate treating apparatus Grant 11,075,101 - Kuwahara , et al. July 27, 2 | 2021-07-27 |
Substrate processing apparatus and substrate processing method Grant 11,037,808 - Kuwahara June 15, 2 | 2021-06-15 |
Substrate Treating Apparatus And Substrate Transporting Method App 20210159293 - KUWAHARA; Joji ;   et al. | 2021-05-27 |
Substrate Carrier Apparatus And Substrate Carrying Method App 20210090918 - KUWAHARA; Joji | 2021-03-25 |
Substrate Treating System And Substrate Transporting Method App 20210061587 - KUWAHARA; Joji | 2021-03-04 |
Substrate Treating Apparatus And Substrate Transporting Method App 20210020475 - KUWAHARA; Joji | 2021-01-21 |
Substrate Treating System And Substrate Transporting Method App 20210020473 - KUWAHARA; Joji | 2021-01-21 |
Substrate transporting device, substrate treating apparatus, and substrate transporting method Grant 10,727,087 - Kuwahara | 2020-07-28 |
Substrate Treating Apparatus And Substrate Transporting Method App 20200211882 - KUWAHARA; Joji ;   et al. | 2020-07-02 |
Substrate Treating Apparatus And Substrate Transporting Method App 20200211880 - KUWAHARA; Joji | 2020-07-02 |
Substrate Treating Apparatus And Substrate Transporting Method App 20200206788 - KUWAHARA; Joji ;   et al. | 2020-07-02 |
Substrate Treating Apparatus And Substrate Transporting Method App 20200211868 - KUWAHARA; Joji | 2020-07-02 |
Substrate Treating Apparatus, Carrier Transporting Method, And Carrier Buffer Device App 20200211881 - KUWAHARA; Joji | 2020-07-02 |
Substrate Treating Apparatus App 20200176280 - KUWAHARA; Joji | 2020-06-04 |
Substrate transport device, substrate processing apparatus including the substrate transport device, and substrate transport method Grant 10,627,800 - Kuwahara | 2020-04-21 |
Substrate Treating Apparatus App 20200098607 - KUWAHARA; Joji ;   et al. | 2020-03-26 |
Substrate Treating Apparatus And Substrate Treating Method App 20200098602 - INAGAKI; Yukihiko ;   et al. | 2020-03-26 |
Indexer Apparatus, Substrate Treating Apparatus, Method For Controlling Indexer Apparatus, And Method For Controlling Substrate App 20200098612 - KUWAHARA; Joji ;   et al. | 2020-03-26 |
Substrate Treating Apparatus And Method For Controlling Substrate Treating Apparatus App 20200098611 - KUWAHARA; Joji ;   et al. | 2020-03-26 |
Substrate Treating Apparatus App 20200098609 - KUWAHARA; Joji | 2020-03-26 |
Substrate processing apparatus, alignment device, substrate processing method and alignment method Grant 10,585,362 - Kuwahara | 2020-03-10 |
Substrate processing apparatus and substrate processing method Grant 10,468,284 - Kuwahara No | 2019-11-05 |
Substrate transport device, detection position calibration method and substrate processing apparatus Grant 10,395,968 - Kuwahara A | 2019-08-27 |
Substrate Processing Apparatus, Alignment Device, Substrate Processing Method And Alignment Method App 20190049865 - KUWAHARA; Joji | 2019-02-14 |
Substrate Transporting Device, Substrate Treating Apparatus, And Substrate Transporting Method App 20190043738 - KUWAHARA; Joji | 2019-02-07 |
Substrate processing apparatus and substrate processing method Grant 10,186,441 - Kuwahara Ja | 2019-01-22 |
Substrate transporting device, substrate treating apparatus, and substrate transporting method Grant 10,134,609 - Kuwahara November 20, 2 | 2018-11-20 |
Peripheral Processing Apparatus And Peripheral Processing Method App 20180299780 - KUWAHARA; Joji ;   et al. | 2018-10-18 |
Substrate processing apparatus and substrate processing method Grant 10,062,593 - Kuwahara August 28, 2 | 2018-08-28 |
Substrate Transport Device, Substrate Processing Apparatus Including The Substrate Transport Device, And Substrate Transport Method App 20180231952 - KUWAHARA; Joji | 2018-08-16 |
Substrate Transport Device, Detection Position Calibration Method And Substrate Processing Apparatus App 20180218935 - Kuwahara; Joji | 2018-08-02 |
Substrate Processing Apparatus And Substrate Processing Method App 20180211859 - KUWAHARA; Joji | 2018-07-26 |
Substrate Processing Apparatus And Substrate Processing Method App 20180047603 - KUWAHARA; Joji | 2018-02-15 |
Substrate Processing Apparatus And Substrate Processing Method App 20170263483 - KUWAHARA; Joji | 2017-09-14 |
Substrate processing apparatus and substrate processing system Grant 9,606,454 - Taguchi , et al. March 28, 2 | 2017-03-28 |
Substrate processing apparatus and substrate processing method Grant 9,539,607 - Kuwahara , et al. January 10, 2 | 2017-01-10 |
Substrate Transporting Device, Substrate Treating Apparatus, And Substrate Transporting Method App 20160293465 - KUWAHARA; Joji | 2016-10-06 |
Substrate Processing Apparatus And Substrate Processing Method App 20160020125 - KUWAHARA; Joji | 2016-01-21 |
Substrate Processing Apparatus And Substrate Processing Method App 20150318198 - KUWAHARA; Joji | 2015-11-05 |
Substrate Processing Apparatus And Substrate Processing Method App 20150314314 - KUWAHARA; Joji | 2015-11-05 |
Substrate Processing Apparatus And Substrate Processing System App 20140071423 - TAGUCHI; Takashi ;   et al. | 2014-03-13 |
Substrate Processing Apparatus And Substrate Processing Method App 20140023776 - KUWAHARA; Joji ;   et al. | 2014-01-23 |