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Methods And Apparatus For Processing A Substrate To Remove Moisture And/or Residue App 20150204606 - Kutney; Michael C. | 2015-07-23 |
Plasma reactor with minimal D.C. coils for cusp, solenoid and mirror fields for plasma uniformity and device damage reduction Grant 8,617,351 - Hoffman , et al. December 31, 2 | 2013-12-31 |
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Lower liner with integrated flow equalizer and improved conductance Grant 8,282,736 - Carducci , et al. October 9, 2 | 2012-10-09 |
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Lower liner with integrated flow equalizer and improved conductance Grant 8,118,938 - Carducci , et al. February 21, 2 | 2012-02-21 |
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Lower Liner With Integrated Flow Equalizer And Improved Conductance App 20110284166 - CARDUCCI; JAMES D. ;   et al. | 2011-11-24 |
Methods to avoid unstable plasma states during a process transition Grant 8,048,806 - Kutney , et al. November 1, 2 | 2011-11-01 |
Integrated Composite Separator For Lithium-ion Batteries App 20110217585 - Wang; Connie P. ;   et al. | 2011-09-08 |
Lower liner with integrated flow equalizer and improved conductance Grant 7,987,814 - Carducci , et al. August 2, 2 | 2011-08-02 |
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