| Patent | Date |
|---|
Mask Inspection Method And Mask Inspection Apparatus
App 20220178847 - SAITO; Keita ; et al. | 2022-06-09 |
Optical device, and method for preventing contamination of optical device
Grant 11,353,802 - Kusunose , et al. June 7, 2 | 2022-06-07 |
Optical Device, And Method For Preventing Contamination Of Optical Device
App 20210373447 - KUSUNOSE; Haruhiko ; et al. | 2021-12-02 |
Inspection Device And Inspection Method
App 20210247323 - TAKEHISA; Kiwamu ; et al. | 2021-08-12 |
Inspection device and inspection method
Grant 10,712,287 - Nishizawa , et al. | 2020-07-14 |
Correction method, correction apparatus, and inspection apparatus
Grant 10,706,527 - Kohyama , et al. | 2020-07-07 |
Optical apparatus and vibration removing method
Grant 10,645,289 - Kusunose | 2020-05-05 |
Inspection Device And Inspection Method
App 20190277772 - NISHIZAWA; Masayasu ; et al. | 2019-09-12 |
Correction Method, Correction Apparatus, And Inspection Apparatus
App 20180276812 - KOHYAMA; Tsunehito ; et al. | 2018-09-27 |
Optical Apparatus And Vibration Removing Method
App 20180191958 - KUSUNOSE; Haruhiko | 2018-07-05 |
Interferometer and phase shift amount measuring apparatus with diffraction gratings to produce two diffraction beams
Grant 9,719,859 - Kusunose , et al. August 1, 2 | 2017-08-01 |
Defect coordinates measurement device, defect coordinates measurement method, mask manufacturing method, and reference mask
Grant 9,638,739 - Kusunose , et al. May 2, 2 | 2017-05-02 |
Pellicle inspection apparatus
Grant 9,588,421 - Takehisa , et al. March 7, 2 | 2017-03-07 |
Pellicle Inspection Apparatus
App 20150293460 - TAKEHISA; Kiwamu ; et al. | 2015-10-15 |
Chucking device and chucking method
Grant 9,117,869 - Kusunose August 25, 2 | 2015-08-25 |
Interferometer And Phase Shift Amount Measuring Apparatus
App 20150204729 - KUSUNOSE; Haruhiko ; et al. | 2015-07-23 |
Microscope and inspection apparatus
Grant 9,013,787 - Kusunose , et al. April 21, 2 | 2015-04-21 |
Chucking Device And Chucking Method
App 20140189998 - KUSUNOSE; Haruhiko | 2014-07-10 |
Substrate inspection apparatus and mask inspection apparatus
Grant 8,760,642 - Hori , et al. June 24, 2 | 2014-06-24 |
Defect Coordinates Measurement Device, Defect Coordinates Measurement Method, Mask Manufacturing Method, And Reference Mask
App 20130245971 - KUSUNOSE; Haruhiko ; et al. | 2013-09-19 |
Plasma Shield Device And Plasma Source Apparatus
App 20130234597 - KUSUNOSE; Haruhiko ; et al. | 2013-09-12 |
Microscope And Inspection Apparatus
App 20130188251 - KUSUNOSE; Haruhiko ; et al. | 2013-07-25 |
Substrate Inspection Apparatus And Mask Inspection Apparatus
App 20120287424 - HORI; Zenta ; et al. | 2012-11-15 |
Light source apparatus
Grant 8,305,681 - Sakuma , et al. November 6, 2 | 2012-11-06 |
Depth measurement apparatus and depth measurement method
Grant 8,069,008 - Kusunose November 29, 2 | 2011-11-29 |
Inspection System And Inspection Method
App 20110242312 - SEKI; Hirokazu ; et al. | 2011-10-06 |
Light Source Apparatus
App 20110220815 - SAKUMA; Jun ; et al. | 2011-09-15 |
Inspection apparatus and method, and production method for pattern substrates
Grant 7,907,270 - Kusunose March 15, 2 | 2011-03-15 |
Photomask inspection apparatus
Grant 7,796,343 - Takehisa , et al. September 14, 2 | 2010-09-14 |
Illumination apparatus and illumination method
Grant 7,764,414 - Kusunose , et al. July 27, 2 | 2010-07-27 |
Phase shift amount measurement apparatus and transmittance measurement apparatus
Grant 7,643,157 - Takizawa , et al. January 5, 2 | 2010-01-05 |
Depth measurement apparatus and depth measurement method
App 20090187378 - Kusunose; Haruhiko | 2009-07-23 |
Photomask Inspection Apparatus
App 20090168191 - Takehisa; Kiwamu ; et al. | 2009-07-02 |
Inspection apparatus, inspection method, and manufacturing method of pattern substrate
Grant 7,548,309 - Kusunose , et al. June 16, 2 | 2009-06-16 |
Inspection Apparatus, Inspection Method, And Manufacturing Method Of Pattern Substrate
App 20080192238 - KUSUNOSE; Haruhiko ; et al. | 2008-08-14 |
Inspection Apparatus And Method, And Production Method For Pattern Substrates
App 20080186476 - Kusunose; Haruhiko | 2008-08-07 |
Phase shift amount measurement apparatus and transmittance measurement apparatus
App 20080174786 - Takizawa; Hideo ; et al. | 2008-07-24 |
Illumination Apparatus And Illumination Method
App 20080144148 - Kusunose; Haruhiko ; et al. | 2008-06-19 |
Optically scanning apparatus and defect inspection system
Grant 6,858,859 - Kusunose February 22, 2 | 2005-02-22 |
Light source device
Grant 6,665,326 - Kusunose December 16, 2 | 2003-12-16 |
Image pickup apparatus and defect inspection apparatus for photomask
Grant 6,654,110 - Yonezawa , et al. November 25, 2 | 2003-11-25 |
Image Pickup Apparatus And Defect Inspection Apparatus For Photomask
App 20030189703 - Yonezawa, Makoto ; et al. | 2003-10-09 |
Optically scanning apparatus and defect inspection system
App 20020162979 - Kusunose, Haruhiko | 2002-11-07 |
Light source device
App 20020080834 - Kusunose, Haruhiko | 2002-06-27 |
Laser microscope and a pattern inspection apparatus using such laser microscope
Grant 6,043,932 - Kusunose March 28, 2 | 2000-03-28 |
Apparatus for stripping pellicle
Grant 5,772,842 - Tanaka , et al. June 30, 1 | 1998-06-30 |
Mach-zehnder type interferometer
Grant 5,771,097 - Kusunose , et al. June 23, 1 | 1998-06-23 |
Electron beam exposing apparatus with a stencil mask kept at a constant temperature
Grant 5,428,203 - Kusunose June 27, 1 | 1995-06-27 |
Method of testing a phase shift mask and a testing apparatus used therein in the ultraviolet wavelength range
Grant 5,426,503 - Kusunose June 20, 1 | 1995-06-20 |
| 