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name:-0.020637035369873
name:-0.020318031311035
name:-0.00040197372436523
Kushibiki; Masato Patent Filings

Kushibiki; Masato

Patent Applications and Registrations

Patent applications and USPTO patent grants for Kushibiki; Masato.The latest application filed is for "plasma processing method and plasma processing apparatus".

Company Profile
0.27.21
  • Kushibiki; Masato - Miyagi JP
  • Kushibiki; Masato - Kurokawa-gun N/A JP
  • Kushibiki; Masato - Yamanashi N/A JP
  • Kushibiki; Masato - Nirasaki N/A JP
  • KUSHIBIKI; Masato - Nirasaki-shi JP
  • KUSHIBIKI; Masato - Nirasaki City JP
  • Kushibiki; Masato - Yamanashi-Ken JP
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Plasma processing method and plasma processing apparatus
Grant 9,660,182 - Sone , et al. May 23, 2
2017-05-23
Etching method and substrate processing apparatus
Grant 9,419,211 - Nishimura , et al. August 16, 2
2016-08-16
Method of etching copper layer and mask
Grant 9,208,997 - Nishimura , et al. December 8, 2
2015-12-08
Substrate processing method and storage medium
Grant 9,165,784 - Nishimura , et al. October 20, 2
2015-10-20
Method for etching film containing cobalt and palladium
Grant 8,962,489 - Nishimura , et al. February 24, 2
2015-02-24
Plasma Processing Method And Plasma Processing Apparatus
App 20150050750 - Sone; Takashi ;   et al.
2015-02-19
Method For Etching Film Containing Cobalt And Palladium
App 20140287591 - NISHIMURA; Eiichi ;   et al.
2014-09-25
Pattern forming method and manufacturing method of semiconductor device
Grant 8,815,495 - Kushibiki , et al. August 26, 2
2014-08-26
Semiconductor device manufacturing method and plasma etching apparatus
Grant 8,772,172 - Kushibiki , et al. July 8, 2
2014-07-08
Etching Method And Substrate Processing Apparatus
App 20140120635 - Nishimura; Eiichi ;   et al.
2014-05-01
Method Of Etching Copper Layer And Mask
App 20140110373 - Nishimura; Eiichi ;   et al.
2014-04-24
Substrate processing method and substrate processing apparatus for performing a deposition process and calculating a termination time of the deposition process
Grant 8,642,136 - Kushibiki , et al. February 4, 2
2014-02-04
Semiconductor Device Manufacturing Method And Plasma Etching Apparatus
App 20130302993 - KUSHIBIKI; Masato ;   et al.
2013-11-14
Substrate processing method
Grant 8,530,354 - Kushibiki , et al. September 10, 2
2013-09-10
Substrate processing method
Grant 8,491,804 - Kushibiki , et al. July 23, 2
2013-07-23
Semiconductor device manufacturing method and plasma etching apparatus
Grant 8,491,805 - Kushibiki , et al. July 23, 2
2013-07-23
Pattern Forming Method And Manufacturing Method Of Semiconductor Device
App 20130122429 - KUSHIBIKI; Masato ;   et al.
2013-05-16
Substrate processing method
Grant 8,383,521 - Nishimura , et al. February 26, 2
2013-02-26
Substrate Processing Method And Storage Medium
App 20120244718 - NISHIMURA; Eiichi ;   et al.
2012-09-27
Substrate processing method
Grant 8,252,698 - Kushibiki , et al. August 28, 2
2012-08-28
Substrate processing method
Grant 8,241,511 - Kushibiki , et al. August 14, 2
2012-08-14
Substrate Processing Method
App 20120196387 - KUSHIBIKI; Masato ;   et al.
2012-08-02
Substrate processing method
Grant 8,202,805 - Kushibiki , et al. June 19, 2
2012-06-19
Semiconductor Device Manufacturing Method And Plasma Etching Apparatus
App 20110195577 - KUSHIBIKI; Masato ;   et al.
2011-08-11
Pattern Forming Method And Manufacturing Method Of Semiconductor Device
App 20110065049 - KUSHIBIKI; Masato ;   et al.
2011-03-17
Method for manufacturing semiconductor device
Grant 7,897,498 - Gale , et al. March 1, 2
2011-03-01
Plasma etching method
Grant 7,811,939 - Kushibiki , et al. October 12, 2
2010-10-12
Substrate Processing Method
App 20100240217 - KUSHIBIKI; Masato ;   et al.
2010-09-23
Substrate Processing Method
App 20100233883 - Nishimura; Eiichi ;   et al.
2010-09-16
Substrate Processing Method
App 20100233885 - KUSHIBIKI; Masato ;   et al.
2010-09-16
Substrate Processing Method
App 20100173493 - Kushibiki; Masato ;   et al.
2010-07-08
Substrate Processing Method, Substrate Processing Apparatus, And Storage Medium
App 20100086670 - Kushibiki; Masato ;   et al.
2010-04-08
Substrate Processing Method
App 20100068892 - KUSHIBIKI; Masato ;   et al.
2010-03-18
Fine pattern forming method
Grant 7,604,908 - Kushibiki , et al. October 20, 2
2009-10-20
Method for Manufacturing Semiconductor Device
App 20080268655 - Gale; Glenn ;   et al.
2008-10-30
Plasma Etching Method
App 20070224828 - KUSHIBIKI; Masato ;   et al.
2007-09-27
Etching method and computer storage medium storing program for controlling same
Grant 7,256,135 - Kushibiki , et al. August 14, 2
2007-08-14
Dry etching method
Grant 7,192,532 - Koh , et al. March 20, 2
2007-03-20
Fine pattern forming method
App 20060204899 - Kushibiki; Masato ;   et al.
2006-09-14
Etching method and computer storage medium storing program for controlling same
App 20050070111 - Kushibiki, Masato ;   et al.
2005-03-31
Dry etching method
App 20050045588 - Koh, Akiteru ;   et al.
2005-03-03

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