loadpatents
Patent applications and USPTO patent grants for Kushibiki; Masato.The latest application filed is for "plasma processing method and plasma processing apparatus".
Patent | Date |
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Plasma processing method and plasma processing apparatus Grant 9,660,182 - Sone , et al. May 23, 2 | 2017-05-23 |
Etching method and substrate processing apparatus Grant 9,419,211 - Nishimura , et al. August 16, 2 | 2016-08-16 |
Method of etching copper layer and mask Grant 9,208,997 - Nishimura , et al. December 8, 2 | 2015-12-08 |
Substrate processing method and storage medium Grant 9,165,784 - Nishimura , et al. October 20, 2 | 2015-10-20 |
Method for etching film containing cobalt and palladium Grant 8,962,489 - Nishimura , et al. February 24, 2 | 2015-02-24 |
Plasma Processing Method And Plasma Processing Apparatus App 20150050750 - Sone; Takashi ;   et al. | 2015-02-19 |
Method For Etching Film Containing Cobalt And Palladium App 20140287591 - NISHIMURA; Eiichi ;   et al. | 2014-09-25 |
Pattern forming method and manufacturing method of semiconductor device Grant 8,815,495 - Kushibiki , et al. August 26, 2 | 2014-08-26 |
Semiconductor device manufacturing method and plasma etching apparatus Grant 8,772,172 - Kushibiki , et al. July 8, 2 | 2014-07-08 |
Etching Method And Substrate Processing Apparatus App 20140120635 - Nishimura; Eiichi ;   et al. | 2014-05-01 |
Method Of Etching Copper Layer And Mask App 20140110373 - Nishimura; Eiichi ;   et al. | 2014-04-24 |
Substrate processing method and substrate processing apparatus for performing a deposition process and calculating a termination time of the deposition process Grant 8,642,136 - Kushibiki , et al. February 4, 2 | 2014-02-04 |
Semiconductor Device Manufacturing Method And Plasma Etching Apparatus App 20130302993 - KUSHIBIKI; Masato ;   et al. | 2013-11-14 |
Substrate processing method Grant 8,530,354 - Kushibiki , et al. September 10, 2 | 2013-09-10 |
Substrate processing method Grant 8,491,804 - Kushibiki , et al. July 23, 2 | 2013-07-23 |
Semiconductor device manufacturing method and plasma etching apparatus Grant 8,491,805 - Kushibiki , et al. July 23, 2 | 2013-07-23 |
Pattern Forming Method And Manufacturing Method Of Semiconductor Device App 20130122429 - KUSHIBIKI; Masato ;   et al. | 2013-05-16 |
Substrate processing method Grant 8,383,521 - Nishimura , et al. February 26, 2 | 2013-02-26 |
Substrate Processing Method And Storage Medium App 20120244718 - NISHIMURA; Eiichi ;   et al. | 2012-09-27 |
Substrate processing method Grant 8,252,698 - Kushibiki , et al. August 28, 2 | 2012-08-28 |
Substrate processing method Grant 8,241,511 - Kushibiki , et al. August 14, 2 | 2012-08-14 |
Substrate Processing Method App 20120196387 - KUSHIBIKI; Masato ;   et al. | 2012-08-02 |
Substrate processing method Grant 8,202,805 - Kushibiki , et al. June 19, 2 | 2012-06-19 |
Semiconductor Device Manufacturing Method And Plasma Etching Apparatus App 20110195577 - KUSHIBIKI; Masato ;   et al. | 2011-08-11 |
Pattern Forming Method And Manufacturing Method Of Semiconductor Device App 20110065049 - KUSHIBIKI; Masato ;   et al. | 2011-03-17 |
Method for manufacturing semiconductor device Grant 7,897,498 - Gale , et al. March 1, 2 | 2011-03-01 |
Plasma etching method Grant 7,811,939 - Kushibiki , et al. October 12, 2 | 2010-10-12 |
Substrate Processing Method App 20100240217 - KUSHIBIKI; Masato ;   et al. | 2010-09-23 |
Substrate Processing Method App 20100233883 - Nishimura; Eiichi ;   et al. | 2010-09-16 |
Substrate Processing Method App 20100233885 - KUSHIBIKI; Masato ;   et al. | 2010-09-16 |
Substrate Processing Method App 20100173493 - Kushibiki; Masato ;   et al. | 2010-07-08 |
Substrate Processing Method, Substrate Processing Apparatus, And Storage Medium App 20100086670 - Kushibiki; Masato ;   et al. | 2010-04-08 |
Substrate Processing Method App 20100068892 - KUSHIBIKI; Masato ;   et al. | 2010-03-18 |
Fine pattern forming method Grant 7,604,908 - Kushibiki , et al. October 20, 2 | 2009-10-20 |
Method for Manufacturing Semiconductor Device App 20080268655 - Gale; Glenn ;   et al. | 2008-10-30 |
Plasma Etching Method App 20070224828 - KUSHIBIKI; Masato ;   et al. | 2007-09-27 |
Etching method and computer storage medium storing program for controlling same Grant 7,256,135 - Kushibiki , et al. August 14, 2 | 2007-08-14 |
Dry etching method Grant 7,192,532 - Koh , et al. March 20, 2 | 2007-03-20 |
Fine pattern forming method App 20060204899 - Kushibiki; Masato ;   et al. | 2006-09-14 |
Etching method and computer storage medium storing program for controlling same App 20050070111 - Kushibiki, Masato ;   et al. | 2005-03-31 |
Dry etching method App 20050045588 - Koh, Akiteru ;   et al. | 2005-03-03 |
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