Kurono; Yoichi
Patent Applications and Registrations
Patent applications and USPTO patent grants for Kurono; Yoichi.The latest application filed is for "vacuum processing system and method of making".
- Kurono; Yoichi - Yagoshima JP
- Kurono; Yoichi - South Hamilton MA
- Kurono, Yoichi - Beverly MA
- Kurono; Yoichi - Yamanashi-ken JP
- Kurono; Yoichi - Nakakoma JP
- Kurono; Yoichi - Tokyo JP
| Patent | Date |
|---|---|
| Vacuum processing system and method of making App 20070218197 - Kurono; Yoichi | 2007-09-20 |
| Etching system and etching chamber Grant 6,558,506 - Freeman , et al. May 6, 2 | 2003-05-06 |
| Apparatus and method for feeding gases for use in semiconductor manufacturing App 20010013363 - Kitayama, Hirofumi ; et al. | 2001-08-16 |
| Apparatus for feeding gases for use in semiconductor manufacturing Grant 6,210,482 - Kitayama , et al. April 3, 2 | 2001-04-03 |
| Plasma processing apparatus Grant 5,779,803 - Kurono , et al. July 14, 1 | 1998-07-14 |
| Plasma processing apparatus comprising means for generating rotating magnetic field Grant 5,440,206 - Kurono , et al. August 8, 1 | 1995-08-08 |
| Vertical type processing apparatus Grant 5,217,560 - Kurono , et al. June 8, 1 | 1993-06-08 |
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