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Exposure apparatus, exposure method, and exposure mask App 20070146680 - Inao; Yasuhisa ;   et al. | 2007-06-28 |
Near-field exposure photoresist and fine pattern forming method using the same App 20070141483 - Yamaguchi; Takako ;   et al. | 2007-06-21 |
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Exposure method, exposure mask, and exposure apparatus App 20070065734 - Inao; Yasuhisa ;   et al. | 2007-03-22 |
Near-field exposure apparatus and near-field exposure photomask Grant 7,190,438 - Yamaguchi , et al. March 13, 2 | 2007-03-13 |
Probe with hollow waveguide and method for producing the same Grant 7,151,250 - Shimada , et al. December 19, 2 | 2006-12-19 |
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Method of detecting relative position of exposure mask and object to be exposed, alignment method, and exposure method using the same App 20060152703 - Yamaguchi; Takako ;   et al. | 2006-07-13 |
Exposure apparatus and method Grant 7,068,353 - Yano , et al. June 27, 2 | 2006-06-27 |
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Probe with hollow waveguide and method for producing the same App 20060081776 - Shimada; Yasuhiro ;   et al. | 2006-04-20 |
Near-field exposure photoresist and fine pattern forming method using the same App 20060078818 - Yamaguchi; Takako ;   et al. | 2006-04-13 |
Near-field exposure photoresist and fine pattern forming method using the same Grant 7,022,463 - Yamaguchi , et al. April 4, 2 | 2006-04-04 |
Near-field light exposure mask with avoidance of overlap of near-field light, method for manufacturing the same, exposure apparatus and method using near-field light exposure mask, and method for manufacturing device Grant 7,001,696 - Inao , et al. February 21, 2 | 2006-02-21 |
Method and apparatus for detecting relative positional deviation between two objects App 20060007440 - Kuroda; Ryo ;   et al. | 2006-01-12 |
Probe with hollow waveguide and method for producing the same Grant 6,982,419 - Shimada , et al. January 3, 2 | 2006-01-03 |
Probe With Hollow Waveguide And Method For Producing The Same App 20050247117 - Shimada, Yasuhiro ;   et al. | 2005-11-10 |
Probe with hollow waveguide and method for producing the same Grant 6,891,151 - Shimada , et al. May 10, 2 | 2005-05-10 |
Near-field exposure photoresist and fine pattern forming method using the same App 20050079437 - Yamaguchi, Takako ;   et al. | 2005-04-14 |
Near-field light generating structure, near-field exposure mask, and near-field generating method App 20050064303 - Yamada, Tomohiro ;   et al. | 2005-03-24 |
Surface treatment method, process for producing near-field exposure mask using the method, and nanoimprint lithography mask App 20050056351 - Yamada, Tomohiro ;   et al. | 2005-03-17 |
Method of manufacturing micro-structure and method of manufacturing micro-element App 20040241592 - Kuroda, Ryo ;   et al. | 2004-12-02 |
Near field light probe, near field optical microscope, near field light lithography apparatus, and near field light storage apparatus that have the near field light probe Grant 6,785,445 - Kuroda , et al. August 31, 2 | 2004-08-31 |
Photomask for near-field exposure, near-field exposure method, and near-field exposure apparatus App 20040166421 - Yamaguchi, Takako ;   et al. | 2004-08-26 |
Mask, exposure apparatus, and exposure method App 20040137338 - Inao, Yasuhisa ;   et al. | 2004-07-15 |
Exposure method, exposure mask, and exposure apparatus App 20040121245 - Inao, Yasuhisa ;   et al. | 2004-06-24 |
Near-field photomask, near-field exposure apparatus using the photomask, dot pattern forming method using the exposure apparatus, and device manufactured using the method App 20040080732 - Kuroda, Ryo ;   et al. | 2004-04-29 |
Exposure method and apparatus using near field light Grant 6,721,040 - Saito , et al. April 13, 2 | 2004-04-13 |
Exposure method and exposure apparatus using near-field light and exposure mask Grant 6,720,115 - Inao , et al. April 13, 2 | 2004-04-13 |
Pattern-forming apparatus using a photomask App 20040023161 - Yamaguchi, Takako ;   et al. | 2004-02-05 |
Near-field light exposure mask with avoidance of overlap of near-field light, method for manufacturing the same, exposure apparatus and method using near-field light exposure mask, and method for manufacturing device App 20030232257 - Inao, Yasuhisa ;   et al. | 2003-12-18 |
Method for forming a micro-pattern Grant 6,640,433 - Kuroda , et al. November 4, 2 | 2003-11-04 |
Pattern-forming method using photomask, and pattern-forming apparatus Grant 6,632,593 - Yamaguchi , et al. October 14, 2 | 2003-10-14 |
Light modulation apparatus and optical switch, movement detecting device and distance measuring device, alignment device and semiconductor aligner, and processes thereof Grant 6,628,392 - Kuroda , et al. September 30, 2 | 2003-09-30 |
Chemical sensor App 20030132392 - Kuroda, Ryo ;   et al. | 2003-07-17 |
Light Modulation Apparatus And Optical Switch, Movement Detecting Device And Distance Measuring Device, Alignment Device And Semiconductor Aligner, And Processes Thereof App 20030128361 - Kuroda`, Ryo ;   et al. | 2003-07-10 |
Pattern forming apparatus and pattern forming method Grant 6,559,926 - Yamaguchi , et al. May 6, 2 | 2003-05-06 |
Near field light probe, near field optical microscope, near field light lithography apparatus, and near field light storage apparatus that have the near field light probe App 20020154859 - Kuroda, Ryo ;   et al. | 2002-10-24 |
Exposure method and apparatus using near field light App 20020105628 - Saito, Kenji ;   et al. | 2002-08-08 |
Probe for irradiating with or detecting light and method for manufacturing the same Grant 6,408,122 - Shimada , et al. June 18, 2 | 2002-06-18 |
Near-field Optical Probe Having Surface Plasmon Polariton Waveguide And Method Of Preparing The Same As Well As Microscope, Recording/regeneration Apparatus And Micro-fabrication Apparatus Using The Same Grant 6,408,123 - Kuroda , et al. June 18, 2 | 2002-06-18 |
Exposure apparatus and method App 20020071106 - Yano, Koji ;   et al. | 2002-06-13 |
Pattern forming apparatus and pattern forming method App 20020044268 - Yamaguchi, Takako ;   et al. | 2002-04-18 |
Probe with hollow waveguide and method for producing the same App 20020024004 - Shimada, Yasuhiro ;   et al. | 2002-02-28 |
Probe having micro-projection and manufacturing method thereof Grant 6,337,477 - Shimada , et al. January 8, 2 | 2002-01-08 |
Optical probe having a refractive index micro-lens and method of manufacturing the same Grant 6,335,522 - Shimada , et al. January 1, 2 | 2002-01-01 |
Probe with tip having micro aperture for detecting or irradiating light, near-field optical microscope, recording/reproduction apparatus, and exposure apparatus using the probe, and method of manufacturing the probe Grant 6,333,497 - Shimada , et al. December 25, 2 | 2001-12-25 |
Pattern-forming method using photomask, and pattern-forming apparatus App 20010046719 - Yamaguchi, Takako ;   et al. | 2001-11-29 |
Exposure method and exposure apparatus using near-field light and exposure mask App 20010036581 - Inao, Yasuhisa ;   et al. | 2001-11-01 |
Probe with tip having micro aperture for detecting or irradiating light, near-field optical microscope, recording/reproduction apparatus, and exposure apparatus using the probe, and method of manufacturing the probe App 20010007347 - Shimada, Yasuhiro ;   et al. | 2001-07-12 |
Optical probe for detecting or irradiating light and near-field optical microscope having such probe and manufacturing method of such probe Grant 6,215,114 - Yagi , et al. April 10, 2 | 2001-04-10 |
Probe with tip having micro aperture for detecting or irradiating light, near-field optical microscope, recording/reproduction apparatus, and exposure apparatus using the probe, and method of manufacturing the probe Grant 6,201,226 - Shimada , et al. March 13, 2 | 2001-03-13 |
Mask for evanescent light exposure, object to be exposed and apparatus using same Grant 6,187,482 - Kuroda , et al. February 13, 2 | 2001-02-13 |
Exposure method and exposure apparatus Grant 6,171,730 - Kuroda , et al. January 9, 2 | 2001-01-09 |
Scanning near-field optical microscope using the probe and recording and/or reproducing apparatus using the probe Grant 6,163,519 - Kuroda , et al. December 19, 2 | 2000-12-19 |
Information recording/reproducing apparatus and method using probe Grant 6,147,958 - Shido , et al. November 14, 2 | 2000-11-14 |
Method and producing probe with minute aperture, scanning near-field optical microscope using the probe and recording and/or reproducing apparatus using the probe Grant 6,046,972 - Kuroda , et al. April 4, 2 | 2000-04-04 |
Recording/reproducing apparatus and method for recording/reproducing information using probe Grant 5,751,684 - Takeda , et al. May 12, 1 | 1998-05-12 |
Information processing apparatus with mechanism for adjusting interval between substrate for supporting a plurality of probes and recording medium Grant 5,717,680 - Yamano , et al. February 10, 1 | 1998-02-10 |
Information recording/reproducing method for recording and/or reproducing information on information recording carrier by use of probe electrode Grant 5,610,898 - Takimoto , et al. March 11, 1 | 1997-03-11 |
Information recording and/or reproducing apparatus using probe Grant 5,546,374 - Kuroda , et al. August 13, 1 | 1996-08-13 |
Method of detecting positional displacement between mask and wafer, and exposure apparatus adopting the method Grant 5,508,527 - Kuroda , et al. April 16, 1 | 1996-04-16 |
Information recording/reproducing method, recording carrier and apparatus for recording and/or reproducing information on information recording carrier by use of probe electrode Grant 5,461,605 - Takimoto , et al. October 24, 1 | 1995-10-24 |
Information recording and reproducing apparatus for recording and reproducing information by using a probe electrode Grant 5,426,631 - Miyazaki , et al. June 20, 1 | 1995-06-20 |
Information processing apparatus provided with surface aligning mechanism between probe head substrate and recording medium substrate Grant 5,418,771 - Kasanuki , et al. May 23, 1 | 1995-05-23 |
Recording and reading space control between a read/write probe and a recording medium Grant 5,375,114 - Hatanaka , et al. December 20, 1 | 1994-12-20 |
Information detection apparatus and displacement information measurement apparatus Grant 5,349,735 - Kawase , et al. September 27, 1 | 1994-09-27 |
Information processing device and information processing method Grant 5,343,460 - Miyazaki , et al. August 30, 1 | 1994-08-30 |
Device for detecting positional relationship between two objects Grant 5,327,221 - Saitoh , et al. July 5, 1 | 1994-07-05 |
Information recording and/or reproducing apparatus Grant 5,289,455 - Kuroda , et al. February 22, 1 | 1994-02-22 |
Cantilever unit and atomic force microscope, magnetic force microscope, reproducing apparatus and information processing apparatus using the cantilever unit Grant 5,260,567 - Kuroda , et al. November 9, 1 | 1993-11-09 |
Atomic force microscope with a plurality of cantilevers for recording/reproducing information Grant 5,260,926 - Kuroda , et al. November 9, 1 | 1993-11-09 |
Accessing method, and information processing method and information processing device utilizing the same Grant 5,222,060 - Kuroda , et al. June 22, 1 | 1993-06-22 |
Method of access to recording medium, and apparatus and method for processing information Grant 5,199,021 - Hatanaka , et al. March 30, 1 | 1993-03-30 |
Information processing apparatus, information processing method, and recording medium employed therefor Grant 5,162,819 - Sakai , et al. November 10, 1 | 1992-11-10 |
Method for forming probe and apparatus therefor Grant 5,132,533 - Kawase , et al. July 21, 1 | 1992-07-21 |
Distance measuring system utilizing an object with at least one inclined surface Grant 5,122,660 - Yoshii , et al. June 16, 1 | 1992-06-16 |
Distance measuring system Grant 5,000,572 - Nose , et al. March 19, 1 | 1991-03-19 |