| Patent | Date |
|---|
Method of producing epitaxial silicon wafer, epitaxial silicon wafer, and method of producing solid-state imaging device
Grant 11,245,014 - Kadono , et al. February 8, 2 | 2022-02-08 |
Method Of Producing Epitaxial Silicon Wafer, Epitaxial Silicon Wafer, And Method Of Producing Solid-state Imaging Device
App 20210083058 - KADONO; Takeshi ; et al. | 2021-03-18 |
Method of evaluating impurity gettering capability of epitaxial silicon wafer and epitaxial silicon wafer
Grant 10,861,709 - Shigematsu , et al. December 8, 2 | 2020-12-08 |
Method Of Producing Semiconductor Epitaxial Wafer, Semiconductor Epitaxial Water, And Method Of Producing Solid-state Image Sens
App 20200203418 - Kadono; Takeshi ; et al. | 2020-06-25 |
Method Of Evaluating Impurity Gettering Capability Of Epitaxial Silicon Wafer And Epitaxial Silicon Wafer
App 20200203178 - SHIGEMATSU; Satoshi ; et al. | 2020-06-25 |
Method Of Producing Semiconductor Epitaxial Wafer, Semiconductor Epitaxial Wafer, And Method Of Producing Solid-state Image Sens
App 20200127043 - Kadono; Takeshi ; et al. | 2020-04-23 |
Method For Producing Semiconductor Epitaxial Wafer, Semiconductor Epitaxial Wafer, And Method Of Producing Solid-state Image Sen
App 20200127044 - Kadono; Takeshi ; et al. | 2020-04-23 |
Epitaxial wafer manufacturing method and epitaxial wafer
Grant 10,453,682 - Iwanaga , et al. Oc | 2019-10-22 |
Method for producing semiconductor epitaxial wafer and method of producing solid-state imaging device
Grant 10,396,120 - Kadono , et al. A | 2019-08-27 |
Method of producing semiconductor epitaxial wafer and method of producing solid-state image sensor
Grant 10,224,203 - Hirose , et al. | 2019-03-05 |
Method For Producing Semiconductor Epitaxial Wafer And Method Of Producing Solid-state Imaging Device
App 20180374891 - KADONO; Takeshi ; et al. | 2018-12-27 |
Epitaxial Wafer Manufacturing Method And Epitaxial Wafer
App 20180286677 - IWANAGA; Takuro ; et al. | 2018-10-04 |
Epitaxial wafer manufacturing method and epitaxial wafer
Grant 10,062,569 - Iwanaga , et al. August 28, 2 | 2018-08-28 |
Method of producing semiconductor epitaxial wafer, semiconductor epitaxial wafer, and method of producing solid-state image sensing device
Grant 9,847,370 - Kadono , et al. December 19, 2 | 2017-12-19 |
Method Of Producing Semiconductor Epitaxial Wafer And Method Of Producing Solid-state Image Sensor
App 20170352545 - HIROSE; Ryo ; et al. | 2017-12-07 |
Semiconductor Epitaxial Wafer And Method Of Producing The Same, And Method Of Producing Solid-state Image Sensing Device
App 20170256668 - OKUYAMA; Ryosuke ; et al. | 2017-09-07 |
Method Of Producing Semiconductor Epitaxial Wafer, Semiconductor Epitaxial Wafer, And Method Of Producing Solid-state Image Sensing Device
App 20170077171 - Kadono; Takeshi ; et al. | 2017-03-16 |
Epitaxial Wafer Manufacturing Method And Epitaxial Wafer
App 20160351393 - IWANAGA; Takuro ; et al. | 2016-12-01 |
Method of producing semiconductor epitaxial wafer, semiconductor epitaxial wafer, and method of producing solid-state image sensing device
Grant 9,496,139 - Kadono , et al. November 15, 2 | 2016-11-15 |
Method Of Producing Semiconductor Epitaxial Wafer, Semiconductor Epitaxial Wafer, And Method Of Producing Solid-state Image Sensing Device
App 20160181312 - Kadono; Takeshi ; et al. | 2016-06-23 |
Method Of Producing Semiconductor Epitaxial Wafer, Semiconductor Epitaxial Wafer, And Method Of Producing Solid-state Image Sensing Device
App 20160181313 - Kadono; Takeshi ; et al. | 2016-06-23 |
Method Of Producing Semiconductor Epitaxial Wafer, Semiconductor Epitaxial Wafer, And Method Of Producing Solid-state Image Sensing Device
App 20160181311 - Kadono; Takeshi ; et al. | 2016-06-23 |
Epitaxial substrate for solid-state imaging device with gettering sink, semiconductor device, back illuminated solid-state imaging device and manufacturing method thereof
Grant 9,281,197 - Kurita March 8, 2 | 2016-03-08 |
Silicon substrate and manufacturing method of the same
Grant 8,864,907 - Kurita , et al. October 21, 2 | 2014-10-21 |
Method Of Producing Semiconductor Epitaxial Wafer, Semiconductor Epitaxial Wafer, And Method Of Producing Solid-state Image Sensing Device
App 20140080247 - Kadono; Takeshi ; et al. | 2014-03-20 |
Method of producing silicon wafer, epitaxial wafer and solid state image sensor, and device for producing silicon wafer
Grant 8,658,516 - Kurita February 25, 2 | 2014-02-25 |
Semiconductor substrate for solid-state imaging sensing device as well as solid-state image sensing device and method for producing the same
Grant 8,492,193 - Kurita July 23, 2 | 2013-07-23 |
Method and apparatus for manufacturing semiconductor substrate dedicated to semiconductor device, and method and apparatus for manufacturing semiconductor device
Grant 8,357,592 - Kurita January 22, 2 | 2013-01-22 |
Wafer For Backside Illumination Type Solid Imaging Device, Production Method Thereof And Backside Illumination Solid Imaging Device
App 20120329204 - Kurita; Kazunari ; et al. | 2012-12-27 |
Method of producing epitaxial substrate with gettering for solid-state imaging device, and method of producing solid-state imaging device using same substrate
Grant 8,309,436 - Kurita November 13, 2 | 2012-11-13 |
High resistivity silicon wafer and method for manufacturing the same
Grant 8,263,484 - Kurita September 11, 2 | 2012-09-11 |
Method of producing semiconductor wafer
Grant 8,124,501 - Kurita February 28, 2 | 2012-02-28 |
Semiconductor Substrate For Solid-state Image Sensing Device As Well As Solid-state Image Sensing Device And Method For Producing The Same
App 20120021558 - KURITA; Kazunari | 2012-01-26 |
Silicon substrate and manufacturing method thereof
Grant 8,101,508 - Kurita , et al. January 24, 2 | 2012-01-24 |
Epitaxial Substrate And Method For Producing Same
App 20110300371 - Omote; Shuichi ; et al. | 2011-12-08 |
Semiconductor substrate for solid-state image sensing device as well as solid-state image sensing device and method for producing the same
Grant 8,063,466 - Kurita November 22, 2 | 2011-11-22 |
Epitaxial Substrate For Solid-state Imaging Device With Gettering Sink, Semiconductor Device, Back Illuminated Solid-state Imaging Device And Manufacturing Method Thereof
App 20110248372 - Kurita; Kazunari | 2011-10-13 |
Method of detecting heavy metal in semiconductor substrate
Grant 7,993,942 - Kurita August 9, 2 | 2011-08-09 |
Method Of Producing Silicon Wafer, Epitaxial Wafer And Solid State Image Sensor, And Device For Producing Silicon Wafer
App 20110189805 - Kurita; Kazunari | 2011-08-04 |
Method for producing wafer for backside illumination type solid imaging device
Grant 7,960,249 - Kurita , et al. June 14, 2 | 2011-06-14 |
High frequency diode and method for producing same
Grant 7,919,776 - Kurita April 5, 2 | 2011-04-05 |
Silicon substrate and manufacturing method thereof
Grant 7,915,145 - Kurita , et al. March 29, 2 | 2011-03-29 |
Epitaxial Substrate For Back-illuminated Image Sensor And Manufacturing Method Thereof
App 20110049664 - Kurita; Kazunari | 2011-03-03 |
High frequency diode and method for producing same
Grant 7,893,434 - Kurita February 22, 2 | 2011-02-22 |
Thin silicon wafer and method of manufacturing the same
Grant 7,879,695 - Kurita , et al. February 1, 2 | 2011-02-01 |
Method Of Producing Epitaxial Substrate For Solid-state Imaging Device, And Method Of Producing Solid-state Imaging Device
App 20100311199 - KURITA; Kazunari | 2010-12-09 |
Method And Apparatus For Manufacturing Semiconductor Substrate Dedicated To Semiconductor Device, And Method And Apparatus For Manufacturing Semiconductor Device
App 20100304552 - KURITA; Kazunari | 2010-12-02 |
Process for producing high-resistance silicon wafers and process for producing epitaxial wafers and SOI wafers
Grant 7,803,228 - Kurita , et al. September 28, 2 | 2010-09-28 |
High Resistivity Silicon Wafer And Method For Manufacturing The Same
App 20100224968 - Kurita; Kazunari | 2010-09-09 |
Semiconductor Substrate For Solid-state Image Sensing Device As Well As Solid-state Image Sensing Device And Method For Producing The Same
App 20100148297 - Kurita; Kazunari | 2010-06-17 |
Method For Producing Wafer For Backside Illumination Type Solid Imaging Device
App 20100062584 - Kurita; Kazunari ; et al. | 2010-03-11 |
Method For Producing Wafer For Backside Illumination Type Solid Imaging Device
App 20100047953 - KURITA; Kazunari ; et al. | 2010-02-25 |
Wafer For Backside Illumination Type Solid Imaging Device, Production Method Thereof And Backside Illumination Type Solid Imaging Device
App 20100025799 - Kurita; Kazunari | 2010-02-04 |
Silicon Substrate For Solid-state Imaging Device And Method For Manufacturing The Same
App 20090321883 - KURITA; Kazunari | 2009-12-31 |
Wafer For Backside Illumination Type Solid Imaging Device, Production Method Thereof And Backside Illumination Solid Imaging Device
App 20090289283 - Kurita; Kazunari ; et al. | 2009-11-26 |
Silicon wafer and method for producing same
Grant 7,621,996 - Kurita November 24, 2 | 2009-11-24 |
Method Of Producing Semiconductor Wafer
App 20090280623 - KURITA; Kazunari | 2009-11-12 |
Thin Silicon Wafer And Method Of Manufacturing The Same
App 20090256241 - KURITA; Kazunari ; et al. | 2009-10-15 |
Method Of Detecting Heavy Metal In Semiconductor Substrate
App 20090258447 - KURITA; Kazunari | 2009-10-15 |
Silicon Wafer And Production Method Thereof
App 20090252944 - KURITA; Kazunari ; et al. | 2009-10-08 |
Wafer For Backside Illumination Type Solid Imaging Device, Production Method Thereof And Backside Illumination Solid Imaging Device
App 20090242939 - KURITA; Kazunari ; et al. | 2009-10-01 |
Carbon-doped Single Crystal Manufacturing Method
App 20090235861 - FUJIWARA; Hideki ; et al. | 2009-09-24 |
Method Of Manufacturing Silicon Substrate
App 20090226736 - KURITA; Kazunari ; et al. | 2009-09-10 |
Silicon Substrate And Manufacturing Method Thereof
App 20090224367 - KURITA; Kazunari ; et al. | 2009-09-10 |
Silicon Substrate And Manufacturing Method Of The Same
App 20090226737 - KURITA; Kazunari ; et al. | 2009-09-10 |
Silicon Substrate And Manufacturing Method Thereof
App 20090218661 - Kurita; Kazunari ; et al. | 2009-09-03 |
Silicon wafer and method for producing same
Grant 7,560,163 - Kurita July 14, 2 | 2009-07-14 |
High Frequency Diode And Method For Producing Same
App 20090117719 - Kurita; Kazunari | 2009-05-07 |
Method for producing silicon wafer
Grant 7,507,640 - Kurita March 24, 2 | 2009-03-24 |
Silicon Wafer And Method For Producing Same
App 20090000537 - Kurita; Kazunari | 2009-01-01 |
High frequency diode and method for producing same
App 20080006823 - Kurita; Kazunari | 2008-01-10 |
Method for producing silicon wafer
App 20070207595 - Kurita; Kazunari | 2007-09-06 |
Method for measuring point defect distribution of silicon single crystal ingot
Grant 7,244,306 - Kurita , et al. July 17, 2 | 2007-07-17 |
Process for producing high-resistance silicon wafers and process for producing epitaxial wafers and soi wafers (as amended)
App 20070066033 - Kurita; Kazunari ; et al. | 2007-03-22 |
Method of identifying defect distribution in silicon single crystal ingot
Grant 7,074,271 - Furukawa , et al. July 11, 2 | 2006-07-11 |
Method for measuring point defect distribution of silicon single crystal ingot
App 20060130738 - Kurita; Kazunari ; et al. | 2006-06-22 |
Method of identifying defect distribution in silicon single crystal ingot
App 20050183660 - Furukawa, Jun ; et al. | 2005-08-25 |
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