Kuribayashi; Akihiro
Patent Applications and Registrations
Patent applications and USPTO patent grants for Kuribayashi; Akihiro.The latest application filed is for "substrate fixing device".
- Kuribayashi; Akihiro - Nirasaki JP
- Kuribayashi; Akihiro - Nagano-shi JP
- KURIBAYASHI; Akihiro - Yamanashi JP
- KURIBAYASHI; Akihiro - Nirasaki City JP
- Kuribayashi; Akihiro - Nagano JP
| Patent | Date |
|---|---|
| Film forming method and film forming apparatus Grant 11,201,053 - Fukiage , et al. December 14, 2 | 2021-12-14 |
| Electrostatic Chuck And Substrate Fixing Device App 20210242065 - Kobayashi; Hiroyuki ; et al. | 2021-08-05 |
| Substrate Fixing Device App 20210243845 - Kuribayashi; Akihiro ; et al. | 2021-08-05 |
| Cleaning Method Of Deposition Apparatus App 20200299835 - OGAWA; Jun ; et al. | 2020-09-24 |
| Film Forming Method And Film Forming Apparatus App 20200294787 - FUKIAGE; Noriaki ; et al. | 2020-09-17 |
| Film forming method and film forming apparatus Grant 10,714,332 - Fukiage , et al. | 2020-07-14 |
| Temperature adjustment device Grant 10,090,176 - Kuribayashi October 2, 2 | 2018-10-02 |
| Film Forming Apparatus App 20180135170 - FUKIAGE; Noriaki ; et al. | 2018-05-17 |
| Film forming method and film forming apparatus Grant 9,922,820 - Fukiage , et al. March 20, 2 | 2018-03-20 |
| Film forming method and film forming apparatus Grant 9,892,909 - Fukiage , et al. February 13, 2 | 2018-02-13 |
| Film Forming Method and Film Forming Apparatus App 20170271143 - FUKIAGE; Noriaki ; et al. | 2017-09-21 |
| Method Of Forming Nitride Film App 20170218517 - FUKIAGE; Noriaki ; et al. | 2017-08-03 |
| Film Forming Methd and Film Forming Apparatus App 20170221703 - FUKIAGE; Noriaki ; et al. | 2017-08-03 |
| Film Forming Method And Film Forming Apparatus App 20170186606 - FUKIAGE; Noriaki ; et al. | 2017-06-29 |
| Temperature Adjustment Device App 20150270149 - Kuribayashi; Akihiro | 2015-09-24 |
| Electrostatic chuck and method for manufacturing electrostatic chuck Grant 9,019,684 - Kuribayashi April 28, 2 | 2015-04-28 |
| Electrostatic Chuck And Method For Manufacturing Electrostatic Chuck App 20130321974 - Kuribayashi; Akihiro | 2013-12-05 |
| Electrostatic chuck Grant 8,542,474 - Yonekura , et al. September 24, 2 | 2013-09-24 |
| Substrate Temperature Adjusting-fixing Device And Manufacturing Method Thereof App 20130148253 - KOMATSU; Hidehiro ; et al. | 2013-06-13 |
| Electrostatic Chuck App 20110096460 - YONEKURA; Hiroshi ; et al. | 2011-04-28 |
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