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Patent applications and USPTO patent grants for KURGANOVA; Evgenia.The latest application filed is for "method and apparatus for forming a patterned layer of material".
Patent | Date |
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Method And Apparatus For Forming A Patterned Layer Of Material App 20220213593 - DRUZHININA; Tamara ;   et al. | 2022-07-07 |
Metal-silicide-nitridation For Stress Reduction App 20220187701 - VAN ZWOL; Pieter-Jan ;   et al. | 2022-06-16 |
Pellicle And Pellicle Assembly App 20220121111 - VLES; David Ferdinand ;   et al. | 2022-04-21 |
Metal-silicide-nitridation for stress reduction Grant 11,287,737 - Van Zwol , et al. March 29, 2 | 2022-03-29 |
Method Of Manufacturing A Membrane Assembly App 20220035239 - VAN ZWOL; Pieter-Jan ;   et al. | 2022-02-03 |
Pellicle and pellicle assembly Grant 11,231,646 - Vles , et al. January 25, 2 | 2022-01-25 |
Metal-silicide-nitridation For Stress Reduction App 20210181618 - VAN ZWOL; Pieter-Jan ;   et al. | 2021-06-17 |
Method And Apparatus For Forming A Patterned Layer Of Material App 20210079519 - DE JAGER; Pieter Willem Herman ;   et al. | 2021-03-18 |
Graphene Pellicle Lithographic Apparatus App 20200406244 - KURGANOVA; Evgenia ;   et al. | 2020-12-31 |
Pellicle And Pellicle Assembly App 20200209736 - VLES; David Ferdinand ;   et al. | 2020-07-02 |
Simultaneous Double-side Coating Of Multilayer Graphene Pellicle By Local Thermal Processing App 20200159107 - KURGANOVA; Evgenia ;   et al. | 2020-05-21 |
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