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Method for cleaning piping and cleaning system for piping
Grant 9,744,569 - Suematsu , et al. August 29, 2 | 2017-08-29 |
Method For Cleaning Piping And Cleaning System For Piping
App 20150298179 - SUEMATSU; Takaaki ; et al. | 2015-10-22 |
Sample surface processing method
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Semiconductor intergrated circuit device and process for producing the same
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Semiconductor integrated circuit device and process for producing the same
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Surface processing method of a specimen and surface processing apparatus of the specimen
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Semiconductor memory device
Grant 6,878,586 - Kimura , et al. April 12, 2 | 2005-04-12 |
Method and apparatus for treating surface of semiconductor
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Semiconductor integrated circuit device and process for producing the same
App 20050014326 - Kobayashi, Takashi ; et al. | 2005-01-20 |
Surface processing method of a specimen and surface processing apparatus of the specimen
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Semiconductor integrated circuit device and process for producing the same
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Method and apparatus for treating surface of semiconductor
Grant 6,767,838 - Ono , et al. July 27, 2 | 2004-07-27 |
Sample surface processing method
App 20040058541 - Ono, Tetsuo ; et al. | 2004-03-25 |
Specimen surface processing method
Grant 6,677,244 - Ono , et al. January 13, 2 | 2004-01-13 |
Method for processing surface of sample
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Semiconductor memory device
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Semiconductor memory device with recessed array region
Grant RE38,296 - Moriuchi , et al. November 4, 2 | 2003-11-04 |
Method And Apparatus For Treating Surface Of Semiconductor
App 20030132198 - ONO, TETSUO ; et al. | 2003-07-17 |
Plasma processing method
App 20020125207 - Ono, Tetsuo ; et al. | 2002-09-12 |
Plasma processing method
App 20020123229 - Ono, Tetsuo ; et al. | 2002-09-05 |
Semiconductor integrated circuit device having memory cells
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Scanning electron microscope and method for dimension measuring by using the same
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Scanning electron microscope and method for dimension measuring by using the same
Grant 5,969,357 - Todokoro , et al. October 19, 1 | 1999-10-19 |
Method and apparatus for X-ray analyses
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Scanning electron microscope and method for dimension measuring by using the same
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Method and apparatus for x-ray analyses
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Scanning electron microscope and method for dimension measuring by using the same
Grant 5,594,245 - Todokoro , et al. January 14, 1 | 1997-01-14 |
Semiconductor memory device having stacked capacitors
Grant 5,583,358 - Kimura , et al. December 10, 1 | 1996-12-10 |
Surface analysis method and apparatus for carrying out the same
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Semiconductor memory with trench capacitor
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Semiconductor memory having writing and reading transistors, method of fabrication thereof, and method of use thereof
Grant 5,357,464 - Shukuri , et al. October 18, 1 | 1994-10-18 |
Etching method and etching apparatus therefor
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Semiconductor device having a low-resistivity planar wiring structure
Grant 5,200,635 - Kaga , et al. April 6, 1 | 1993-04-06 |
Semiconductor memory device with recessed array region
Grant 5,196,910 - Moriuchi , et al. March 23, 1 | 1993-03-23 |
Dynamic random access memory having trench capacitors and vertical transistors
Grant 5,177,576 - Kimura , et al. January 5, 1 | 1993-01-05 |
Semiconductor memory device having stacked capacitor cells
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Semiconductor device and method of manufacturing the same
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Semiconductor device having an arrangement of IGFETs and capacitors stacked thereover
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Transistor with overlapping gate/drain and two-layered gate structures
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Dry etching by alternately etching and depositing
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Vertical MOSFET DRAM
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Semiconductor memory and method of producing the same
Grant 4,984,038 - Sunami , et al. January 8, 1 | 1991-01-08 |
Semiconductor memory device having stacked capacitor cells
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Method of making a semiconductor memory device with recessed array region
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Method for formation of insulation film on silicon buried in trench
Grant 4,873,203 - Kaga , et al. October 10, 1 | 1989-10-10 |
Semiconductor memory using trench capacitor
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Tapered groove IC isolation
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Gas for selectively etching silicon nitride and process for selectively etching silicon nitride with the gas
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Method of forming groove isolation in a semiconductor device
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