KUPERS; Michiel

Patent Applications and Registrations

Patent applications and USPTO patent grants for KUPERS; Michiel.The latest application filed is for "methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus".

Company Profile

9.9.12

KUPERS; Michiel - Roermond NL
Kupers; Michiel - Dresden N/A DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Methods Of Determining Corrections For A Patterning Process, Device Manufacturing Method, Control System For A Lithographic Apparatus And Lithographic Apparatus App 20220229373 - KOU; Weitian ; et al.	2022-07-21
Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus Grant 11,327,407 - Kou , et al. May 10, 2	2022-05-10
Method Of Obtaining Measurements, Apparatus For Performing A Process Step, And Metrology Apparatus App 20220035259 - CEKLI; Hakki Ergun ; et al.	2022-02-03
Method of obtaining measurements, apparatus for performing a process step, and metrology apparatus Grant 11,175,591 - Cekli , et al. November 16, 2	2021-11-16
Method And Apparatus For Optimization Of Lithographic Process App 20210349402 - HAUPTMANN; Marc ; et al.	2021-11-11
Method and apparatus for optimization of lithographic process Grant 11,099,487 - Hauptmann , et al. August 24, 2	2021-08-24
Methods Of Determining Corrections For A Patterning Process, Device Manufacturing Method, Control System For A Lithographic Apparatus And Lithographic Apparatus App 20210080836 - KOU; Weitian ; et al.	2021-03-18
Methods of controlling a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus Grant 10,908,512 - Slotboom , et al. February 2, 2	2021-02-02
Methods of determining corrections for a patterning process Grant 10,877,381 - Kou , et al. December 29, 2	2020-12-29
Methods & Apparatus For Controlling An Industrial Process App 20200050180 - KOU; Weitian ; et al.	2020-02-13
Method And Apparatus For Optimization Of Lithographic Process App 20200026201 - HAUPTMANN; Marc ; et al.	2020-01-23
Methods Of Determining Corrections For A Patterning Process App 20200019067 - KOU; Weitian ; et al.	2020-01-16
Method Of Obtaining Measurements, Apparatus For Performing A Process Step, And Metrology Apparatus App 20190137892 - CEKLI; Hakki Ergun ; et al.	2019-05-09
Method of sequencing lots for a lithographic apparatus Grant 10,281,825 - Kupers , et al.	2019-05-07
Method Of Sequencing Lots For A Lithographic Apparatus App 20190072857 - KUPERS; Michiel ; et al.	2019-03-07
Methods Of Controlling A Patterning Process, Device Manufacturing Method, Control System For A Lithographic Apparatus And Lithographic Apparatus App 20180373162 - SLOTBOOM; Daan Maurits ; et al.	2018-12-27
Alignment calculation Grant 8,440,475 - Habets , et al. May 14, 2	2013-05-14
Systems and methods of alternative overlay calculation Grant 7,783,444 - Habets , et al. August 24, 2	2010-08-24
Alignment Calculation App 20100030360 - Habets; Boris ; et al.	2010-02-04
Systems and Methods of Alternative Overlay Calculation App 20090248337 - Habets; Boris ; et al.	2009-10-01

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