Kuo; Teng-Fang
Patent Applications and Registrations
Patent applications and USPTO patent grants for Kuo; Teng-Fang.The latest application filed is for "chamber component with protective ceramic coating containing yttrium, aluminum and oxygen".
- Kuo; Teng-Fang - Santa Clara CA
- Kuo; Teng-fang - San Jose CA
- Kuo; Teng-Fang - Kaohsiung TW
| Patent | Date |
|---|---|
| Chamber Component With Protective Ceramic Coating Containing Yttrium, Aluminum And Oxygen App 20220254672 - Boyd, Jr.; Wendell Glenn ; et al. | 2022-08-11 |
| Cleaning method Grant 11,087,979 - Olsen , et al. August 10, 2 | 2021-08-10 |
| Cleaning method Grant 10,861,693 - Stone , et al. December 8, 2 | 2020-12-08 |
| Substrate Support Assembly With Deposited Surface Features App 20200243368 - Boyd, JR.; Wendell Glenn ; et al. | 2020-07-30 |
| Substrate support assembly with deposited surface features Grant 10,679,885 - Boyd, Jr. , et al. | 2020-06-09 |
| Cleaning Method App 20190172712 - OLSEN; Christopher S. ; et al. | 2019-06-06 |
| Cleaning method Grant 10,199,221 - Olsen , et al. Fe | 2019-02-05 |
| Substrate Support Assembly With Deposited Surface Features App 20180301364 - Boyd, JR.; Wendell Glenn ; et al. | 2018-10-18 |
| Substrate support assembly with deposited surface features Grant 10,020,218 - Boyd, Jr. , et al. July 10, 2 | 2018-07-10 |
| Device conformity control by low temperature, low pressure, inductively coupled ammonia-nitrogen trifluoride plasma Grant 10,008,388 - Hsieh , et al. June 26, 2 | 2018-06-26 |
| Cleaning Method App 20180138038 - OLSEN; Christopher S. ; et al. | 2018-05-17 |
| Cleaning method Grant 9,870,921 - Olsen , et al. January 16, 2 | 2018-01-16 |
| Methods for removing contamination from surfaces in substrate processing systems Grant 9,805,914 - Yan , et al. October 31, 2 | 2017-10-31 |
| Device Conformity Control By Low Temperature, Low Pressure, Inductively Coupled Ammonia-nitrogen Trifluoride Plasma App 20170301556 - HSIEH; Ping Han ; et al. | 2017-10-19 |
| Cleaning Method App 20170178894 - STONE; Peter ; et al. | 2017-06-22 |
| Substrate Support Assembly With Deposited Surface Features App 20170140970 - Boyd, JR.; Wendell Glenn ; et al. | 2017-05-18 |
| Cleaning Method App 20170084456 - OLSEN; Christopher S. ; et al. | 2017-03-23 |
| Methods For Removing Contamination From Surfaces In Substrate Processing Systems App 20160293384 - YAN; Chun ; et al. | 2016-10-06 |
| CVD oxide surface pre-conditioning by inductively coupled O2 plasma Grant 9,240,315 - Hsieh , et al. January 19, 2 | 2016-01-19 |
| Thermal pyrolysising chemical vapor deposition method for synthesizing nano-carbon material Grant 7,226,643 - Juang , et al. June 5, 2 | 2007-06-05 |
| Thermal cracking chemical vapor deposition method for synthesizing nano-carbon material App 20030138561 - Juang, Zhen-Yu ; et al. | 2003-07-24 |
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