| Patent | Date |
|---|
Defect offset correction
Grant 11,430,108 - Liao , et al. August 30, 2 | 2022-08-30 |
Systems And Methods For Raised Floor Automated Sensor Vehicles
App 20220261001 - HU; Cheng-Kang ; et al. | 2022-08-18 |
Gas tube, gas supply system and manufacturing method of semiconductor device using the same
Grant 11,414,757 - Chen , et al. August 16, 2 | 2022-08-16 |
Systems and methods for raised floor automated sensor vehicles
Grant 11,334,080 - Hu , et al. May 17, 2 | 2022-05-17 |
Vacuum Wafer Chuck For Manufacturing Semiconductor Devices
App 20220059393 - LEE; Chien-Fa ; et al. | 2022-02-24 |
Automated Inspection Tool
App 20220059415 - Lin; Chia-Han ; et al. | 2022-02-24 |
Method And System For Map-free Inspection Of Semiconductor Devices
App 20220059376 - LIAO; Becky ; et al. | 2022-02-24 |
Automated inspection tool
Grant 11,171,065 - Lin , et al. November 9, 2 | 2021-11-09 |
Semiconductor processing stage profiler jig
Grant 11,152,238 - Hu , et al. October 19, 2 | 2021-10-19 |
Methods for selectively forming identification mark on semiconductor wafer
Grant 11,121,093 - Peng , et al. September 14, 2 | 2021-09-14 |
Topological scanning method and system
Grant 11,120,539 - Chuang , et al. September 14, 2 | 2021-09-14 |
System And Method For Ring Frame Cleaning And Inspection
App 20210257247 - LEE; Chien-Fa ; et al. | 2021-08-19 |
Automated Transfer And Drying Tool For Process Chamber
App 20210242085 - Kuo; Tsung-Sheng ; et al. | 2021-08-05 |
System and method for ring frame cleaning and inspection
Grant 11,004,720 - Lee , et al. May 11, 2 | 2021-05-11 |
Automated transfer and drying tool for process chamber
Grant 10,991,625 - Kuo , et al. April 27, 2 | 2021-04-27 |
Device positioning using sensors
Grant 10,971,386 - Chen , et al. April 6, 2 | 2021-04-06 |
Device Positioning Using Sensors
App 20210082718 - CHEN; Yan-Han ; et al. | 2021-03-18 |
Defect Offset Correction
App 20210065347 - LIAO; Chien-Ko ; et al. | 2021-03-04 |
Semiconductor Equipment Management Method, Electronic Device, And Non-transitory Computer Readable Storage Medium
App 20210063984 - Li; Sing-Tsung ; et al. | 2021-03-04 |
Efem Robot Auto Teaching Methodology
App 20210043481 - Lee; Chien-Fa ; et al. | 2021-02-11 |
Apparatus and method for substrate inspection
Grant 10,876,976 - Shih , et al. December 29, 2 | 2020-12-29 |
Automatic in-line inspection system
Grant 10,872,794 - Liao , et al. December 22, 2 | 2020-12-22 |
EFEM robot auto teaching methodology
Grant 10,861,723 - Lee , et al. December 8, 2 | 2020-12-08 |
Semiconductor equipment management method, electronic device, and non-transitory computer readable storage medium
Grant 10,852,704 - Li , et al. December 1, 2 | 2020-12-01 |
Defect offset correction
Grant 10,839,507 - Liao , et al. November 17, 2 | 2020-11-17 |
Apparatus And Method For Inspecting Wafer Carriers
App 20200343115 - HU; Cheng-Kang ; et al. | 2020-10-29 |
Integrated Chip Die Carrier Exchanger
App 20200251367 - Kind Code | 2020-08-06 |
Techniques for detecting micro-arcing occurring inside a semiconductor processing chamber
Grant 10,734,206 - Wu , et al. | 2020-08-04 |
Automated Transfer And Drying Tool For Process Chamber
App 20200243393 - Kuo; Tsung-Sheng ; et al. | 2020-07-30 |
Apparatus and method for inspecting wafer carriers
Grant 10,714,364 - Hu , et al. | 2020-07-14 |
Method And Apparatus For Multi-spray Rrc Process With Dynamic Control
App 20200192225 - CHUANG; Ming-Hsuan ; et al. | 2020-06-18 |
Integrated chip die carrier exchanger
Grant 10,665,489 - Lee , et al. | 2020-05-26 |
Automated transfer and drying tool for process chamber
Grant 10,665,507 - Kuo , et al. | 2020-05-26 |
Mini identification mark in die-less region of semiconductor wafer
Grant 10,643,951 - Peng , et al. | 2020-05-05 |
Techniques For Detecting Micro-arcing Occurring Inside A Semiconductor Processing Chamber
App 20200111652 - Wu; Feng-Kuang ; et al. | 2020-04-09 |
Apparatus And Method For Substrate Inspection
App 20200072760 - SHIH; BO-HAN ; et al. | 2020-03-05 |
Techniques for detecting micro-arcing occurring inside a semiconductor processing chamber
Grant 10,559,453 - Wu , et al. Feb | 2020-02-11 |
Automated Inspection Tool
App 20200043812 - Lin; Chia-Han ; et al. | 2020-02-06 |
Mini Identification Mark
App 20200013726 - Peng; Yue-Lin ; et al. | 2020-01-09 |
System And Method For Ring Frame Cleaning And Inspection
App 20190363002 - Lee; Chien-Fa ; et al. | 2019-11-28 |
Automated inspection tool
Grant 10,490,463 - Lin , et al. Nov | 2019-11-26 |
Topological Scanning Method And System
App 20190244343 - CHUANG; Sheng-Hsiang ; et al. | 2019-08-08 |
Defect Offset Correction
App 20190164265 - Liao; Chien-Ko ; et al. | 2019-05-30 |
Semiconductor Processing Stage Profiler Jig
App 20190164793 - HU; Cheng-Kang ; et al. | 2019-05-30 |
Semiconductor Equipment Management Method, Electronic Device, And Non-transitory Computer Readable Storage Medium
App 20190163149 - Li; Sing-Tsung ; et al. | 2019-05-30 |
Detaping Machine And Detaping Method
App 20190148187 - Kuo; Tsung-Sheng ; et al. | 2019-05-16 |
Gas Tube, Gas Supply System And Manufacturing Method Of Semiconductor Device Using The Same
App 20190145003 - Chen; Yi-Shiung ; et al. | 2019-05-16 |
Detaping machine and detaping method
Grant 10,283,388 - Kuo , et al. | 2019-05-07 |
Techniques For Detecting Micro-arcing Occurring Inside A Semiconductor Processing Chamber
App 20190131116 - Wu; Feng-Kuang ; et al. | 2019-05-02 |
Automated Transfer And Drying Tool For Process Chamber
App 20190103314 - Kuo; Tsung-Sheng ; et al. | 2019-04-04 |
Efem Robot Auto Teaching Methodology
App 20190051546 - Lee; Chien-Fa ; et al. | 2019-02-14 |
Automated Inspection Tool
App 20190035696 - Lin; Chia-Han ; et al. | 2019-01-31 |
Mini Identification Mark
App 20190019760 - Peng; Yue-Lin ; et al. | 2019-01-17 |
Techniques for detecting micro-arcing occurring inside a semiconductor processing chamber
Grant 10,170,287 - Wu , et al. J | 2019-01-01 |
Automatic In-line Inspection System
App 20180366357 - LIAO; Chien-Ko ; et al. | 2018-12-20 |
Integrated Chip Die Carrier Exchanger
App 20170372932 - Lee; Chien-Fa ; et al. | 2017-12-28 |
Load port and method for loading and unloading cassette
Grant 9,852,936 - Lee , et al. December 26, 2 | 2017-12-26 |
Wafer transfer method and system
Grant 9,786,530 - Lee , et al. October 10, 2 | 2017-10-10 |
Method and structure for nitrogen-doped shallow-trench isolation dielectric
Grant 9,460,957 - Lee , et al. October 4, 2 | 2016-10-04 |
Load Port And Method For Loading And Unloading Cassette
App 20160225649 - LEE; Chien-Fa ; et al. | 2016-08-04 |
Wafer Transfer Method And System
App 20160111311 - LEE; Chien-Fa ; et al. | 2016-04-21 |
Method and Structure for Nitrogen-Doped Shallow-Trench Isolation Dielectric
App 20140264720 - Lee; Shing Long ; et al. | 2014-09-18 |
| 