loadpatents
Patent applications and USPTO patent grants for KUO; Chueh-Chi.The latest application filed is for "semiconductor processing method and apparatus".
Patent | Date |
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Substrate Holder And Methods Of Use App 20220310432 - TSAI; Yu-Chi ;   et al. | 2022-09-29 |
Semiconductor Processing Method And Apparatus App 20220310431 - DENG; Shang-Shiuan ;   et al. | 2022-09-29 |
System And Method For Cleaning An Euv Mask Within A Scanner App 20220299882 - Huang; Yuru ;   et al. | 2022-09-22 |
Method Of Lithography Process Using Reticle Container With Discharging Device App 20220260901 - CHANG; Hsiao-Lun ;   et al. | 2022-08-18 |
Reticle with conductive material structure Grant 11,320,733 - Chang , et al. May 3, 2 | 2022-05-03 |
Lithography System And Method Thereof App 20220066331 - WANG; Shao-Hua ;   et al. | 2022-03-03 |
Method and apparatus for lithography in semiconductor fabrication Grant 11,121,018 - Kuo , et al. September 14, 2 | 2021-09-14 |
Reticle With Conductive Material Structure App 20210026236 - CHANG; Hsiao-Lun ;   et al. | 2021-01-28 |
Method And Apparatus For Lithography In Semiconductor Fabrication App 20200350194 - KUO; Chueh-Chi ;   et al. | 2020-11-05 |
Method for discharging static charges on reticle Grant 10,802,394 - Chang , et al. October 13, 2 | 2020-10-13 |
Method and apparatus for lithography in semiconductor fabrication Grant 10,714,371 - Kuo , et al. | 2020-07-14 |
Method For Discharging Static Charges On Reticle App 20190155139 - CHANG; Hsiao-Lun ;   et al. | 2019-05-23 |
Method And Apparatus For Lithography In Semiconductor Fabrication App 20190148203 - KUO; Chueh-Chi ;   et al. | 2019-05-16 |
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