loadpatents
Patent applications and USPTO patent grants for Kunst; Ronald Casper.The latest application filed is for "immersion lithographic apparatus and a device manufacturing method".
Patent | Date |
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Lithographic apparatus and device manufacturing method Grant 8,885,147 - Vervoordeldonk , et al. November 11, 2 | 2014-11-11 |
Servo control system, lithographic apparatus and control method Grant 8,830,442 - De Vos , et al. September 9, 2 | 2014-09-09 |
Immersion lithographic apparatus including a pressure sensor to measure pressure of the immersion liquid and a device manufacturing method Grant 8,786,830 - De Metsenaere , et al. July 22, 2 | 2014-07-22 |
Stage system and lithographic apparatus comprising such stage system Grant 8,279,407 - Kamidi , et al. October 2, 2 | 2012-10-02 |
Immersion Lithographic Apparatus and a Device Manufacturing Method App 20100290013 - DE METSENAERE; Christophe ;   et al. | 2010-11-18 |
Lithographic Apparatus And Device Manufacturing Method App 20100214548 - Vervoordeldonk; Michael Johannes ;   et al. | 2010-08-26 |
Stage system and lithographic apparatus comprising such stage system Grant 7,782,446 - Kamidi , et al. August 24, 2 | 2010-08-24 |
Stage system and lithographic apparatus comprising such a stage system Grant 7,742,149 - De Vos , et al. June 22, 2 | 2010-06-22 |
Lithographic apparatus and control method Grant 7,657,334 - De Vos , et al. February 2, 2 | 2010-02-02 |
Stage System and Lithographic Apparatus Comprising Such Stage System App 20090279067 - KAMIDI; Ramidin Izair ;   et al. | 2009-11-12 |
Servo Control System, Lithographic Apparatus and Control Method App 20090147236 - De Vos; Youssef Karel Maria ;   et al. | 2009-06-11 |
Stage system and lithographic apparatus comprising such a stage system App 20080309911 - Maria De Vos; Youssef Karel ;   et al. | 2008-12-18 |
Stage system and lithographic apparatus comprising such stage system App 20080212054 - Kamidi; Ramidin Izair ;   et al. | 2008-09-04 |
Lithographic apparatus and device manufacturing method Grant 7,379,156 - Kunst , et al. May 27, 2 | 2008-05-27 |
Lithographic apparatus and device manufacturing method Grant 7,256,866 - Cox , et al. August 14, 2 | 2007-08-14 |
Lithographic apparatus and control method App 20070067057 - De Vos; Youssef Karel Maria ;   et al. | 2007-03-22 |
Lithographic apparatus and device manufacturing method App 20060139590 - Kunst; Ronald Casper ;   et al. | 2006-06-29 |
Lithographic apparatus and device manufacturing method App 20060077364 - Cox; Henrikus Herman Marie ;   et al. | 2006-04-13 |
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