Kunkel; Gerhard

Patent Applications and Registrations

Patent applications and USPTO patent grants for Kunkel; Gerhard.The latest application filed is for "power semiconductor device and shadow-mask free method for producing such device".

Company Profile

0.16.21

Kunkel; Gerhard - Wohlen CH
Kunkel; Gerhard - Radebeul DE
Kunkel; Gerhard - Dresden DE
Kunkel; Gerhard - Fishkill NY

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Power Semiconductor Device and Shadow-Mask Free Method for Producing Such Device App 20210391481 - Papadopoulos; Charalampos ; et al.	2021-12-16
Memory devices including semiconductor pillars Grant 8,362,537 - Kunkel , et al. January 29, 2	2013-01-29
Memory Devices Including Semiconductor Pillars App 20120126301 - Kunkel; Gerhard ; et al.	2012-05-24
Memory Devices Including Semiconductor Pillars App 20100090263 - Kunkel; Gerhard ; et al.	2010-04-15
Method for Manufacturing Contact Openings, Method for Manufacturing an Integrated Circuit, an Integrated Circuit App 20090321940 - Kunkel; Gerhard ; et al.	2009-12-31
Method for adapting structure dimensions during the photolithographic projection of a pattern of structure elements onto a semiconductor wafer Grant 7,482,110 - Kunkel January 27, 2	2009-01-27
Photolithographic mask having half tone main features and perpendicular half tone assist features Grant 7,465,522 - Bauch , et al. December 16, 2	2008-12-16
Method for producing a phase mask Grant 7,462,426 - Henke , et al. December 9, 2	2008-12-09
Optimizing light path uniformity in inspection systems Grant 7,248,351 - Roberts , et al. July 24, 2	2007-07-24
System for analyzing images of blazed phase grating samples App 20060193531 - Roberts; William ; et al.	2006-08-31
Optimizing focal plane fitting functions for an image field on a substrate App 20060192943 - Roberts; William ; et al.	2006-08-31
Optimizing light path uniformity in inspection systems App 20060192947 - Roberts; William ; et al.	2006-08-31
Run to run control for lens aberrations App 20060194130 - Roberts; William ; et al.	2006-08-31
Phase-shift mask Grant 7,074,529 - Butt , et al. July 11, 2	2006-07-11
Mask and exposure device App 20060121365 - Kunkel; Gerhard ; et al.	2006-06-08
Method for adapting structure dimensions during the photolithographic projection of a pattern of structure elements onto a semiconductor wafer App 20060001858 - Kunkel; Gerhard	2006-01-05
Method for producing a phase mask App 20050196683 - Henke, Wolfgang ; et al.	2005-09-08
Buried bit line-field isolation defined active semiconductor areas Grant 6,911,687 - Mandelman , et al. June 28, 2	2005-06-28
Method for producing a mask adapted to an exposure apparatus App 20050106476 - Hassmann, Jens ; et al.	2005-05-19
Method for forming an opening on an alternating phase shift mask App 20050026049 - Ziebold, Ralf ; et al.	2005-02-03
Method of reducing pitch on semiconductor wafer Grant 6,842,222 - Kunkel , et al. January 11, 2	2005-01-11
Photolithographic mask App 20040256356 - Bauch, Lothar ; et al.	2004-12-23
Phase-shift mask App 20040229134 - Butt, Shahid ; et al.	2004-11-18
Apparatus for patterning a semiconductor wafer Grant 6,809,800 - Genz , et al. October 26, 2	2004-10-26
Method of reducing pitch on semiconductor wafer App 20040196445 - Kunkel, Gerhard ; et al.	2004-10-07
Enhanced overlay measurement marks for overlay alignment and exposure tool condition control Grant 6,727,989 - Yin , et al. April 27, 2	2004-04-27
Method for the characterization of an illumination source in an exposure apparatus App 20040027553 - Henke, Wolfgang ; et al.	2004-02-12
Apparatus for patterning a semiconductor wafer App 20030218727 - Genz, Oliver ; et al.	2003-11-27
Grating patterns and method for determination of azimuthal and radial aberration Grant 6,606,151 - Kunkel , et al. August 12, 2	2003-08-12
Grating patterns and method for determination of azimuthal and radial aberration App 20030020901 - Kunkel, Gerhard ; et al.	2003-01-30
Apparatus and method for patterning a semiconductor wafer App 20020127501 - Genz, Oliver ; et al.	2002-09-12
Method for removal of hard mask used to define noble metal electrode Grant 6,420,272 - Shen , et al. July 16, 2	2002-07-16
Self aligned trench and method of forming the same App 20020068400 - Kunkel, Gerhard ; et al.	2002-06-06
Method of improving the etch resistance of chemically amplified photoresists by introducing silicon after patterning Grant 6,379,869 - Schroeder , et al. April 30, 2	2002-04-30
Stacked capacitator memory cell and method of fabrication Grant 6,136,660 - Shen , et al. October 24, 2	2000-10-24
Stacked capacitor memory cell and method of manufacture Grant 6,083,788 - Lian , et al. July 4, 2	2000-07-04

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