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Patent applications and USPTO patent grants for Kung; Yao-Hsiung.The latest application filed is for "device used for detecting clamping force of processed object and method thereof".
Patent | Date |
---|---|
Wafer cleaning apparatus with multiple wash-heads Grant 7,252,099 - Chen , et al. August 7, 2 | 2007-08-07 |
Method and apparatus for detecting wafer flaw Grant 6,941,811 - Chen , et al. September 13, 2 | 2005-09-13 |
Device used for detecting clamping force of processed object and method thereof Grant 6,920,796 - Chen , et al. July 26, 2 | 2005-07-26 |
Device Used For Detecting Clamping Force Of Processed Object And Method Thereof App 20050103121 - Chen, Chih-Kun ;   et al. | 2005-05-19 |
Wafer cleaning apparatus with multiple wash-heads App 20050051200 - Chen, Chih-Kun ;   et al. | 2005-03-10 |
Method and apparatus for detecting wafer flaw App 20050028594 - Chen, Chih-Kun ;   et al. | 2005-02-10 |
Humidity sensor and fabrication method thereof Grant 6,834,547 - Chen , et al. December 28, 2 | 2004-12-28 |
Humidity sensor and fabrication method thereof App 20040040378 - Chen, Chih-Kun ;   et al. | 2004-03-04 |
Polishing pad showing intrinsic abrasion and fabrication method thereof App 20040038631 - Chen, Chih-Kun ;   et al. | 2004-02-26 |
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