| Patent | Date |
|---|
Gas Feed System For Surface Modified Depth Controlled Deposition For Plasma Based Deposition
App 20220301866 - Abel; Joseph ; et al. | 2022-09-22 |
Dynamic Process Control In Semiconductor Manufacturing
App 20220293442 - Kumar; Purushottam ; et al. | 2022-09-15 |
In-situ Control Of Film Properties During Atomic Layer Deposition
App 20220238325 - Agnew; Douglas Walter ; et al. | 2022-07-28 |
Dielectric Gapfill Using Atomic Layer Deposition (ald), Inhibitor Plasma And Etching
App 20220205096 - ABEL; Joseph ; et al. | 2022-06-30 |
Surface modified depth controlled deposition for plasma based deposition
Grant 11,373,862 - Abel , et al. June 28, 2 | 2022-06-28 |
Apparatus For Cleaning Plasma Chambers
App 20220181128 - LAVOIE; Adrien ; et al. | 2022-06-09 |
Method For Providing Doped Silicon
App 20220165563 - KUMAR; Purushottam ; et al. | 2022-05-26 |
Variable Cycle And Time Rf Activation Method For Film Thickness Matching In A Multi-station Deposition System
App 20220154336 - Karim; Ishtak ; et al. | 2022-05-19 |
Controller for controlling core critical dimension variation using flash trim sequence
Grant 11,322,416 - Agarwal , et al. May 3, 2 | 2022-05-03 |
Dielectric gapfill using atomic layer deposition (ALD), inhibitor plasma and etching
Grant 11,293,098 - Abel , et al. April 5, 2 | 2022-04-05 |
Systems and methods for flow monitoring in a precursor vapor supply system of a substrate processing system
Grant 11,255,017 - Qian , et al. February 22, 2 | 2022-02-22 |
Dynamic Precursor Dosing For Atomic Layer Deposition
App 20220033967 - Kumar; Purushottam ; et al. | 2022-02-03 |
Low-k Ald Gap-fill Methods And Material
App 20220037146 - Abel; Joseph R. ; et al. | 2022-02-03 |
Modifying Hydrophobicity Of A Wafer Surface Using An Organosilicon Precursor
App 20210384029 - Fields; Jeremy D. ; et al. | 2021-12-09 |
Dynamic precursor dosing for atomic layer deposition
Grant 11,180,850 - Kumar , et al. November 23, 2 | 2021-11-23 |
Ultrathin Atomic Layer Deposition Film Accuracy Thickness Control
App 20210343520 - Qian; Jun ; et al. | 2021-11-04 |
Ultrathin atomic layer deposition film accuracy thickness control
Grant 11,101,129 - Qian , et al. August 24, 2 | 2021-08-24 |
Symmetric Precursor Delivery
App 20210238743 - Jeon; Eli ; et al. | 2021-08-05 |
Method Of Improving Deposition Induced Cd Imbalance Using Spatially Selective Ashing Of Carbon Based Film
App 20210202250 - KARIM; Ishtak ; et al. | 2021-07-01 |
Symmetric precursor delivery
Grant 11,021,792 - Jeon , et al. June 1, 2 | 2021-06-01 |
Method of improving deposition induced CD imbalance using spatially selective ashing of carbon based film
Grant 10,978,302 - Karim , et al. April 13, 2 | 2021-04-13 |
Systems And Methods For Flow Monitoring In A Precursor Vapor Supply System Of A Substrate Processing System
App 20200407849 - QIAN; Jun ; et al. | 2020-12-31 |
Compensating chamber and process effects to improve critical dimension variation for trim process
Grant 10,847,352 - Agarwal , et al. November 24, 2 | 2020-11-24 |
Surface Modified Depth Controlled Deposition For Plasma Based Deposition
App 20200357636 - Abel; Joseph ; et al. | 2020-11-12 |
Atomic layer etch, reactive precursors and energetic sources for patterning applications
Grant 10,832,909 - LaVoie , et al. November 10, 2 | 2020-11-10 |
Controller for Controlling Core Critical Dimension Variation Using Flash Trim Sequence
App 20200350219 - Agarwal; Pulkit ; et al. | 2020-11-05 |
Method for controlling core critical dimension variation using flash trim sequence
Grant 10,727,143 - Agarwal , et al. | 2020-07-28 |
Surface modified depth controlled deposition for plasma based deposition
Grant 10,727,046 - Abel , et al. | 2020-07-28 |
Selective atomic layer deposition with post-dose treatment
Grant 10,679,848 - Kumar , et al. | 2020-06-09 |
Dielectric gapfill of high aspect ratio features utilizing a sacrificial etch cap layer
Grant 10,658,172 - Abel , et al. | 2020-05-19 |
Conical wafer centering and holding device for semiconductor processing
Grant 10,655,224 - Agarwal , et al. | 2020-05-19 |
Ultrathin Atomic Layer Deposition Film Accuracy Thickness Control
App 20200152446 - Qian; Jun ; et al. | 2020-05-14 |
Method monitoring chamber drift
Grant 10,636,686 - Abel , et al. | 2020-04-28 |
Multi-cycle Ald Process For Film Uniformity And Thickness Profile Modulation
App 20200087786 - Kumar; Purushottam ; et al. | 2020-03-19 |
Method And Apparatus For Modulating Film Uniformity
App 20200063259 - AGARWAL; Pulkit ; et al. | 2020-02-27 |
Symmetric Precursor Delivery
App 20200056288 - Jeon; Eli ; et al. | 2020-02-20 |
Ultrathin atomic layer deposition film accuracy thickness control
Grant 10,566,187 - Qian , et al. Feb | 2020-02-18 |
Compensating Chamber And Process Effects To Improve Critical Dimension Variation For Trim Process
App 20200043709 - Agarwal; Pulkit ; et al. | 2020-02-06 |
Method for Controlling Core Critical Dimension Variation Using Flash Trim Sequence
App 20200035572 - Agarwal; Pulkit ; et al. | 2020-01-30 |
Dielectric Gapfill Using Atomic Layer Deposition (ald), Inhibitor Plasma And Etching
App 20200017967 - ABEL; Joseph ; et al. | 2020-01-16 |
Surface Modified Depth Controlled Deposition For Plasma Based Deposition
App 20200013616 - Abel; Joseph ; et al. | 2020-01-09 |
Multi-cycle ALD process for film uniformity and thickness profile modulation
Grant 10,526,701 - Kumar , et al. J | 2020-01-07 |
Hardware and process for film uniformity improvement
Grant 10,526,700 - Kumar , et al. J | 2020-01-07 |
Ultrathin Atomic Layer Deposition Film Accuracy Thickness Control
App 20190378710 - Qian; Jun ; et al. | 2019-12-12 |
Atomic layer clean for removal of photoresist patterning scum
Grant 10,494,715 - Agarwal , et al. De | 2019-12-03 |
Method Of Providing A Plasma Atomic Layer Deposition
App 20190345608 - AGARWAL; Pulkit ; et al. | 2019-11-14 |
Methods and apparatuses for increasing reactor processing batch size
Grant 10,431,451 - Agarwal , et al. O | 2019-10-01 |
Methods and apparatuses for showerhead backside parasitic plasma suppression in a secondary purge enabled ALD system
Grant 10,407,773 - LaVoie , et al. Sept | 2019-09-10 |
Method Monitoring Chamber Drift
App 20190267268 - ABEL; Joseph ; et al. | 2019-08-29 |
Systems and methods for flow monitoring in a precursor vapor supply system of a substrate processing system
Grant 10,351,953 - Qian , et al. July 16, 2 | 2019-07-16 |
Dielectric Gapfill Of High Aspect Ratio Features Utilizing A Sacrificial Etch Cap Layer
App 20190206677 - Abel; Joseph R. ; et al. | 2019-07-04 |
Parking management system and method
Grant 10,311,723 - Sehra , et al. | 2019-06-04 |
Method Of Improving Deposition Induced Cd Imbalance Using Spatially Selective Ashing Of Carbon Based Film
App 20190164757 - KARIM; Ishtak ; et al. | 2019-05-30 |
Dielectric gapfill of high aspect ratio features utilizing a sacrificial etch cap layer
Grant 10,269,559 - Abel , et al. | 2019-04-23 |
Dielectric Gapfill Of High Aspect Ratio Features Utilizing A Sacrificial Etch Cap Layer
App 20190080903 - Abel; Joseph ; et al. | 2019-03-14 |
Systems and methods for creating airgap seals using atomic layer deposition and high density plasma chemical vapor deposition
Grant 10,224,235 - Park , et al. | 2019-03-05 |
Hardware And Process For Film Uniformity Improvement
App 20190040528 - Kumar; Purushottam ; et al. | 2019-02-07 |
Dynamic Precursor Dosing For Atomic Layer Deposition
App 20190024233 - Kumar; Purushottam ; et al. | 2019-01-24 |
Methods And Apparatuses For Increasing Reactor Processing Batch Size
App 20180374697 - Agarwal; Pulkit ; et al. | 2018-12-27 |
Wafer Edge Contact Hardware and Methods to Eliminate Deposition at Wafer Backside Edge and Notch
App 20180334746 - Breiling; Patrick ; et al. | 2018-11-22 |
Selective Atomic Layer Deposition With Post-dose Treatment
App 20180323057 - Kumar; Purushottam ; et al. | 2018-11-08 |
Atomic Layer Clean For Removal Of Photoresist Patterning Scum
App 20180312973 - Agarwal; Pulkit ; et al. | 2018-11-01 |
Atomic Layer Etch, Reactive Precursors And Energetic Sources For Patterning Applications
App 20180308695 - LaVoie; Adrien ; et al. | 2018-10-25 |
Hardware and process for film uniformity improvement
Grant 10,100,407 - Kumar , et al. October 16, 2 | 2018-10-16 |
Dynamic precursor dosing for atomic layer deposition
Grant 10,094,018 - Kumar , et al. October 9, 2 | 2018-10-09 |
Systems And Methods For Flow Monitoring In A Precursor Vapor Supply System Of A Substrate Processing System
App 20180265983 - Qian; Jun ; et al. | 2018-09-20 |
High dry etch rate materials for semiconductor patterning applications
Grant 10,074,543 - Mahorowala , et al. September 11, 2 | 2018-09-11 |
Selective atomic layer deposition with post-dose treatment
Grant 10,062,563 - Kumar , et al. August 28, 2 | 2018-08-28 |
Selective atomic layer deposition for gapfill using sacrificial underlayer
Grant 10,037,884 - Ou , et al. July 31, 2 | 2018-07-31 |
Conical Wafer Centering And Holding Device For Semiconductor Processing
App 20180171473 - Agarwal; Pulkit ; et al. | 2018-06-21 |
Atomic layer etch methods and hardware for patterning applications
Grant 9,997,371 - Agarwal , et al. June 12, 2 | 2018-06-12 |
Systems and methods for vapor delivery in a substrate processing system
Grant 9,970,108 - Qian , et al. May 15, 2 | 2018-05-15 |
High Dry Etch Rate Materials For Semiconductor Patterning Applications
App 20180061650 - Mahorowala; Arpan ; et al. | 2018-03-01 |
Selective Atomic Layer Deposition For Gapfill Using Sacrificial Underlayer
App 20180061628 - Ou; Fung Suong ; et al. | 2018-03-01 |
Parking Management System And Method
App 20180018870 - SEHRA; SUMAN A. ; et al. | 2018-01-18 |
Variable temperature hardware and methods for reduction of wafer backside deposition
Grant 9,870,917 - Kang , et al. January 16, 2 | 2018-01-16 |
Selective Atomic Layer Deposition With Post-dose Treatment
App 20180005814 - Kumar; Purushottam ; et al. | 2018-01-04 |
Dynamic Precursor Dosing For Atomic Layer Deposition
App 20170362705 - Kumar; Purushottam ; et al. | 2017-12-21 |
Variable Cycle And Time Rf Activation Method For Film Thickness Matching In A Multi-station Deposition System
App 20170314129 - Karim; Ishtak ; et al. | 2017-11-02 |
Systems And Methods For Creating Airgap Seals Using Atomic Layer Deposition And High Density Plasma Chemical Vapor Deposition
App 20170229337 - Park; Jason Daejin ; et al. | 2017-08-10 |
Variable Temperature Hardware And Methods For Reduction Of Wafer Backside Deposition
App 20170178898 - Kang; Hu ; et al. | 2017-06-22 |
Methods And Apparatuses For Showerhead Backside Parasitic Plasma Suppression In A Secondary Purge Enabled Ald System
App 20170167017 - LaVoie; Adrien ; et al. | 2017-06-15 |
Method for RF compensation in plasma assisted atomic layer deposition
Grant 9,624,578 - Qian , et al. April 18, 2 | 2017-04-18 |
Methods and apparatuses for showerhead backside parasitic plasma suppression in a secondary purge enabled ALD system
Grant 9,617,638 - LaVoie , et al. April 11, 2 | 2017-04-11 |
Dynamic Precursor Dosing For Atomic Layer Deposition
App 20170096735 - Kumar; Purushottam ; et al. | 2017-04-06 |
Multi-cycle Ald Process For Film Uniformity And Thickness Profile Modulation
App 20170009346 - Kumar; Purushottam ; et al. | 2017-01-12 |
Methods Of Modulating Residual Stress In Thin Films
App 20160329206 - Kumar; Purushottam ; et al. | 2016-11-10 |
Ultrathin Atomic Layer Deposition Film Accuracy Thickness Control
App 20160276148 - Qian; Jun ; et al. | 2016-09-22 |
Hardware And Process For Film Uniformity Improvement
App 20160177443 - Kumar; Purushottam ; et al. | 2016-06-23 |
Method And Apparatus For Rf Compensation In Plasma Assisted Atomic Layer Deposition
App 20160090650 - Qian; Jun ; et al. | 2016-03-31 |
Fill On Demand Ampoule
App 20160052651 - Nguyen; Tuan ; et al. | 2016-02-25 |
Methods And Apparatuses For Stable Deposition Rate Control In Low Temperature Ald Systems By Showerhead Active Heating And/or Pedestal Cooling
App 20160056032 - Baldasseroni; Chloe ; et al. | 2016-02-25 |
Systems And Methods For Vapor Delivery
App 20160032453 - Qian; Jun ; et al. | 2016-02-04 |
Methods And Apparatuses For Showerhead Backside Parasitic Plasma Suppression In A Secondary Purge Enabled Ald System
App 20160035566 - LaVoie; Adrien ; et al. | 2016-02-04 |
Patterned Articles And Light Emitting Devices Therefrom
App 20140191243 - SINGH; RAJIV K. ; et al. | 2014-07-10 |
High light extraction efficiency solid state light sources
Grant 7,932,534 - Singh , et al. April 26, 2 | 2011-04-26 |
High Light Extraction Efficiency Solid State Light Sources
App 20100308359 - Singh; Rajiv K. ; et al. | 2010-12-09 |
Chemical Mechanical Fabrication (cmf) For Forming Tilted Surface Features
App 20100260977 - Singh; Rajiv K. ; et al. | 2010-10-14 |
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