| Patent | Date |
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Multi-Layer, Multi-Material Micro-Scale and Millimeter-Scale Devices with Enhanced Electrical and/or Mechanical Properties
App 20200292579 - Wu; Ming Ting ; et al. | 2020-09-17 |
Seal compositions, methods, and structures for planar solid oxide fuel cells
Grant 10,669,188 - Kumar , et al. | 2020-06-02 |
Multi-layer, multi-material micro-scale and millimeter-scale devices with enhanced electrical and/or mechanical properties
Grant 10,641,792 - Wu , et al. | 2020-05-05 |
Ceramic- based Fan - Out Wafer Level Packaging
App 20190229026 - Kumar; Ananda H. ; et al. | 2019-07-25 |
Multi-Layer, Multi-Material Micro-Scale and Millimeter-Scale Devices with Enhanced Electrical and/or Mechanical Properties
App 20190212364 - Wu; Ming Ting ; et al. | 2019-07-11 |
Multi-layer, multi-material micro-scale and millimeter-scale devices with enhanced electrical and/or mechanical properties
Grant 10,215,775 - Wu , et al. Feb | 2019-02-26 |
Seal Compositions, Methods, And Structures For Planar Solid Oxide Fuel Cells
App 20180370844 - Kumar; Ananda H. ; et al. | 2018-12-27 |
Seal compositions, methods, and structures for planar solid oxide fuel cells
Grant 10,087,103 - Kumar , et al. October 2, 2 | 2018-10-02 |
Massively parallel transfer of microLED devices
App 20180190614 - Kumar; Ananda H. ; et al. | 2018-07-05 |
Structure And Method For High Performance Large-grain-poly Silicon Backplane For Oled Applications
App 20180166326 - Kumar; Ananda H. ; et al. | 2018-06-14 |
Silicon composite substrates
Grant 9,997,353 - Kumar , et al. June 12, 2 | 2018-06-12 |
Multi-Layer, Multi-Material Micro-Scale and Millimeter-Scale Devices with Enhanced Electrical and/or Mechanical Properties
App 20180080956 - Wu; Ming Ting ; et al. | 2018-03-22 |
Flat panel display formed by self aligned assembly
App 20180033768 - Kumar; Ananda H. ; et al. | 2018-02-01 |
Structure and method for high performance large-grain-poly silicon backplane for OLED applications
Grant 9,881,800 - Kumar , et al. January 30, 2 | 2018-01-30 |
Methods and structures for preparing single crystal silicon wafers for use as substrates for epitaxial growth of crack-free gallium nitride films and devices
App 20170338110 - Kumar; Ananda H. | 2017-11-23 |
Methods for Forming Ceramic Substrates with Via Studs
App 20170338127 - Kumar; Ananda H. | 2017-11-23 |
Novel silicon-based backplane structures and methods for display applications
App 20170317107 - Kumar; Ananda H. ; et al. | 2017-11-02 |
Seal Compositions, Methods, And Structures For Planar Solid Oxide Fuel Cells
App 20170190608 - Kumar; Ananda H. ; et al. | 2017-07-06 |
Silicon-based backplane structures and methods for display applications
Grant 9,698,176 - Kumar , et al. July 4, 2 | 2017-07-04 |
Structure And Method For High Performance Large-grain-poly Silicon Backplane For Oled Applications
App 20170162388 - Kumar; Ananda H. ; et al. | 2017-06-08 |
Multi-layer, multi-material micro-scale and millimeter-scale devices with enhanced electrical and/or mechanical properties
Grant 9,671,429 - Wu , et al. June 6, 2 | 2017-06-06 |
Method of electrochemically fabricating multilayer structures having improved interlayer adhesion
Grant 9,567,687 - Zhang , et al. February 14, 2 | 2017-02-14 |
Methods of forming three-dimensional structures having reduced stress and/or curvature
Grant 9,540,233 - Kumar , et al. January 10, 2 | 2017-01-10 |
Seal compositions, methods, and structures for planar solid oxide fuel cells
Grant 9,531,015 - Kumar , et al. December 27, 2 | 2016-12-27 |
Composite substrates of silicon and ceramic
Grant 9,466,758 - Kumar , et al. October 11, 2 | 2016-10-11 |
Method of Forming Electrically Isolated Structures Using Thin Dielectric Coatings
App 20160258075 - Smalley; Dennis R. ; et al. | 2016-09-08 |
Methods and structures for preparing single crystal silicon wafers for use as substrates for epitaxial growth of crack-free gallium nitride films and devices
App 20160254146 - Kumar; Ananda H. | 2016-09-01 |
Multi-Layer, Multi-Material Micro-Scale and Millimeter-Scale Devices with Enhanced Electrical and/or Mechanical Properties
App 20160231356 - Wu; Ming Ting ; et al. | 2016-08-11 |
Electrochemical Fabrication Process for Forming Multilayer Multimaterial Microprobe Structures Incorporating Dielectrics
App 20160194774 - Cohen; Adam L. ; et al. | 2016-07-07 |
Methods and structures for preparing single crystal silicon wafers for use as substrates for epitaxial growth of crack-free gallium nitride FILMS and devices
Grant 9,337,024 - Kumar May 10, 2 | 2016-05-10 |
Seal Compositions, Methods, And Structures For Planar Solid Oxide Fuel Cells
App 20160118674 - Kumar; Ananda H. ; et al. | 2016-04-28 |
Composite substrates of silicon and ceramic
App 20160087141 - Kumar; Ananda H. ; et al. | 2016-03-24 |
Seal compositions, methods, and structures for planar solid oxide fuel cells
Grant 9,252,434 - Kumar , et al. February 2, 2 | 2016-02-02 |
Electrochemical fabrication process for forming multilayer multimaterial microprobe structures
Grant 9,244,101 - Cohen , et al. January 26, 2 | 2016-01-26 |
Electrochemical Fabrication Process for Forming Multilayer Multimaterial Microprobe Structures
App 20150368820 - Cohen; Adam L. ; et al. | 2015-12-24 |
Methods For Forming Ceramic Substrates With Via Studs
App 20150287615 - Kumar; Ananda H. ; et al. | 2015-10-08 |
Microprobe Tips and Methods for Making
App 20150108002 - Kim; Kieun ; et al. | 2015-04-23 |
Epitaxially growing GaN layers on silicon (100) wafers
Grant 9,006,083 - Kumar April 14, 2 | 2015-04-14 |
Methods for forming ceramic substrates with via studs
Grant 9,006,028 - Kumar , et al. April 14, 2 | 2015-04-14 |
Structure and method for single crystal silicon-based plasma light source and flat panel display panels and micro plasma sources
Grant 8,994,260 - Kumar , et al. March 31, 2 | 2015-03-31 |
Integrated method and system for manufacturing monolithic panels of crystalline solar cells
Grant 8,900,399 - Ravi , et al. December 2, 2 | 2014-12-02 |
Methods of Forming Three-Dimensional Structures Having Reduced Stress and/or Curvature
App 20140238865 - Kumar; Ananda H. ; et al. | 2014-08-28 |
Methods of forming three-dimensional structures having reduced stress and/or curvature
Grant 8,808,800 - Kumar , et al. August 19, 2 | 2014-08-19 |
Method of Electrochemically Fabricating Multilayer Structures Having Improved Interlayer Adhesion
App 20140216941 - Zhang; Gang ; et al. | 2014-08-07 |
Methods and structures for preparing single crystal silicon wafers for use as substrates for epitaxial arowth of crack-free aallium nitride fi ms and devices
App 20140217420 - Kumar; Ananda H. | 2014-08-07 |
Seal Compositions, Methods, and Structures for Planar Solid Oxide Fuel Cells
App 20140213426 - Kumar; Ananda H. ; et al. | 2014-07-31 |
Multi-Layer, Multi-Material Micro-Scale and Millimeter-Scale Devices with Enhanced Electrical and/or Mechanical Properties
App 20140134453 - Wu; Ming Ting ; et al. | 2014-05-15 |
Methods and structures for preparing single crystal silicon wafers for use as substrates for epitaxial growth of crack-free gallium nitride films and devices
Grant 8,697,541 - Kumar April 15, 2 | 2014-04-15 |
Seal compositions, methods, and structures for planar solid oxide fuel cells
Grant 8,691,470 - Kumar , et al. April 8, 2 | 2014-04-08 |
Crack free SOFC electrolyte
Grant 8,663,869 - Janousek , et al. March 4, 2 | 2014-03-04 |
Thin Film Solar Cell with Ceramic Handling Layer
App 20140014172 - Kumar; Ananda H. ; et al. | 2014-01-16 |
Method of Forming Electrically Isolated Structures Using Thin Dielectric Coatings
App 20140008235 - Smalley; Dennis R. ; et al. | 2014-01-09 |
Fuel cell seals
Grant 8,623,569 - Gottmann , et al. January 7, 2 | 2014-01-07 |
Multi-layer, multi-material fabrication methods for producing micro-scale and millimeter-scale devices with enhanced electrical and/or mechanical properties
Grant 8,613,846 - Wu , et al. December 24, 2 | 2013-12-24 |
Thin film solar cell with ceramic handling layer
Grant 8,481,357 - Kumar , et al. July 9, 2 | 2013-07-09 |
Methods of Forming Three-Dimensional Structures Having Reduced Stress and/or Curvature
App 20120222960 - Kumar; Ananda H. ; et al. | 2012-09-06 |
Electrochemical Fabrication Methods for Producing Multilayer Structures Including the use of Diamond Machining in the Planarization of Deposits of Material
App 20120114861 - Cohen; Adam L. ; et al. | 2012-05-10 |
Integrated Method And System For Manufacturing Monolithic Panels Of Crystalline Solar Cells
App 20110300715 - Ravi; Tirunelveli S. ; et al. | 2011-12-08 |
Integrated method and system for manufacturing monolithic panels of crystalline solar cells
Grant 8,030,119 - Ravi , et al. October 4, 2 | 2011-10-04 |
Thin Film Solar Cell With Ceramic Handling Layer
App 20110186117 - Kumar; Ananda H. ; et al. | 2011-08-04 |
Method of Electrochemically Fabricating Multilayer Structures Having Improved Interlayer Adhesion
App 20110155580 - Zhang; Gang ; et al. | 2011-06-30 |
Methods of Forming Three-Dimensional Structures Having Reduced Stress and/or Curvature
App 20110147223 - Kumar; Ananda H. ; et al. | 2011-06-23 |
Multi-Layer, Multi-Material Fabrication Methods for Producing Micro-Scale and Millimeter-Scale Devices with Enhanced Electrical and/or Mechanical Properties
App 20110132767 - Wu; Ming Ting ; et al. | 2011-06-09 |
Probe arrays and method for making
Grant 7,878,385 - Kumar , et al. February 1, 2 | 2011-02-01 |
Crack free SOFC electrolyte
App 20100239937 - Janousek; Martin ; et al. | 2010-09-23 |
Microprobe Tips and Methods for Making
App 20100155253 - Kim; Kieun ; et al. | 2010-06-24 |
Fuel cell seals
App 20100159344 - Gottmann; Matthias ; et al. | 2010-06-24 |
Seal compositions, methods, and structures for planar solid oxide fuel cells
App 20100119917 - Kumar; Ananda H. ; et al. | 2010-05-13 |
Structures and Methods for Wafer Packages, and Probes
App 20100090339 - Kumar; Ananda H. ; et al. | 2010-04-15 |
Structures and Methods for Wafer Packages, and Probes
App 20100068837 - Kumar; Ananda H. ; et al. | 2010-03-18 |
Method of Forming Electrically Isolated Structures Using Thin Dielectric Coatings
App 20100051466 - Smalley; Dennis R. ; et al. | 2010-03-04 |
Erosion-resistant components for plasma process chambers
Grant 7,670,688 - Kaushal , et al. March 2, 2 | 2010-03-02 |
Electrochemical Fabrication Process for Forming Multilayer Multimaterial Microprobe Structures
App 20090320990 - Cohen; Adam L. ; et al. | 2009-12-31 |
Integrated method and system for manufacturing monolithic panels of crystalline solar cells
App 20090227063 - Ravi; Tirunelveli S. ; et al. | 2009-09-10 |
Electrochemical fabrication process for forming multilayer multimaterial microprobe structures
Grant 7,531,077 - Cohen , et al. May 12, 2 | 2009-05-12 |
Method of Electrochemically Fabricating Multilayer Structures Having Improved Interlayer Adhesion
App 20090065142 - Zhang; Gang ; et al. | 2009-03-12 |
Electrochemical Fabrication Methods for Producing Multilayer Structures Including the use of Diamond Machining in the Planarization of Deposits of Material
App 20090020433 - Cohen; Adam L. ; et al. | 2009-01-22 |
Microprobe tips and methods for making
Grant 7,412,767 - Kim , et al. August 19, 2 | 2008-08-19 |
Probe Arrays and Method for Making
App 20080105355 - Kumar; Ananda H. ; et al. | 2008-05-08 |
Microprobe Tips and Methods for Making
App 20080108221 - Kim; Kieun ; et al. | 2008-05-08 |
Method of making a contact
Grant 7,363,705 - Kim , et al. April 29, 2 | 2008-04-29 |
Probe Arrays and Method for Making
App 20080093424 - Kumar; Ananda H. ; et al. | 2008-04-24 |
Methods of Forming Three-Dimensional Structures Having Reduced Stress and/or Curvature
App 20080050524 - Kumar; Ananda H. ; et al. | 2008-02-28 |
Microprobe tips and methods for making
Grant 7,273,812 - Kim , et al. September 25, 2 | 2007-09-25 |
Microprobe tips and methods for making
Grant 7,241,689 - Kim , et al. July 10, 2 | 2007-07-10 |
Microprobe tips and methods for making
App 20060286829 - Kim; Kieun ; et al. | 2006-12-21 |
Method of forming electrically isolated structures using thin dielectric coatings
App 20060226015 - Smalley; Dennis R. ; et al. | 2006-10-12 |
Microprobe tips and methods for making
App 20060112550 - Kim; Kieun ; et al. | 2006-06-01 |
Probe arrays and method for making
App 20060108678 - Kumar; Ananda H. ; et al. | 2006-05-25 |
Microprobe tips and methods for making
App 20060053625 - Kim; Kieun ; et al. | 2006-03-16 |
Microprobe tips and methods for making
App 20060051948 - Kim; Kieun ; et al. | 2006-03-09 |
Microprobe tips and methods for making
App 20050253606 - Kim, Kieun ; et al. | 2005-11-17 |
Microprobe tips and methods for making
App 20050221644 - Kim, Kieun ; et al. | 2005-10-06 |
Electrochemical fabrication process for forming multilayer multimaterial microprobe structures
App 20050215023 - Cohen, Adam L. ; et al. | 2005-09-29 |
Electrochemical fabrication methods for producing multilayer structures including the use of diamond machining in the planarization of deposits of material
App 20050202180 - Cohen, Adam L. ; et al. | 2005-09-15 |
Electrochemical fabrication process for forming multilayer multimaterial microprobe structures
App 20050189959 - Cohen, Adam L. ; et al. | 2005-09-01 |
Probe arrays and method for making
App 20050142739 - Kumar, Ananda H. ; et al. | 2005-06-30 |
Method of electrochemically fabricating multilayer structures having improved interlayer adhesion
App 20050045585 - Zhang, Gang ; et al. | 2005-03-03 |
Process kit for erosion resistance enhancement
App 20050016684 - Sun, Jennifer Y. ; et al. | 2005-01-27 |
Electrostatic chuck having electrode with rounded edge
App 20050016465 - Ramaswamy, Kartik ; et al. | 2005-01-27 |
Electrostatic chuck having dielectric member with stacked layers and manufacture
App 20040190215 - Weldon, Edwin C. ; et al. | 2004-09-30 |
Yttrium oxide based surface coating for semiconductor IC processing vacuum chambers
Grant 6,776,873 - Sun , et al. August 17, 2 | 2004-08-17 |
Method and apparatus for heating a semiconductor wafer plasma reactor vacuum chamber
Grant 6,759,624 - Kumar , et al. July 6, 2 | 2004-07-06 |
Electrostatic chuck having composite dielectric layer and method of manufacture
Grant 6,721,162 - Weldon , et al. April 13, 2 | 2004-04-13 |
Erosion-resistant components for plasma process chambers
App 20040033385 - Kaushal, Tony S. ; et al. | 2004-02-19 |
Process chamber having a corrosion-resistant wall and method
Grant 6,682,627 - Shamouilian , et al. January 27, 2 | 2004-01-27 |
Gas distribution plate electrode for a plasma receptor
Grant 6,677,712 - Katz , et al. January 13, 2 | 2004-01-13 |
Method and apparatus for heating a semiconductor wafer plasma reactor vacuum chamber
App 20030209526 - Kumar, Ananda H. ; et al. | 2003-11-13 |
Gas Distribution Plate Electrode For A Plasma Reactor
App 20030201723 - Katz, Dan ; et al. | 2003-10-30 |
Multi-layer ceramic electrostatic chuck with integrated channel
Grant 6,639,783 - Shamouilian , et al. October 28, 2 | 2003-10-28 |
Coated silicon carbide cermet used in a plasma reactor
App 20030198749 - Kumar, Ananda H. ; et al. | 2003-10-23 |
Gas distribution plate electrode for a plasma reactor
Grant 6,586,886 - Katz , et al. July 1, 2 | 2003-07-01 |
Gas Distribution Plate Electrode For A Plasma Reactor
App 20030111961 - Katz, Dan ; et al. | 2003-06-19 |
Process chamber having a corrosion-resistant wall and method
App 20030056897 - Shamouilian, Shamouil ; et al. | 2003-03-27 |
Electrostatic chuck having heater and method
Grant 6,538,872 - Wang , et al. March 25, 2 | 2003-03-25 |
Top gas feed lid for semiconductor processing chamber
App 20030037879 - Askarinam, Farahmand E. ; et al. | 2003-02-27 |
Electrostatic chuck with dielectric coating
App 20030010292 - Kholodenko, Arnold V. ; et al. | 2003-01-16 |
Support for supporting a substrate in a process chamber
Grant 6,490,144 - Narendrnath , et al. December 3, 2 | 2002-12-03 |
Electrostatic chuck bonded to base with a bond layer and method
Grant 6,490,146 - Wang , et al. December 3, 2 | 2002-12-03 |
Electrostatic chuck having improved electrical connector and method
Grant 6,462,928 - Shamouilian , et al. October 8, 2 | 2002-10-08 |
Electrostatic chuck having composite dielectric layer and method of manufacture
App 20020135969 - Weldon, Edwin C. ; et al. | 2002-09-26 |
Process chamber having improved temperature control
Grant 6,440,221 - Shamouilian , et al. August 27, 2 | 2002-08-27 |
Electrostatic chuck bonded to base with a bond layer and method
App 20020075624 - Wang, You ; et al. | 2002-06-20 |
Electrostatic Chuck Having Composite Base And Method
App 20020036881 - SHAMOUILIAN, SHAMOUIL ; et al. | 2002-03-28 |
Process Chamber Having Improved Temperature Control
App 20010042594 - SHAMOUILIAN, SHAMOUIL ; et al. | 2001-11-22 |
Electrostatic chuck having gas cavity and method
Grant 6,310,755 - Kholodenko , et al. October 30, 2 | 2001-10-30 |
Compliant bond structure for joining ceramic to metal
Grant 6,280,584 - Kumar , et al. August 28, 2 | 2001-08-28 |
Substrate support for plasma processing
Grant 6,273,958 - Shamouilian , et al. August 14, 2 | 2001-08-14 |
Substrate Support For Plasma Processing
App 20010003298 - SHAMOUILIAN, SHAMOUIL ; et al. | 2001-06-14 |
Thermally conductive conformal media
Grant 6,220,607 - Schneider , et al. April 24, 2 | 2001-04-24 |
Electrostatic chuck having improved gas conduits
Grant 6,108,189 - Weldon , et al. August 22, 2 | 2000-08-22 |
High density plasma process chamber
Grant 6,095,084 - Shamouilian , et al. August 1, 2 | 2000-08-01 |
Electrostatic chuck capable of rapidly dechucking a substrate
Grant 5,880,924 - Kumar , et al. March 9, 1 | 1999-03-09 |
Multielectrode electrostatic chuck with fuses
Grant 5,751,537 - Kumar , et al. May 12, 1 | 1998-05-12 |
Electrical feedthroughs for ceramic circuit board support substrates
Grant 5,565,262 - Azzaro , et al. October 15, 1 | 1996-10-15 |
Interconnect structure having improved metallization
Grant 5,436,412 - Ahmad , et al. July 25, 1 | 1995-07-25 |
Method of making a multilayer thin film structure
Grant 5,266,446 - Chang , et al. November 30, 1 | 1993-11-30 |
Method for fabricating superconductor packages
Grant 5,215,610 - DiPaolo , et al. June 1, 1 | 1993-06-01 |
Multi layer thin film wiring process featuring self-alignment of vias
Grant 5,130,229 - Chang , et al. July 14, 1 | 1992-07-14 |
Diffusion isolation layer for maskless cladding process
Grant 4,786,674 - Herron , et al. November 22, 1 | 1988-11-22 |
Method for repair of opens in thin film lines on a substrate
Grant 4,704,304 - Amendola, deceased , et al. November 3, 1 | 1987-11-03 |
Method for removal of carbonaceous residues from ceramic structures having internal metallurgy
Grant 4,627,160 - Herron , et al. December 9, 1 | 1986-12-09 |
Method for palladium activating molybdenum metallized features on a ceramic substrate
Grant 4,510,000 - Kumar , et al. April 9, 1 | 1985-04-09 |
Re-work method for removing extraneous metal from cermic substrates
Grant 4,504,322 - Adwalpalker , et al. March 12, 1 | 1985-03-12 |
Selective coating of metallurgical features of a dielectric substrate with diverse metals
Grant 4,493,856 - Kumar , et al. January 15, 1 | 1985-01-15 |
Maskless coating of metallurgical features of a dielectric substrate
Grant 4,442,137 - Kumar April 10, 1 | 1984-04-10 |
Glass-ceramic structures and sintered multilayer substrates thereof with circuit patterns of gold, silver or copper
Grant 4,413,061 - Kumar , et al. November 1, 1 | 1983-11-01 |
Process for forming refractory metal layers on ceramic substrate
Grant 4,340,618 - Fury , et al. July 20, 1 | 1982-07-20 |
Glass-ceramic structures and sintered multilayer substrates thereof with circuit patterns of gold, silver or copper
Grant 4,301,324 - Kumar , et al. November 17, 1 | 1981-11-17 |
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