Kumagai; Yoshio
Patent Applications and Registrations
Patent applications and USPTO patent grants for Kumagai; Yoshio.The latest application filed is for "substrate processing method and substrate processing apparatus".
- Kumagai; Yoshio - Nirasaki JP
- Kumagai, Yoshio - Nirasaki-shi JP
- Kumagai; Yoshio - Shiranemachi JP
- Kumagai; Yoshio - Yamanashi-ken JP
- Kumagai; Yoshio - Kofu JP
| Patent | Date |
|---|---|
| Substrate rinsing and drying method Grant 6,620,260 - Kumagai , et al. September 16, 2 | 2003-09-16 |
| Substrate processing method and substrate processing apparatus App 20020037371 - Kumagai, Yoshio ; et al. | 2002-03-28 |
| Substrate washing method, substrate washing-drying method, substrate washing apparatus and substrate washing-drying apparatus Grant 6,001,191 - Kamikawa , et al. December 14, 1 | 1999-12-14 |
| Spin dryer and substrate drying method Grant 5,873,177 - Honda , et al. February 23, 1 | 1999-02-23 |
| Substrate washing and drying apparatus, substrate washing method, and substrate washing apparatus Grant 5,845,660 - Shindo , et al. December 8, 1 | 1998-12-08 |
| Cleaning device Grant 5,236,515 - Ueno , et al. August 17, 1 | 1993-08-17 |
| Film forming method and film forming device Grant 5,015,330 - Okumura , et al. May 14, 1 | 1991-05-14 |
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