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Patent applications and USPTO patent grants for Kulkarni; Nagraj S..The latest application filed is for "dual chamber system providing simultaneous etch and deposition on opposing substrate sides for growing low defect density epitaxial layers".
Patent | Date |
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Dual chamber system providing simultaneous etch and deposition on opposing substrate sides for growing low defect density epitaxial layers Grant 7,902,047 - Kulkarni , et al. March 8, 2 | 2011-03-08 |
Dual Chamber System Providing Simultaneous Etch And Deposition On Opposing Substrate Sides For Growing Low Defect Density Epitaxial Layers App 20100013052 - Kulkarni; Nagraj S. ;   et al. | 2010-01-21 |
Process for low temperature, dry etching, and dry planarization of copper App 20060014394 - Kulkarni; Nagraj S. | 2006-01-19 |
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