KULKARNI; Mayur G.
Patent Applications and Registrations
Patent applications and USPTO patent grants for KULKARNI; Mayur G..The latest application filed is for "process kit for a high throughput processing chamber".
- KULKARNI; Mayur G. - Bangalore IN
- Kulkarni; Mayur G. - Sunnyvale CA
- Kulkarni; Mayur G. - San Jose CA US
| Patent | Date |
|---|---|
| Process Kit For A High Throughput Processing Chamber App 20200325577 - GHOSH; Kalyanjit ; et al. | 2020-10-15 |
| Process kit for a high throughput processing chamber Grant 10,724,138 - Ghosh , et al. | 2020-07-28 |
| Method and system for high temperature clean Grant 10,612,135 - Baluja , et al. | 2020-04-07 |
| System and method for substrate processing chambers Grant 10,600,624 - Ghosh , et al. | 2020-03-24 |
| Enhanced Lift Pin Design To Eliminate Local Thickness Non-uniformity In Teos Oxide Films App 20200058538 - GHOSH; Kalyanjit ; et al. | 2020-02-20 |
| Enhanced lift pin design to eliminate local thickness non-uniformity in teos oxide films Grant 10,490,436 - Ghosh , et al. Nov | 2019-11-26 |
| VNAND tensile thick TEOS oxide Grant 10,483,282 - Tsiang , et al. Nov | 2019-11-19 |
| Multizone Gas Distribution Apparatus App 20190311887 - GUNAJI; Akshay ; et al. | 2019-10-10 |
| Vnand Tensile Thick Teos Oxide App 20190229128 - TSIANG; Michael Wenyoung ; et al. | 2019-07-25 |
| Application of bottom purge to increase clean efficiency Grant 10,312,076 - Ghosh , et al. | 2019-06-04 |
| System And Method For Substrate Processing Chambers App 20190122872 - GHOSH; Kalyanjit ; et al. | 2019-04-25 |
| Substrate support with heater Grant 10,242,890 - Volfovski , et al. | 2019-03-26 |
| VNAND tensile thick TEOS oxide Grant 10,199,388 - Tsiang , et al. Fe | 2019-02-05 |
| Process kit including flow isolator ring Grant 10,113,231 - Dubois , et al. October 30, 2 | 2018-10-30 |
| Process Kit For A High Throughput Processing Chamber App 20180274095 - GHOSH; Kalyanjit ; et al. | 2018-09-27 |
| Novel Application Of Bottom Purge To Increase Clean Efficiency App 20180261453 - GHOSH; Kalyanjit ; et al. | 2018-09-13 |
| Process kit for a high throughput processing chamber Grant 10,017,855 - Ghosh , et al. July 10, 2 | 2018-07-10 |
| A Method And System For High Temperature Clean App 20180023193 - BALUJA; Sanjeev ; et al. | 2018-01-25 |
| Substrate support with feedthrough structure Grant 9,706,605 - Volfovski , et al. July 11, 2 | 2017-07-11 |
| Enhanced Lift Pin Design To Eliminate Local Thickness Non-uniformity In Teos Oxide Films App 20170125280 - GHOSH; Kalyanjit ; et al. | 2017-05-04 |
| Vnand Tensile Thick Teos Oxide App 20170062469 - TSIANG; Michael Wenyoung ; et al. | 2017-03-02 |
| Substrate support with switchable multizone heater Grant 9,538,583 - Volfovski , et al. January 3, 2 | 2017-01-03 |
| Process Kit Including Flow Isolator Ring App 20160312359 - DUBOIS; Dale R. ; et al. | 2016-10-27 |
| Process Kit For A High Throughput Processing Chamber App 20160181088 - GHOSH; Kalyanjit ; et al. | 2016-06-23 |
| Substrate Support With Switchable Multizone Heater App 20140197151 - VOLFOVSKI; LEON ; et al. | 2014-07-17 |
| Substrate Support With Feedthrough Structure App 20130256966 - VOLFOVSKI; LEON ; et al. | 2013-10-03 |
| Substrate Support With Temperature Control App 20130087309 - VOLFOVSKI; LEON ; et al. | 2013-04-11 |
| Substrate Support With Heater App 20130037532 - VOLFOVSKI; LEON ; et al. | 2013-02-14 |
| Substrate Support With Heater And Rapid Temperature Change App 20120196242 - VOLFOVSKI; LEON ; et al. | 2012-08-02 |
| Method and System for Cooling a Bake Plate in a Track Lithography Tool App 20090001071 - Kulkarni; Mayur G. | 2009-01-01 |
| Track lithography system with integrated photoresist pump, filter, and buffer vessel App 20070207259 - Kulkarni; Mayur G. ; et al. | 2007-09-06 |
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