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Criticality analysis augmented process window qualification sampling
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Determining one or more characteristics of a pattern of interest on a specimen
Grant 10,359,371 - Duffy , et al. | 2019-07-23 |
Criticality Analysis Augmented Process Window Qualification Sampling
App 20190072858 - SARASWATULA; Jagdish Chandra ; et al. | 2019-03-07 |
Image based specimen process control
Grant 10,181,185 - Park , et al. Ja | 2019-01-15 |
Defect sensitivity of semiconductor wafer inspectors using design data with wafer image data
Grant 10,127,651 - Kulkarni , et al. November 13, 2 | 2018-11-13 |
Reducing registration and design vicinity induced noise for intra-die inspection
Grant 10,074,167 - Banerjee , et al. September 11, 2 | 2018-09-11 |
Generating simulated output for a specimen
Grant 10,043,261 - Bhaskar , et al. August 7, 2 | 2018-08-07 |
Shape based grouping
Grant 9,965,848 - Banerjee , et al. May 8, 2 | 2018-05-08 |
Defect Sensitivity Of Semiconductor Wafer Inspectors Using Design Data With Wafer Image Data
App 20170206650 - Kulkarni; Ashok ; et al. | 2017-07-20 |
Image Based Specimen Process Control
App 20170200264 - Park; Allen ; et al. | 2017-07-13 |
Generating Simulated Output For A Specimen
App 20170200265 - Bhaskar; Kris ; et al. | 2017-07-13 |
Shape Based Grouping
App 20170186151 - Banerjee; Saibal ; et al. | 2017-06-29 |
Reducing Registration And Design Vicinity Induced Noise For Intra-die Inspection
App 20170161888 - Banerjee; Saibal ; et al. | 2017-06-08 |
Determining One or More Characteristics of a Pattern of Interest on a Specimen
App 20170059491 - Duffy; Brian ; et al. | 2017-03-02 |
Data perturbation for wafer inspection or metrology setup using a model of a difference
Grant 9,360,863 - Thattaisundaram , et al. June 7, 2 | 2016-06-07 |
Detecting defects on a wafer
Grant 9,355,208 - Shifrin , et al. May 31, 2 | 2016-05-31 |
Automated inspection scenario generation
Grant 9,053,390 - Mahadevan , et al. June 9, 2 | 2015-06-09 |
Digital pathology system
Grant 9,041,930 - Young , et al. May 26, 2 | 2015-05-26 |
Methods and Systems for Detecting Repeating Defects on Semiconductor Wafers Using Design Data
App 20150012900 - Shifrin; Eugene ; et al. | 2015-01-08 |
Automated Inspection Scenario Generation
App 20140050389 - Mahadevan; Mohan ; et al. | 2014-02-20 |
Semiconductor device property extraction, generation, visualization, and monitoring methods
Grant 8,611,639 - Kulkarni , et al. December 17, 2 | 2013-12-17 |
Data Perturbation for Wafer Inspection or Metrology Setup
App 20120116733 - Thattaisundaram; Govind ; et al. | 2012-05-10 |
Methods and systems for utilizing design data in combination with inspection data
Grant 8,139,843 - Kulkarni , et al. March 20, 2 | 2012-03-20 |
Systems and methods for creating persistent data for a wafer and for using persistent data for inspection-related functions
Grant 8,126,255 - Bhaskar , et al. February 28, 2 | 2012-02-28 |
Computer-implemented methods for detecting and/or sorting defects in a design pattern of a reticle
Grant 8,111,900 - Wu , et al. February 7, 2 | 2012-02-07 |
Methods And Systems For Utilizing Design Data In Combination With Inspection Data
App 20110286656 - Kulkarni; Ashok ; et al. | 2011-11-24 |
Methods and systems for determining a position of inspection data in design data space
Grant 8,041,103 - Kulkarni , et al. October 18, 2 | 2011-10-18 |
Systems and methods for creating inspection recipes
Grant 7,877,722 - Duffy , et al. January 25, 2 | 2011-01-25 |
Systems and methods for detecting defects on a wafer and generating inspection results for the wafer
Grant 7,756,658 - Kulkarni , et al. July 13, 2 | 2010-07-13 |
Computer-implemented methods for detecting and/or sorting defects in a design pattern of a reticle
Grant 7,729,529 - Wu , et al. June 1, 2 | 2010-06-01 |
Methods And Systems For Utilizing Design Data In Combination With Inspection Data
App 20100119144 - Kulkarni; Ashok ; et al. | 2010-05-13 |
Methods and systems for detecting defects on a specimen using a combination of bright field channel data and dark field channel data
Grant 7,711,177 - Leslie , et al. May 4, 2 | 2010-05-04 |
Methods and systems for utilizing design data in combination with inspection data
Grant 7,676,077 - Kulkarni , et al. March 9, 2 | 2010-03-09 |
Systems And Methods For Detecting Defects On A Wafer And Generating Inspection Results For The Wafer
App 20090287440 - Kulkarni; Ashok ; et al. | 2009-11-19 |
Systems And Methods For Creating Persistent Data For A Wafer And For Using Persistent Data For Inspection-related Functions
App 20090080759 - Bhaskar; Kris ; et al. | 2009-03-26 |
Semiconductor Device Property Extraction, Generation, Visualization, And Monitoring Methods
App 20090037134 - Kulkarni; Ashok ; et al. | 2009-02-05 |
Systems And Methods For Creating Inspection Recipes
App 20080250384 - Duffy; Brian ; et al. | 2008-10-09 |
Methods and Systems for Detecting Defects on a Specimen Using a Combination of Bright Field Channel Data and Dark Field Channel Data
App 20070286473 - Leslie; Brian ; et al. | 2007-12-13 |
Methods And Systems For Determining A Position Of Inspection Data In Design Data Space
App 20070230770 - Kulkarni; Ashok ; et al. | 2007-10-04 |
Methods And Systems For Utilizing Design Data In Combination With Inspection Data
App 20070156379 - Kulkarni; Ashok ; et al. | 2007-07-05 |
Computer-implemented methods for detecting and/or sorting defects in a design pattern of a reticle
App 20060291714 - Wu; Kenong ; et al. | 2006-12-28 |
Flexible hybrid defect classification for semiconductor manufacturing
Grant 7,142,992 - Huet , et al. November 28, 2 | 2006-11-28 |
Flexible Hybrid Defect Classification For Semiconductor Manufacturing
App 20060265145 - Huet; Patrick ; et al. | 2006-11-23 |
Software system and method for graphically building customized recipe flowcharts
Grant 6,775,819 - Hardikar , et al. August 10, 2 | 2004-08-10 |
System and method for analyzing semiconductor production data
Grant 6,233,719 - Hardikar , et al. May 15, 2 | 2001-05-15 |
Software system and method for graphically building customized recipe flowcharts
Grant 6,097,887 - Hardikar , et al. August 1, 2 | 2000-08-01 |
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