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Lithographic apparatus and method Grant 10,088,756 - Kerssemakers , et al. October 2, 2 | 2018-10-02 |
Lithographic Apparatus And Method App 20170199467 - KERSSEMAKERS; Sander ;   et al. | 2017-07-13 |
Lithographic apparatus and device manufacturing method Grant 9,134,631 - Kuit , et al. September 15, 2 | 2015-09-15 |
Method of loading a substrate on a substrate table and lithographic apparatus and device manufacturing method Grant 9,122,174 - Kuit , et al. September 1, 2 | 2015-09-01 |
Lithographic apparatus, device manufacturing method, and substrate exchanging method Grant 8,947,636 - Cadee , et al. February 3, 2 | 2015-02-03 |
Lithographic apparatus and device manufacturing method Grant 8,854,598 - Kuit , et al. October 7, 2 | 2014-10-07 |
Lithographic apparatus and device manufacturing method Grant 8,634,058 - Kuit , et al. January 21, 2 | 2014-01-21 |
Method of loading a substrate on a substrate table and lithographic apparatus and device manufacturing method Grant 8,446,566 - Kuit , et al. May 21, 2 | 2013-05-21 |
Method of Loading a Substrate on a Substrate Table and Lithographic Apparatus and Device Manufacturing Method App 20130031768 - KUIT; Jan-Jaap ;   et al. | 2013-02-07 |
Lithographic Apparatus, Device Manufacturing Method, And Substrate Exchanging Method App 20110242518 - Cadee; Theodorus Petrus Maria ;   et al. | 2011-10-06 |
Lithographic Apparatus And Device Manufacturing Method App 20100178612 - ONVLEE; Johannes ;   et al. | 2010-07-15 |
Lithographic Apparatus And Device Manufacturing Method App 20100097586 - KUIT; Jan-Jaap ;   et al. | 2010-04-22 |
Lithographic Apparatus And Device Manufacturing Method App 20100020296 - KUIT; Jan-Jaap ;   et al. | 2010-01-28 |
Lithographic Apparatus And Device Manufacturing Method App 20090257034 - KUIT; Jan-Jaap ;   et al. | 2009-10-15 |
Method of loading a substrate on a substrate table and lithographic apparatus and device manufacturing method App 20090059199 - Kuit; Jan-Jaap ;   et al. | 2009-03-05 |
Stage apparatus, lithographic apparatus and device manufacturing method Grant 7,459,701 - Baggen , et al. December 2, 2 | 2008-12-02 |
Lithographic apparatus, device manufacturing method and device manufactured thereby Grant 7,440,076 - Kuit , et al. October 21, 2 | 2008-10-21 |
Lithographic apparatus and device manufacturing method Grant 7,423,722 - Jansen , et al. September 9, 2 | 2008-09-09 |
Lithographic apparatus and device manufacturing method Grant 7,408,615 - Kuit , et al. August 5, 2 | 2008-08-05 |
Exchangeable object handling apparatus, lithographic apparatus including such exchangeable object handling apparatus, and device manufacturing method Grant 7,394,525 - Kuit , et al. July 1, 2 | 2008-07-01 |
Lithographic apparatus and device manufacturing method Grant 7,349,067 - Kuit , et al. March 25, 2 | 2008-03-25 |
Lithographic apparatus and device manufacturing method Grant 7,345,736 - Kuit , et al. March 18, 2 | 2008-03-18 |
Lithographic apparatus, device manufacturing method and device manufactured thereby App 20070070324 - Kuit; Jan Jaap ;   et al. | 2007-03-29 |
Lithographic apparatus with disturbance correction system and device manufacturing method Grant 7,193,722 - Boogaarts , et al. March 20, 2 | 2007-03-20 |
End effector with integrated illumination system for reticle pre-alignment sensors App 20070035709 - Kuit; Jan Jaap ;   et al. | 2007-02-15 |
Transport system for a lithographic apparatus and device manufacturing method Grant 7,151,590 - Kuit December 19, 2 | 2006-12-19 |
Stage apparatus, lithographic apparatus and device manufacturing method App 20060279721 - Baggen; Marcel Koenraad Marie ;   et al. | 2006-12-14 |
Lithographic apparatus and device manufacturing method Grant 7,136,147 - Kuit November 14, 2 | 2006-11-14 |
Lithographic apparatus and device manufacturing method Grant 7,131,999 - Hoogkamp , et al. November 7, 2 | 2006-11-07 |
Lithographic apparatus and device manufacturing method Grant 7,130,019 - Bartray , et al. October 31, 2 | 2006-10-31 |
Lithographic apparatus and device manufacturing method Grant 7,106,420 - Kuit , et al. September 12, 2 | 2006-09-12 |
Lithographic apparatus and device manufacturing method App 20060132732 - Kuit; Jan Jaap | 2006-06-22 |
Lithographic apparatus and device manufacturing method App 20060087636 - Kuit; Jan Jaap ;   et al. | 2006-04-27 |
Lithographic apparatus and device manufacturing method App 20060066832 - Hoogkamp; Jan Frederik ;   et al. | 2006-03-30 |
Lithographic apparatus and device manufacturing method App 20060066833 - Kuit; Jan Jaap ;   et al. | 2006-03-30 |
Lithographic apparatus and device manufacturing method App 20050280797 - Kuit, Jan Jaap ;   et al. | 2005-12-22 |
Lithographic apparatus and device manufacturing method App 20050280798 - Kuit, Jan Jaap ;   et al. | 2005-12-22 |
Lithographic apparatus and device manufacturing method App 20050280788 - Kuit, Jan Jaap ;   et al. | 2005-12-22 |
Transport system for a lithographic apparatus and device manufacturing method App 20050185160 - Kuit, Jan Jaap | 2005-08-25 |
Lithographic apparatus and device manufacturing method App 20050170296 - Jansen, Albert Johannes Maria ;   et al. | 2005-08-04 |
Lithographic apparatus and device manufacturing method App 20050151954 - Bartray, Petrus Rutgerus ;   et al. | 2005-07-14 |
Lithographic apparatus and device manufacturing method App 20050139790 - Boogaarts, Martinus Godefridus Helena ;   et al. | 2005-06-30 |
Lithographic projection method Grant 6,406,834 - Kuit , et al. June 18, 2 | 2002-06-18 |