Patent | Date |
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Vibration-robust multiaxis gyroscope Grant 11,415,416 - Kuisma , et al. August 16, 2 | 2022-08-16 |
Gyroscope with locked secondary oscillation frequency Grant 11,320,266 - Kuisma May 3, 2 | 2022-05-03 |
Piezoelectric z-axis gyroscope Grant 11,280,610 - Kuisma March 22, 2 | 2022-03-22 |
Method and apparatus for cancelling interconnection capacitance Grant 11,248,977 - Kuisma February 15, 2 | 2022-02-15 |
Piezoelectric ring gyroscope Grant 11,215,455 - Kuisma January 4, 2 | 2022-01-04 |
Electrical Component With Component Interconnection Element App 20210375801 - KUISMA; Heikki | 2021-12-02 |
Gyroscope With Self-test App 20210364292 - KUISMA; Heikki | 2021-11-25 |
Piezoelectric ring gyroscope Grant 11,137,251 - Kuisma October 5, 2 | 2021-10-05 |
Gyroscope With Locked Secondary Oscillation Frequency App 20210285768 - KUISMA; Heikki | 2021-09-16 |
Vibration-robust multiaxis gyroscope Grant 11,105,630 - Kuisma , et al. August 31, 2 | 2021-08-31 |
Piezoelectric Ring Gyroscope App 20210247186 - KUISMA; Heikki | 2021-08-12 |
Synchronization structure for gyroscope Grant 11,085,768 - Kuisma August 10, 2 | 2021-08-10 |
Synchronized multi-axis gyroscope Grant 11,022,439 - Kuisma , et al. June 1, 2 | 2021-06-01 |
Packaged circuit system structure Grant 10,934,157 - Kuisma March 2, 2 | 2021-03-02 |
Piezoelectric rotational MEMS resonator Grant 10,910,549 - Kuisma February 2, 2 | 2021-02-02 |
Piezoelectric rotational MEMS resonator Grant 10,884,018 - Kuisma January 5, 2 | 2021-01-05 |
Rapid Exchange Catheter System For Fractional Flow Reserve Measurement App 20200315539 - KUISMA; Heikki | 2020-10-08 |
Concatenated suspension in a piezoelectric gyroscope Grant 10,782,130 - Kuisma Sept | 2020-09-22 |
A Packaged Circuit System Structure App 20200290866 - KUISMA; Heikki | 2020-09-17 |
Piezoelectric gyroscope with transversal drive transducer Grant 10,775,172 - Kuisma September 15, 2 | 2020-09-15 |
Vibration-robust Multiaxis Gyroscope App 20200263990 - KUISMA; Heikki ;   et al. | 2020-08-20 |
Vibration-robust Multiaxis Gyroscope App 20200200534 - KUISMA; Heikki ;   et al. | 2020-06-25 |
Synchronized Multi-axis Gyroscope App 20200200535 - KUISMA; Heikki ;   et al. | 2020-06-25 |
Piezoelectric Z-axis Gyroscope App 20200109945 - KUISMA; Heikki | 2020-04-09 |
Synchronization Structure For Gyroscope App 20190346265 - KUISMA; Heikki | 2019-11-14 |
Piezoelectric Ring Gyroscope App 20190346266 - KUISMA; Heikki | 2019-11-14 |
Piezoelectric Ring Gyroscope App 20190346264 - KUISMA; Heikki | 2019-11-14 |
System and method for resonator amplitude control Grant 10,418,962 - Kuisma Sept | 2019-09-17 |
Microelectromechanical device and method for manufacturing it Grant 10,322,927 - Kuisma , et al. | 2019-06-18 |
Micro-optical electromechanical device and method for manufacturing it Grant 10,317,669 - Kuisma | 2019-06-11 |
Method And Apparatus For Cancelling Interconnection Capacitance App 20190145843 - KUISMA; Heikki | 2019-05-16 |
Electrical Interconnection For A Catheter App 20190133527 - KUISMA; Heikki | 2019-05-09 |
Piezoelectric Rotational Mems Resonator App 20180340955 - KUISMA; Heikki | 2018-11-29 |
Concatenated Suspension In A Piezoelectric Gyroscope App 20180340776 - KUISMA; Heikki | 2018-11-29 |
Piezoelectric Gyroscope With Transversal Drive Transducer App 20180340775 - KUISMA; Heikki | 2018-11-29 |
Piezoelectric Rotational Mems Resonator App 20180342667 - KUISMA; Heikki | 2018-11-29 |
Microelectromechanical Device And Method For Manufacturing It App 20180230002 - KUISMA; Heikki ;   et al. | 2018-08-16 |
System And Method For Resonator Amplitude Control App 20180226938 - KUISMA; Heikki | 2018-08-09 |
Microelectromechanical device and method for manufacturing it Grant 9,969,607 - Kuisma , et al. May 15, 2 | 2018-05-15 |
Micromechanical pressure sensor structure having a side wall layer Grant 9,829,405 - Kuisma , et al. November 28, 2 | 2017-11-28 |
Method of making a system-in-package device, and a system-in-package device Grant 9,828,239 - Kuisma , et al. November 28, 2 | 2017-11-28 |
Microelectromechanical Device And Method For Manufacturing It App 20170166440 - KUISMA; Heikki ;   et al. | 2017-06-15 |
Microelectromechanical device and a method of manufacturing Grant 9,663,352 - Kuisma , et al. May 30, 2 | 2017-05-30 |
Resonator Grant 9,611,139 - Kuisma April 4, 2 | 2017-04-04 |
Pressure sensor structure Grant 9,541,464 - Kuisma January 10, 2 | 2017-01-10 |
Pressure sensor Grant 9,453,775 - Kuisma September 27, 2 | 2016-09-27 |
Microelectromechanical pressure sensor with robust diaphragm Grant 9,442,032 - Kuisma September 13, 2 | 2016-09-13 |
Micro-optical Electromechanical Device And Method For Manufacturing It App 20160004070 - KUISMA; Heikki | 2016-01-07 |
Method Of Making A System-in-package Device, And A System-in-package Device App 20150375996 - KUISMA; Heikki | 2015-12-31 |
Method of making a system-in-package device Grant 9,184,131 - Kuisma November 10, 2 | 2015-11-10 |
Pressure Sensor App 20150226624 - KUISMA; Heikki | 2015-08-13 |
Pressure Sensor Structure App 20150204744 - KUISMA; Heikki ;   et al. | 2015-07-23 |
Resonator App 20150143905 - KUISMA; Heikki | 2015-05-28 |
Resonator Grant 8,988,017 - Kuisma March 24, 2 | 2015-03-24 |
Method and device for energy harvesting Grant 8,922,098 - Karkkainen , et al. December 30, 2 | 2014-12-30 |
Pressure Sensor App 20140352445 - KUISMA; Heikki | 2014-12-04 |
Pressure Sensor Structure App 20140352446 - KUISMA; Heikki | 2014-12-04 |
Microelectromechanical Device And A Method Of Manufacturing App 20140332910 - KUISMA; Heikki ;   et al. | 2014-11-13 |
Energy harvesting/tire pressure, temperature and tire data transmitter Grant 8,878,421 - Kuisma , et al. November 4, 2 | 2014-11-04 |
Method Of Making A System-in-package Device, And A System-in-package Device App 20140217615 - Kuisma; Heikki | 2014-08-07 |
Resonator App 20140001984 - KUISMA; Heikki | 2014-01-02 |
Method for manufacturing a microelectromechanical component; and a microelectromechanical component Grant 8,450,816 - Kuisma May 28, 2 | 2013-05-28 |
Energy Harvesting/tire Pressure, Temperature And Tire Data Transmitter App 20120326565 - Kuisma; Heikki ;   et al. | 2012-12-27 |
Bulk acoustic wave resonator and method of manufacturing thereof App 20120280758 - Jaakkola; Antti ;   et al. | 2012-11-08 |
Encapsulation module method for production and use thereof Grant 8,279,615 - Schmid , et al. October 2, 2 | 2012-10-02 |
Method And Device For Energy Harvesting App 20120206017 - Karkkainen; Anna-Maija ;   et al. | 2012-08-16 |
Method For Manufacturing A Microelectromechanical Component; And A Microelectromechanical Component App 20120119312 - KUISMA; Heikki | 2012-05-17 |
Method for manufacturing a microelectromechanical component, and a microelectromechanical component Grant 8,124,435 - Kuisma February 28, 2 | 2012-02-28 |
Method for manufacturing a microelectromechanical component, and a microelectromechanical component Grant 7,982,291 - Kuisma July 19, 2 | 2011-07-19 |
Microelectromechanical component Grant 7,932,568 - Kuisma , et al. April 26, 2 | 2011-04-26 |
Encapsulation Module Method for Production and Use Thereof App 20100290199 - Schmid; Bernhard ;   et al. | 2010-11-18 |
Method for manufacturing a microelectromechanical component, and a microelectromechanical component App 20090137079 - Kuisma; Heikki | 2009-05-28 |
Method of manufacturing a capacitive acceleration sensor, and a capacitive acceleration sensor Grant 7,426,863 - Kuisma September 23, 2 | 2008-09-23 |
Method for reducing the temperature dependence of a capacitive sensor and a capacitive sensor construction Grant 7,302,857 - Kuisma , et al. December 4, 2 | 2007-12-04 |
Method for manufacturing a microelectromechanical component, and a microelectromechanical component App 20070132047 - Kuisma; Heikki ;   et al. | 2007-06-14 |
Method for manufacturing a microelectromechanical component, and a microelectromechanical component App 20070114623 - Kuisma; Heikki | 2007-05-24 |
Method of manufacturing a capacitive acceleration sensor, and a capacitive acceleration sensor App 20070000323 - Kuisma; Heikki | 2007-01-04 |
Method for manufacturing a silicon sensor and a silicon sensor App 20060046329 - Kuisma; Heikki ;   et al. | 2006-03-02 |
Method for manufacturing a silicon sensor and a silicon sensor Grant 6,998,059 - Kuisma , et al. February 14, 2 | 2006-02-14 |
Capacitive acceleration sensor Grant 6,938,485 - Kuisma , et al. September 6, 2 | 2005-09-06 |
Method for reducing the temperature dependence of a capacitive sensor and a capacitive sensor construction App 20050105245 - Kuisma, Heikki ;   et al. | 2005-05-19 |
Capacitive acceleration sensor App 20040226374 - Kuisma, Heikki ;   et al. | 2004-11-18 |
Method for manufacturing a silicon sensor and a silicon sensor App 20040074301 - Kuisma, Heikki ;   et al. | 2004-04-22 |
Pressure sensor construction and method for its fabrication Grant 4,875,134 - Kuisma October 17, 1 | 1989-10-17 |
Capacitor construction for use in pressure transducers Grant 4,831,492 - Kuisma May 16, 1 | 1989-05-16 |
Absolute pressure transducer Grant 4,609,966 - Kuisma September 2, 1 | 1986-09-02 |