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Patent applications and USPTO patent grants for Kuhlmann; Burkhard.The latest application filed is for "yaw-rate sensor with a substrate having a main extension plane, method for manufacturing a yaw-rate sensor".
Patent | Date |
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Yaw-rate sensor with a substrate having a main extension plane, method for manufacturing a yaw-rate sensor Grant 11,421,991 - Lassl , et al. August 23, 2 | 2022-08-23 |
Three-axis micromechanical rotation rate sensor system including linearly and rotatorily drivable sensor units Grant 11,226,202 - Pruetz , et al. January 18, 2 | 2022-01-18 |
One-axis and two-axis rotation rate sensor Grant 11,099,013 - Degenfeld-Schonburg , et al. August 24, 2 | 2021-08-24 |
Yaw-rate Sensor With A Substrate Having A Main Extension Plane, Method For Manufacturing A Yaw-rate Sensor App 20210172737 - Lassl; Andreas ;   et al. | 2021-06-10 |
Micromechanical rotational rate sensor system and corresponding production method Grant 10,900,785 - Bode , et al. January 26, 2 | 2021-01-26 |
Rotation-rate Sensor, Method For Producing A Rotation-rate Sensor App 20200378761 - Liewald; Jan-Timo ;   et al. | 2020-12-03 |
One-axis And Two-axis Rotation Rate Sensor App 20200370888 - Degenfeld-Schonburg; Peter ;   et al. | 2020-11-26 |
Three-axis Micromechanical Rotation Rate Sensor System Including Linearly And Rotatorily Drivable Sensor Units App 20200355500 - Pruetz; Odd-Axel ;   et al. | 2020-11-12 |
MEMS rotation rate sensor including combined driving and detection Grant 10,704,909 - Wellner , et al. | 2020-07-07 |
Rotational speed sensor with minimized interference movements in the driving mode Grant 10,655,965 - Schmidt , et al. | 2020-05-19 |
Rotation rate sensor with multiple evaluation during operation at several frequencies Grant 10,648,810 - Kuhlmann , et al. | 2020-05-12 |
Method for producing thin MEMS chips on SOI substrate and micromechanical component Grant 10,584,029 - Reinmuth , et al. | 2020-03-10 |
Dual-axis ultra-robust rotation rate sensor for automotive applications Grant 10,557,710 - Lassl , et al. Feb | 2020-02-11 |
Rotational Speed Sensor And Operation Of A Rotational Speed Sensor At Various Frequencies And In Various Directions App 20190086208 - Lassl; Andreas ;   et al. | 2019-03-21 |
Micromechanical Rotational Rate Sensor System And Corresponding Production Method App 20190078887 - Bode; Niels ;   et al. | 2019-03-14 |
Method For Producing Thin Mems Chips On Soi Substrate And Micromechanical Component App 20190039885 - Reinmuth; Jochen ;   et al. | 2019-02-07 |
Dual-axis Ultra-robust Rotation Rate Sensor For Automotive Applications App 20180231381 - Lassl; Andreas ;   et al. | 2018-08-16 |
Mems Rotation Rate Sensor Including Combined Driving And Detection App 20180209790 - Wellner; Patrick ;   et al. | 2018-07-26 |
Rotational Speed Sensor With Minimized Interference Movements In The Driving Mode App 20180202808 - Schmidt; Benjamin ;   et al. | 2018-07-19 |
Rotation Rate Sensor With Multiple Evaluation During Operation At Several Frequencies App 20180195863 - Kuhlmann; Burkhard ;   et al. | 2018-07-12 |
Rotation rate sensor and a method for operating a rotation rate sensor Grant 9,945,669 - Balslink , et al. April 17, 2 | 2018-04-17 |
Self-test for yaw rate sensors Grant 9,863,781 - Bauer , et al. January 9, 2 | 2018-01-09 |
Rotation-rate sensor having a substrate having a main extension plane for detecting a rotation rate Grant 9,823,073 - Balslink , et al. November 21, 2 | 2017-11-21 |
Yaw-rate sensor Grant 9,689,676 - Neul , et al. June 27, 2 | 2017-06-27 |
Yaw-rate sensor with a compensating mass Grant 9,651,375 - Kuhlmann , et al. May 16, 2 | 2017-05-16 |
Yaw-rate sensor Grant 9,593,948 - Neul , et al. March 14, 2 | 2017-03-14 |
Yaw-rate sensor Grant 9,593,949 - Neul , et al. March 14, 2 | 2017-03-14 |
Yaw-rate Sensor App 20160109236 - Neul; Reinhard ;   et al. | 2016-04-21 |
Rotation Rate Sensor And A Method For Operating A Rotation Rate Sensor App 20160084653 - Balslink; Thorsten ;   et al. | 2016-03-24 |
Rotation Rate Sensor Having A Substrate Having A Main Extension Plance For Detecting A Rotation Rate App 20160069682 - BALSLINK; Thorsten ;   et al. | 2016-03-10 |
Yaw rate sensor Grant 9,255,801 - Kuhlmann , et al. February 9, 2 | 2016-02-09 |
Yaw-rate Sensor App 20150276408 - Neul; Reinhard ;   et al. | 2015-10-01 |
Rotation rate sensor and method for operating a rotation rate sensor Grant 9,146,107 - Kuhlmann , et al. September 29, 2 | 2015-09-29 |
Yaw-rate sensor Grant 9,081,027 - Neul , et al. July 14, 2 | 2015-07-14 |
Self-test For Yaw Rate Sensors App 20150121990 - BAUER; Wolfram ;   et al. | 2015-05-07 |
Yaw rate sensor Grant 8,997,566 - Ohms , et al. April 7, 2 | 2015-04-07 |
Yaw-rate sensor Grant 8,943,891 - Ohms , et al. February 3, 2 | 2015-02-03 |
Sensor device with self-test capability Grant 8,938,364 - Goerlich , et al. January 20, 2 | 2015-01-20 |
Self-test for yaw rate sensors Grant 8,910,518 - Bauer , et al. December 16, 2 | 2014-12-16 |
Yaw-rate Sensor App 20140326070 - Neul; Reinhard ;   et al. | 2014-11-06 |
Yaw rate sensor Grant 8,875,575 - Ohms , et al. November 4, 2 | 2014-11-04 |
Yaw-rate sensor and method for operating a yaw-rate sensor Grant 8,844,357 - Scheben , et al. September 30, 2 | 2014-09-30 |
Yaw-rate sensor and method for operating a yaw-rate sensor Grant 8,783,105 - Kuhlmann , et al. July 22, 2 | 2014-07-22 |
Micromechanical yaw rate sensor having two sensitive axes and coupled detection modes Grant 8,683,863 - Classen , et al. April 1, 2 | 2014-04-01 |
Yam Rate Sensor App 20130340522 - KUHLMANN; Burkhard ;   et al. | 2013-12-26 |
Yaw-rate Sensor App 20130298672 - KUHLMANN; Burkhard ;   et al. | 2013-11-14 |
Micromechanical yaw-rate sensor Grant 8,490,483 - Wrede , et al. July 23, 2 | 2013-07-23 |
Rotation Rate Sensor And Method For Operating A Rotation Rate Sensor App 20130174661 - KUHLMANN; Burkhard ;   et al. | 2013-07-11 |
Yaw rate sensor Grant 8,443,668 - Ohms , et al. May 21, 2 | 2013-05-21 |
Method for the functional checking of an inertial sensor and inertial sensor App 20130042664 - Wrede; Martin ;   et al. | 2013-02-21 |
Yaw-rate Sensor App 20120247206 - Ohms; Torsten ;   et al. | 2012-10-04 |
Self-test For Yaw Rate Sensors App 20120186345 - Bauer; Wolfram ;   et al. | 2012-07-26 |
Yaw-rate sensor and method for operating a yaw-rate sensor App 20120152019 - Kuhlmann; Burkhard ;   et al. | 2012-06-21 |
Yaw-rate Sensor And Method For Operating A Yaw-rate Sensor App 20120125099 - Scheben; Rolf ;   et al. | 2012-05-24 |
Yaw-rate Sensor App 20120060604 - Neul; Reinhard ;   et al. | 2012-03-15 |
Yaw Rate Sensor App 20120011933 - OHMS; Torsten ;   et al. | 2012-01-19 |
Yaw rate sensor App 20110296913 - Ohms; Torsten ;   et al. | 2011-12-08 |
Micromechanical Yaw Rate Sensor Having Two Sensitive Axes And Coupled Detection Modes App 20110185813 - Classen; Johannes ;   et al. | 2011-08-04 |
Yaw rate sensor App 20110132087 - Ohms; Torsten ;   et al. | 2011-06-09 |
Rotation-rate Sensor Having Two Sensitive Axes App 20110088469 - Neul; Reinhard ;   et al. | 2011-04-21 |
Sensor device and manufacturing method for a sensor device App 20110066396 - Goerlich; Patrick ;   et al. | 2011-03-17 |
Micromechanical Yaw-rate Sensor App 20110023600 - WREDE; Martin ;   et al. | 2011-02-03 |
Delta sigma modulator Grant 7,825,840 - Willig , et al. November 2, 2 | 2010-11-02 |
Delta Sigma Modulator App 20080284628 - Willig; Rainer ;   et al. | 2008-11-20 |
Rotation rate sensor Grant 7,316,161 - Willig , et al. January 8, 2 | 2008-01-08 |
Rotational rate sensor Grant 7,313,958 - Willig , et al. January 1, 2 | 2008-01-01 |
Rate-of-rotation sensor having frequency adjustment Grant 7,287,427 - Willig , et al. October 30, 2 | 2007-10-30 |
Micromechanical rotational rate sensor Grant 7,134,337 - Willig , et al. November 14, 2 | 2006-11-14 |
Micromechanical rotational rate sensor App 20060107738 - Willig; Rainer ;   et al. | 2006-05-25 |
Rate-of-rotation sensor having frequency adjustment App 20060021433 - Willig; Rainer ;   et al. | 2006-02-02 |
Rotation rate sensor App 20040206176 - Willig, Rainer ;   et al. | 2004-10-21 |
Micromechanical roatational rate sensor App 20040154398 - Willig, Rainer ;   et al. | 2004-08-12 |
Rotational rate sensor App 20040123660 - Willig, Rainer ;   et al. | 2004-07-01 |
Rotation speed sensor Grant 6,752,017 - Willig , et al. June 22, 2 | 2004-06-22 |
Rotation rate sensor Grant 6,705,164 - Willig , et al. March 16, 2 | 2004-03-16 |
Rotational speed sensor Grant 6,691,571 - Willig , et al. February 17, 2 | 2004-02-17 |
Rotational speed sensor App 20030183007 - Willig, Rainer ;   et al. | 2003-10-02 |
Rotation speed sensor App 20030164040 - Willig, Rainer ;   et al. | 2003-09-04 |
Rotation rate sensor App 20030154788 - Willig, Rainer ;   et al. | 2003-08-21 |
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