Kuehn; Bodo

Patent Applications and Registrations

Patent applications and USPTO patent grants for Kuehn; Bodo.The latest application filed is for "optical component made of quartz glass for use in arf excimer laser lithography and method for producing the component".

Company Profile

0.13.14

Kuehn; Bodo - Gelnhausen DE
KUEHN; Bodo - Hanau DE
Kuehn; Bodo - Gelnhausen/Hailer DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Optical component made of quartz glass for use in ArF excimer laser lithography and method for producing the component Grant 9,834,468 - Kuehn December 5, 2	2017-12-05
Blank of titanium-doped glass with a high silica content for a mirror substrate for use in EUV lithography and method for the production thereof Grant 9,416,040 - Kuehn August 16, 2	2016-08-16
Method for producing synthetic quartz glass and quartz glass for use as cladding material of an optical fiber Grant 9,272,942 - Trommer , et al. March 1, 2	2016-03-01
OPTICAL COMPONENT MADE OF QUARTZ GLASS FOR USE IN ArF EXCIMER LASER LITHOGRAPHY AND METHOD FOR PRODUCING THE COMPONENT App 20160002092 - KUEHN; Bodo	2016-01-07
Blank Of Titanium-doped Glass With A High Silica Content For A Mirror Substrate For Use In Euv Lithography And Method For The Production Thereof App 20150140257 - Kuehn; Bodo	2015-05-21
Blank of titanium-doped glass with a high silica content for a mirror substrate for use in EUV lithography and method for the production thereof Grant 8,931,307 - Kuehn January 13, 2	2015-01-13
Method For Producing Synthetic Quartz Glass And Quartz Glass For Use As Cladding Material Of An Optical Fiber App 20140349830 - Trommer; Martin ; et al.	2014-11-27
Blank Of Titanium-doped Glass With A High Silica Content For A Mirror Substrate For Use In Euv Lithography And Method For The Production Thereof App 20120183719 - Kuehn; Bodo	2012-07-19
Quartz glass blank and method for producing said blank Grant 7,981,824 - Englisch , et al. July 19, 2	2011-07-19
Method for producing an optical component of synthetic quartz glass with enhanced radiation resistance, and blank for producing the component Grant 7,980,098 - Kuehn , et al. July 19, 2	2011-07-19
Method for making a blank from material, particularly for an optical component for use in microlithography Grant 7,954,341 - Kuehn , et al. June 7, 2	2011-06-07
Holder made from quartz glass for the processing of semiconductor wafers and method for production of the holder Grant 7,749,930 - Weber , et al. July 6, 2	2010-07-06
Method For Making A Blank From Material, Particularly For An Optical Component For Use In Microlithography App 20100147027 - Kuehn; Bodo ; et al.	2010-06-17
Method for producing synthetic quartz glass with predetermined hydroxyl group content Grant 7,707,855 - Ochs , et al. May 4, 2	2010-05-04
Optical Component Made From Synthetic Quartz Glass With Enhanced Radiation Resistance, And Method For Producing The Component App 20100091360 - Kuehn; Bodo ; et al.	2010-04-15
Material, particularly for an optical component for use in microlithography, and method for making a blank from the material Grant 7,691,766 - Kuehn , et al. April 6, 2	2010-04-06
Method for the production of laser-active quartz glass and use thereof Grant 7,637,126 - Koeppler , et al. December 29, 2	2009-12-29
Optical component of quartz glass, method for producing said component, and method for exposing a substrate Grant 7,501,367 - Kuehn , et al. March 10, 2	2009-03-10
Method for producing an optical component of synthetic quartz glass with enhanced radiation resistance, and blank for producing the component App 20090004088 - Kuehn; Bodo ; et al.	2009-01-01
Quartz Glass Blank and Method for Producing Said Blank App 20080274869 - Englisch; Wolfgang ; et al.	2008-11-06
Holder Made From Quartz Glass for the Processing of Semiconductor Wafers and Method for Production of the Holder App 20080066497 - Weber; Juergen ; et al.	2008-03-20
Quartz Glass Component For A Uv Radiation Source And Method For Producing And Testing The Aptitude Of Such A Quartz Glass Component App 20070272685 - Schreiber; Andreas ; et al.	2007-11-29
Method for producing synthetic quartz glass with predetermined hydroxyl group content App 20070261442 - Ochs; Stephan ; et al.	2007-11-15
Material, particularly for an optical component for use in microlithography, and method for making a blank from the material App 20070248522 - Kuehn; Bodo ; et al.	2007-10-25
Method for the production of laser-active quartz glass and use thereof App 20070145332 - Koeppler; Rainer ; et al.	2007-06-28
Optical component of quartz glass, method for producing said component, and method for exposing a substrate App 20060234848 - Kuehn; Bodo ; et al.	2006-10-19

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