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Information processing apparatus, information processing method, and non-transitory computer readable recording medium
Grant 10,859,376 - Kudo December 8, 2 | 2020-12-08 |
Measurement method and measurement program for calculating roughness of a curved surface
Grant 10,274,313 - Sakai , et al. | 2019-04-30 |
Measurement Method And Measurement Program
App 20170248410 - SAKAI; Hiroshi ; et al. | 2017-08-31 |
Information Processing Apparatus, Information Processing Method, And Non-transitory Computer Readable Recording Medium
App 20170248419 - KUDO; Yuji | 2017-08-31 |
Evaluation device and evaluation method
Grant 8,705,034 - Fukazawa , et al. April 22, 2 | 2014-04-22 |
Inspecting Apparatus And Method For Manufacturing Semiconductor Device
App 20130329222 - Kudo; Yuji | 2013-12-12 |
Evaluation Device And Evaluation Method
App 20130070244 - Fukazawa; Kazuhiko ; et al. | 2013-03-21 |
Evaluation device and evaluation method
Grant 8,334,977 - Fukazawa , et al. December 18, 2 | 2012-12-18 |
Evaluation device and evaluation method
App 20110235038 - Fukazawa; Kazuhiko ; et al. | 2011-09-29 |
Projection optical system, exposure system, and exposure method
Grant 7,978,310 - Ikezawa , et al. July 12, 2 | 2011-07-12 |
Surface inspection method and surface inspection device
Grant 7,907,268 - Fujimori , et al. March 15, 2 | 2011-03-15 |
Surface Inspection Method And Surface Inspection Device
App 20100177312 - Fujimori; Yoshihiko ; et al. | 2010-07-15 |
Projection Optical System, Exposure System, And Exposure Method
App 20100159401 - IKEZAWA; Hironori ; et al. | 2010-06-24 |
Projection optical system, exposure system, and exposure method
Grant 7,710,653 - Ikezawa , et al. May 4, 2 | 2010-05-04 |
Projection optical system, method of manufacturing projection optical system, exposure apparatus, and exposure method
Grant 7,706,074 - Kudo , et al. April 27, 2 | 2010-04-27 |
Exposure Method and Apparatus, and Electronic Device Manufacturing Method
App 20090011368 - Ichihara; Yutaka ; et al. | 2009-01-08 |
Projection Optical System, Method of Manufacturing Projection Optical System, Exposure Apparatus, and Exposure Method
App 20080123086 - Kudo; Yuji ; et al. | 2008-05-29 |
Illumination Optical Equipment, Exposure System and Method
App 20070222962 - Kudo; Yuji | 2007-09-27 |
Projection optical system, exposure system, and exposure method
App 20070188879 - Ikezawa; Hironori ; et al. | 2007-08-16 |
Projection exposure apparatus
Grant 6,864,959 - Shiraishi , et al. March 8, 2 | 2005-03-08 |
Intake system for an internal combustion engine
Grant 6,848,409 - Kudo , et al. February 1, 2 | 2005-02-01 |
Electroluminescent device having a very thin emission layer
Grant 6,831,406 - Fukuyama , et al. December 14, 2 | 2004-12-14 |
Intake system for an internal combustion engine
App 20040237925 - Kudo, Yuji ; et al. | 2004-12-02 |
Intake arrangement for multi-cylinder engine
Grant 6,776,132 - Kudo , et al. August 17, 2 | 2004-08-17 |
Optical integrator, illumination optical apparatus, exposure apparatus, and observation apparatus
App 20040125459 - Tanitsu, Osamu ; et al. | 2004-07-01 |
Optical integrator, illumination optical apparatus, exposure apparatus and observation apparatus
Grant 6,741,394 - Tanitsu , et al. May 25, 2 | 2004-05-25 |
Organic electroluminescent device
Grant 6,730,929 - Fukuyama , et al. May 4, 2 | 2004-05-04 |
Organic electroluminescent device
App 20040061108 - Fukuyama, Masao ; et al. | 2004-04-01 |
Projection exposure apparatus
Grant 6,710,854 - Shiraishi , et al. March 23, 2 | 2004-03-23 |
Optical exposure apparatus and photo-cleaning method
Grant 6,642,994 - Mori , et al. November 4, 2 | 2003-11-04 |
Pulse-width extending optical systems, projection-exposure apparatus comprising same, and manufacturing methods using same
App 20030117601 - Kudo, Yuji | 2003-06-26 |
Intake arrangement for multi-cylinder engine
App 20030075135 - Kudo, Yuji ; et al. | 2003-04-24 |
Pulse-width extending optical systems, projection-exposure apparatus comprising same, and manufacturing methods using same
Grant 6,549,267 - Kudo April 15, 2 | 2003-04-15 |
Projection exposure apparatus
App 20020140919 - Shiraishi, Naomasa ; et al. | 2002-10-03 |
Projection exposure apparatus
Grant 6,392,740 - Shiraishi , et al. May 21, 2 | 2002-05-21 |
Projection exposure apparatus
App 20020048008 - Shiraishi, Naomasa ; et al. | 2002-04-25 |
Illumination apparatus, exposure apparatus and exposure method
App 20010046039 - Kudo, Yuji | 2001-11-29 |
Optical exposure apparatus and photo-cleaning method
App 20010030740 - Mori, Takashi ; et al. | 2001-10-18 |
Organic electroluminescent device
App 20010005021 - Fukuyama, Masao ; et al. | 2001-06-28 |
Illuminating optical device and semiconductor device manufacturing method
Grant 6,127,095 - Kudo October 3, 2 | 2000-10-03 |
Projection exposure apparatus and method
Grant 6,100,961 - Shiraishi , et al. August 8, 2 | 2000-08-08 |
Projection optical system, illumination apparatus, and exposure apparatus
Grant 5,986,744 - Kudo , et al. November 16, 1 | 1999-11-16 |
Illumination optical system, an exposure apparatus having the illumination system, and a method for manufacturing a semiconductor device
Grant 5,867,319 - Sugiyama , et al. February 2, 1 | 1999-02-02 |
Illumination optical apparatus and projection exposure apparatus using it
Grant 5,798,823 - Kudo August 25, 1 | 1998-08-25 |
Exposure apparatus correcting illuminance distribution
Grant 5,798,824 - Kudo August 25, 1 | 1998-08-25 |
Illuminating optical apparatus
Grant 5,745,294 - Kudo April 28, 1 | 1998-04-28 |
Projection exposure apparatus
Grant 5,719,704 - Shiraishi , et al. February 17, 1 | 1998-02-17 |
Illuminating optical apparatus and method
Grant 5,659,429 - Kudo August 19, 1 | 1997-08-19 |
Illuminating optical apparatus
Grant 5,610,763 - Kudo March 11, 1 | 1997-03-11 |
Illumination optical system and exposure apparatus including the same system
Grant 5,392,094 - Kudo February 21, 1 | 1995-02-21 |
Projection exposure apparatus
Grant 5,300,971 - Kudo April 5, 1 | 1994-04-05 |
Illumination optical arrangement
Grant 5,253,110 - Ichihara , et al. October 12, 1 | 1993-10-12 |
Illuminating optical system and exposure apparatus utilizing the same
Grant 5,237,367 - Kudo August 17, 1 | 1993-08-17 |
Illuminating optical device
Grant 4,918,583 - Kudo , et al. April 17, 1 | 1990-04-17 |
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