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Patent applications and USPTO patent grants for Kudo; Yasuhisa.The latest application filed is for "mounting table and plasma processing apparatus".
Patent | Date |
---|---|
Mounting table and plasma processing apparatus Grant 10,515,786 - Koiwa , et al. Dec | 2019-12-24 |
Mounting table and plasma processing apparatus Grant 10,340,174 - Yamaguchi , et al. | 2019-07-02 |
Mounting Table And Plasma Processing Apparatus App 20170092472 - KOIWA; Shingo ;   et al. | 2017-03-30 |
Mounting Table And Plasma Processing Apparatus App 20140202635 - YAMAGUCHI; Shin ;   et al. | 2014-07-24 |
Post-etch treatment system for removing residue on a substrate Grant 8,057,633 - Tsukamoto , et al. November 15, 2 | 2011-11-15 |
Method for adjoining adjacent coatings on a processing element Grant 7,560,376 - Escher , et al. July 14, 2 | 2009-07-14 |
Method for adjoining adjacent coatings on a processing element App 20070142956 - Escher; Gary ;   et al. | 2007-06-21 |
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