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Patent applications and USPTO patent grants for Kudo; Katsuhiko.The latest application filed is for "rotary-cup coating apparatus".
Patent | Date |
---|---|
Rotary-cup coating apparatus Grant 5,571,324 - Sago , et al. November 5, 1 | 1996-11-05 |
Cleaning device for cleaning planar workpiece Grant 5,349,978 - Sago , et al. September 27, 1 | 1994-09-27 |
Spin-on method and apparatus for applying coating material to a substrate, including an air flow developing and guiding step/means Grant 5,238,713 - Sago , et al. August 24, 1 | 1993-08-24 |
Method and apparatus for applying a coating material to a substrate Grant 5,116,250 - Sago , et al. May 26, 1 | 1992-05-26 |
Thin-film coating apparatus Grant 4,941,426 - Sago , et al. July 17, 1 | 1990-07-17 |
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