Patent | Date |
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3D microscope including insertable components to provide multiple imaging and measurement capabilities Grant 11,294,161 - Xu , et al. April 5, 2 | 2022-04-05 |
3d Microscope Including Insertable Components To Provide Multiple Imaging And Measurement Capabilities App 20210088768 - Xu; James Jianguo ;   et al. | 2021-03-25 |
3d Microscope Including Insertable Components To Provide Multiple Imaging And Measurement Capabilities App 20210080710 - Xu; James Jianguo ;   et al. | 2021-03-18 |
3D microscope including insertable components to provide multiple imaging and measurement capabilities Grant 10,884,228 - Xu , et al. January 5, 2 | 2021-01-05 |
Dual mode inspector Grant 10,769,769 - Meeks , et al. Sep | 2020-09-08 |
Dual mode inspector Grant 10475173 - | 2019-11-12 |
3D microscope and methods of measuring patterned substrates Grant 10,209,501 - Hou , et al. Feb | 2019-02-19 |
3d Microscope Including Insertable Components To Provide Multiple Imaging And Measurement Capabilities App 20180356623 - Xu; James Jianguo ;   et al. | 2018-12-13 |
Multi-surface specular reflection inspector Grant 10,094,787 - Meeks , et al. October 9, 2 | 2018-10-09 |
3D microscope including insertable components to provide multiple imaging and measurement capabilities Grant 10,048,480 - Xu , et al. August 14, 2 | 2018-08-14 |
Method of detecting defect location using multi-surface specular reflection Grant 9,921,169 - Meeks , et al. March 20, 2 | 2018-03-20 |
Dual Mode Inspector App 20180005364 - Meeks; Steven W. ;   et al. | 2018-01-04 |
Multi-surface Specular Reflection Inspector App 20170336331 - Meeks; Steven W. ;   et al. | 2017-11-23 |
Method Of Detecting Defect Location Using Multi-surface Specular Reflection App 20170336330 - Meeks; Steven W. ;   et al. | 2017-11-23 |
Multi-surface optical 3D microscope Grant 9,664,888 - Lee , et al. May 30, 2 | 2017-05-30 |
Multi-surface optical 3D microscope Grant 9,645,381 - Lee , et al. May 9, 2 | 2017-05-09 |
3D Microscope And Methods Of Measuring Patterned Substrates App 20160252714 - Hou; Zhen ;   et al. | 2016-09-01 |
3D Microscope And Methods Of Measuring Patterned Substrates App 20160253813 - Hou; Zhen ;   et al. | 2016-09-01 |
3D microscope and methods of measuring patterned substrates Grant 9,389,408 - Hou , et al. July 12, 2 | 2016-07-12 |
Multi-Surface Optical 3D Microscope App 20150226953 - Lee; Ken Kinsun ;   et al. | 2015-08-13 |
Multi-Surface Optical 3D Microscope App 20150226952 - Lee; Ken Kinsun ;   et al. | 2015-08-13 |
Multi-surface optical 3D microscope Grant 9,036,869 - Lee , et al. May 19, 2 | 2015-05-19 |
System and method for monitoring LED chip surface roughening process Grant 8,976,366 - Xu , et al. March 10, 2 | 2015-03-10 |
Optical inspector Grant 8,896,825 - Meeks , et al. November 25, 2 | 2014-11-25 |
Multi-surface Scattered Radiation Differentiation App 20140307255 - Meeks; Steven W. ;   et al. | 2014-10-16 |
Multi-surface scattered radiation differentiation Grant 8,848,181 - Meeks , et al. September 30, 2 | 2014-09-30 |
Optical inspector with selective scattered radiation blocker Grant 8,836,935 - Meeks , et al. September 16, 2 | 2014-09-16 |
Optical inspector Grant 8,830,456 - Meeks , et al. September 9, 2 | 2014-09-09 |
Multi-surface optical inspector Grant 8,830,457 - Meeks , et al. September 9, 2 | 2014-09-09 |
Optical Inspector App 20140218724 - Meeks; Steven W. ;   et al. | 2014-08-07 |
Optical Inspector App 20140218722 - Meeks; Steven W. ;   et al. | 2014-08-07 |
Interchangeable disk clamp Grant 8,498,184 - Kudinar , et al. July 30, 2 | 2013-07-30 |
System And Method For Monitoring LED Chip Surface Roughening Process App 20120327414 - Xu; James Jianguo ;   et al. | 2012-12-27 |
3D Microscope Including Insertable Components To Provide Multiple Imaging And Measurement Capabilities App 20120176475 - Xu; James Jianguo ;   et al. | 2012-07-12 |
Multi-Surface Optical 3D Microscope App 20120051660 - Lee; Ken Kinsun ;   et al. | 2012-03-01 |
3D Microscope And Methods Of Measuring Patterned Substrates App 20120019626 - Hou; Zhen ;   et al. | 2012-01-26 |
Wafer edge inspection Grant 7,656,519 - Meeks , et al. February 2, 2 | 2010-02-02 |
Wafer edge inspection Grant 7,532,318 - Meeks , et al. May 12, 2 | 2009-05-12 |
Wafer Edge Inspection App 20090059236 - Meeks; Steven W. ;   et al. | 2009-03-05 |
Wafer Edge Inspection App 20070127016 - Meeks; Steven W. ;   et al. | 2007-06-07 |
Wafer edge inspection Grant 7,161,668 - Meeks , et al. January 9, 2 | 2007-01-09 |
Wafer edge inspection Grant 7,161,667 - Meeks , et al. January 9, 2 | 2007-01-09 |
Wafer edge inspection App 20060250609 - Meeks; Steven W. ;   et al. | 2006-11-09 |
Wafer edge inspection App 20060250610 - Meeks; Steven W. ;   et al. | 2006-11-09 |
Combined high speed optical profilometer and ellipsometer Grant 7,110,097 - Meeks , et al. September 19, 2 | 2006-09-19 |
Combined high speed optical profilometer and ellipsometer Grant 7,075,630 - Meeks , et al. July 11, 2 | 2006-07-11 |
Combined high speed optical profilometer and ellipsometer App 20060066854 - Meeks; Steven W. ;   et al. | 2006-03-30 |
System and method for measuring object characteristics using phase differences in polarized light reflections Grant 6,956,658 - Meeks , et al. October 18, 2 | 2005-10-18 |
System and method for measuring properties of an object using a phase difference between two reflected light signals Grant 6,956,660 - Meeks , et al. October 18, 2 | 2005-10-18 |
Combined high speed optical profilometer and ellipsometer App 20040233419 - Meeks, Steven W. ;   et al. | 2004-11-25 |
System for simultaneously measuring thin file layer thickness, reflectivity, roughness, surface profile and magnetic pattern App 20040160604 - Meeks, Steven W. ;   et al. | 2004-08-19 |
Combined high speed optical profilometer and ellipsometer Grant 6,757,056 - Meeks , et al. June 29, 2 | 2004-06-29 |
System for simultaneously measuring thin film layer thickness, reflectivity, roughness, surface profile and magnetic pattern Grant 6,717,671 - Meeks , et al. April 6, 2 | 2004-04-06 |
System and method for simultaneously measuring thin film layer thickness, reflectivity, roughness, surface profile and magnetic pattern in thin film magnetic disks and silicon wafers Grant 6,665,078 - Meeks , et al. December 16, 2 | 2003-12-16 |
High speed optical profilometer for measuring surface height variation Grant 6,392,749 - Meeks , et al. May 21, 2 | 2002-05-21 |
Combined high speed optical profilometer and ellipsometer App 20020015146 - Meeks, Steven W. ;   et al. | 2002-02-07 |
System and method for measuring thin film properties and analyzing two-dimensional histograms using and/not operations Grant 6,268,919 - Meeks , et al. July 31, 2 | 2001-07-31 |
System and method for measuring thin film properties and analyzing two-dimensional histograms using a symmetry operation Grant 6,130,749 - Meeks , et al. October 10, 2 | 2000-10-10 |
System and method for simultaneously measuring lubricant thickness and degradation, thin film thickness and wear, and surface roughness Grant 6,031,615 - Meeks , et al. February 29, 2 | 2000-02-29 |
Constant-force profilometer with stylus-stabilizing sensor assembly, dual-view optics, and temperature drift compensation Grant 5,705,741 - Eaton , et al. January 6, 1 | 1998-01-06 |
Wafer handling apparatus Grant 4,597,708 - Wheeler , et al. July 1, 1 | 1986-07-01 |