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Perhydropolysilazane Compositions And Methods For Forming Nitride Films Using Same
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Perhydropolysilazane Compositions And Methods For Forming Oxide Films Using Same
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Alkylamino-substituted Carbosilane Precursors
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Preparation of Si-H containing iodosilanes via halide exchange reaction
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N-h Free And Si-rich Per-hydridopolysilzane Compositions, Their Synthesis, And Applications
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N--H free and SI-rich per-hydridopolysilzane compositions, their synthesis, and applications
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Organosilane precursors for ALD/CVD silicon-containing film applications and methods of using the same
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PREPARATION OF Si-H CONTAINING IODOSILANES VIA HALIDE EXCHANGE REACTION
App 20190337810 - RITTER; Cole ; et al. | 2019-11-07 |
Alkylamino-substituted Carbosilane Precursors
App 20190256532 - FAFARD; Claudia ; et al. | 2019-08-22 |
Preparation of Si--H containing iodosilanes via halide exchange reaction
Grant 10,384,944 - Ritter , et al. A | 2019-08-20 |
Organosilane Precursors For Ald/cvd Silicon-containing Film Applications And Methods Of Using The Same
App 20180355483 - KUCHENBEISER; Glenn ; et al. | 2018-12-13 |
Methods of using amino(bromo)silane precursors for ALD/CVD silicon-containing film applications
Grant 10,053,775 - Kuchenbeiser , et al. August 21, 2 | 2018-08-21 |
Alkylamino-substituted Halocarbosilane Precursors
App 20180202042 - FAFARD; Claudia ; et al. | 2018-07-19 |
Organodisilane precursors for ALD/CVD silicon-containing film applications
Grant 10,006,122 - Husson , et al. June 26, 2 | 2018-06-26 |
PREPARATION OF Si-H CONTAINING IODOSILANES VIA HALIDE EXCHANGE REACTION
App 20180099872 - RITTER; Cole ; et al. | 2018-04-12 |
Organosilane precursors for ALD/CVD silicon-containing film applications
Grant 9,938,303 - Dussarrat , et al. April 10, 2 | 2018-04-10 |
N-h Free And Si-rich Per-hydridopolysilzane Compositions, Their Synthesis, And Applications
App 20180072571 - SANCHEZ; Antonio ; et al. | 2018-03-15 |
Hexacoordinate silicon-containing precursors for ALD/CVD silicon-containing film applications
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Organodisilane Precursors For Ald/cvd Silicon-containing Film Applications
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Amino(iodo)silane precursors for ALD/CVD silicon-containing film applications and methods of using the same
Grant 9,777,373 - Kuchenbeiser , et al. October 3, 2 | 2017-10-03 |
Synthesis methods for amino(halo)silanes
Grant 9,701,695 - Kuchenbeiser , et al. July 11, 2 | 2017-07-11 |
Alkylamino-substituted Carbosilane Precursors
App 20170190720 - FAFARD; Claudia ; et al. | 2017-07-06 |
Organosilane precursors for ALD/CVD silicon-containing film applications
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Cyclic Organoaminosilane Precursors For Forming Silicon-containing Films And Methods Of Using The Same
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Sulfur containing organosilane precursors for ALD/CVD silicon-containing film applications
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Organosilane precursors for ALD/CVD silicon-containing film applications
Grant 9,371,338 - Dussarrat , et al. June 21, 2 | 2016-06-21 |
Hexacoordinate Silicon-containing Precursors For Ald/cvd Silicon-containing Film Applications
App 20160152640 - KUCHENBEISER; Glenn ; et al. | 2016-06-02 |
Amino(iodo)silane Precursors For Ald/cvd Silicon-containing Film Applications And Methods Of Using The Same
App 20160115593 - KUCHENBEISER; Glenn ; et al. | 2016-04-28 |
Amino(bromo)silane Precursors For Ald/cvd Silicon-containing Film Applications And Methods Of Using The Same
App 20160108064 - KUCHENBEISER; Glenn ; et al. | 2016-04-21 |
Internally Coated Vessel For Housing A Metal Halide
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Nitridation of atomic layer deposited high-k dielectrics using trisilylamine
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Organosilane Precursors For Ald/cvd Silicon-containing Film Applications
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Organosilane Precursors For Ald/cvd Silicon-containing Film Applications
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Organosilane Precursors For Ald/cvd Silicon-containing Film Applications
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Silicon Containing Compounds For Ald Deposition Of Metal Silicate Films
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Nitridation Of Atomic Layer Deposited High-k Dielectrics Using Trisilylamine
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