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Dual gate and single actuator system
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Organic Contamination Free Surface Machining
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Dual Gate And Single Actuator System
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Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods
Grant 11,087,998 - Rice , et al. August 10, 2 | 2021-08-10 |
Transfer Chambers With An Increased Number Of Sides, Semiconductor Device Manufacturing Processing Tools, And Processing Methods
App 20210143034 - Rice; Michael Robert ; et al. | 2021-05-13 |
Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods
Grant 10,971,381 - Rice , et al. April 6, 2 | 2021-04-06 |
Gas systems and methods for chamber ports
Grant 10,381,247 - Madiwal , et al. A | 2019-08-13 |
Transfer Chambers With An Increased Number Of Sides, Semiconductor Device Manufacturing Processing Tools, And Processing Methods
App 20190214284 - Rice; Michael Robert ; et al. | 2019-07-11 |
Flexible equipment front end module interfaces, environmentally-controlled equipment front end modules, and assembly methods
Grant 10,159,169 - Vincent , et al. Dec | 2018-12-18 |
Flexible Equipment Front End Module Interfaces, Environmentally-controlled Equipment Front End Modules, And Assembly Methods
App 20180124960 - Vincent; Joseph ; et al. | 2018-05-03 |
Gas Systems And Methods For Chamber Ports
App 20160358792 - Madiwal; Nagendra V. ; et al. | 2016-12-08 |
Gas apparatus, systems, and methods for chamber ports
Grant 9,435,025 - Madiwal , et al. September 6, 2 | 2016-09-06 |
Transfer Chambers With An Increased Number Of Sides, Semiconductor Device Manufacturing Processing Tools, And Processing Methods
App 20160225646 - RICE; Michael Robert ; et al. | 2016-08-04 |
Cooling plates and semiconductor apparatus thereof
Grant 9,091,491 - Lee , et al. July 28, 2 | 2015-07-28 |
Substrate Processing Sequence In A Cartesian Robot Cluster Tool
App 20150098773 - RICE; Mike ; et al. | 2015-04-09 |
Gas Apparatus, Systems, And Methods For Chamber Ports
App 20150083330 - Madiwal; Nagendra V. ; et al. | 2015-03-26 |
Substrate processing sequence in a cartesian robot cluster tool
Grant 8,911,193 - Rice , et al. December 16, 2 | 2014-12-16 |
Substrate Processing Sequence In A Cartesian Robot Cluster Tool
App 20120141237 - RICE; Mike ; et al. | 2012-06-07 |
Substrate processing sequence in a Cartesian robot cluster tool
Grant 8,066,466 - Rice , et al. November 29, 2 | 2011-11-29 |
Substrate Processing Sequence In A Cartesian Robot Cluster Tool
App 20100280654 - Rice; Mike ; et al. | 2010-11-04 |
Substrate processing sequence in a cartesian robot cluster tool
Grant 7,798,764 - Rice , et al. September 21, 2 | 2010-09-21 |
Cartesian robot cluster tool architecture
Grant 7,651,306 - Rice , et al. January 26, 2 | 2010-01-26 |
Cooling Plates And Semiconductor Apparatus Thereof
App 20090211742 - LEE; HELDER ; et al. | 2009-08-27 |
Substrate gripper for a substrate handling robot
Grant 7,374,391 - Rice , et al. May 20, 2 | 2008-05-20 |
Method of retaining a substrate during a substrate transferring process
Grant 7,374,393 - Rice , et al. May 20, 2 | 2008-05-20 |
Substrate gripper for a substrate handling robot
App 20070147979 - Rice; Michael ; et al. | 2007-06-28 |
Method of retaining a substrate during a substrate transferring process
App 20070147982 - Rice; Mike ; et al. | 2007-06-28 |
Substrate Processing Sequence In A Cartesian Robot Cluster Tool
App 20070147976 - Rice; Mike ; et al. | 2007-06-28 |
Cartesian robot design
App 20060182535 - Rice; Mike ; et al. | 2006-08-17 |
Cartesian robot cluster tool architecture
App 20060182536 - Rice; Mike ; et al. | 2006-08-17 |
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