Patent | Date |
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Silicon monocrystal production method Grant 10,982,350 - Narushima , et al. April 20, 2 | 2021-04-20 |
Method for producing silicon single crystal Grant 10,895,018 - Narushima , et al. January 19, 2 | 2021-01-19 |
Method For Producing Silicon Single Crystal App 20190249331 - NARUSHIMA; Yasuhito ;   et al. | 2019-08-15 |
Method for producing single crystal Grant 10,329,686 - Narushima , et al. | 2019-06-25 |
Silicon Monocrystal Production Method App 20190186042 - NARUSHIMA; Yasuhito ;   et al. | 2019-06-20 |
Producing method and apparatus of silicon single crystal, and silicon single crystal ingot Grant 10,294,583 - Narushima , et al. | 2019-05-21 |
Method for producing single crystal, and method for producing silicon wafer Grant 10,233,562 - Narushima , et al. | 2019-03-19 |
Manufacturing method of silicon monocrystal Grant 10,227,710 - Narushima , et al. | 2019-03-12 |
Method for producing a silicon single crystal doped with red phosphorous with reduced number of stacking faults and method for producing a silicon wafer using the same Grant 10,100,429 - Narushima , et al. October 16, 2 | 2018-10-16 |
Method For Producing Single Crystal App 20170327966 - NARUSHIMA; Yasuhito ;   et al. | 2017-11-16 |
Method For Producing Single Crystal And Method For Producing Silicon Wafer App 20170283980 - NARUSHIMA; Yasuhito ;   et al. | 2017-10-05 |
Manufacturing Method Of Silicon Monocrystal App 20170029975 - NARUSHIMA; Yasuhito ;   et al. | 2017-02-02 |
Method For Producing Single Crystal, And Method For Producing Silicon Wafer App 20160102418 - NARUSHIMA; Yasuhito ;   et al. | 2016-04-14 |
Silicon single crystal pulling device and graphite member used therein Grant 9,212,431 - Kawazoe , et al. December 15, 2 | 2015-12-15 |
Processes for production of silicon ingot, silicon wafer and epitaxial wafer, and silicon ingot Grant 9,074,298 - Kawazoe , et al. July 7, 2 | 2015-07-07 |
Method of manufacturing monocrystal, flow straightening cylinder, and monocrystal pulling-up device Grant 8,961,686 - Kawazoe , et al. February 24, 2 | 2015-02-24 |
Silicon single crystal pull-up apparatus that pulls a doped silicon single crystal from a melt Grant 8,920,561 - Narushima , et al. December 30, 2 | 2014-12-30 |
Silicon single crystal pull-up apparatus that pulls a doped silicon single crystal from a melt Grant 08920561 - | 2014-12-30 |
Method of producing single crystal silicon Grant 8,888,911 - Uto , et al. November 18, 2 | 2014-11-18 |
Method for manufacturing single crystal Grant 8,852,340 - Narushima , et al. October 7, 2 | 2014-10-07 |
Method of manufacturing silicon single crystal Grant 8,840,721 - Narushima , et al. September 23, 2 | 2014-09-23 |
Process for production of silicon single crystal, and highly doped N-type semiconductor substrate Grant 8,747,551 - Kawazoe , et al. June 10, 2 | 2014-06-10 |
Doping apparatus for simultaneously injecting two dopants into a semiconductor melt at different positions and method for manufacturing silicon single crystal using the doping apparatus Grant 8,715,416 - Narushima , et al. May 6, 2 | 2014-05-06 |
Method For Manufacturing Single Crystal App 20140033967 - NARUSHIMA; Yasuhito ;   et al. | 2014-02-06 |
Process For Production Of Silicon Single Crystal, And Highly Doped N-type Semiconductor Substrate App 20140020617 - KAWAZOE; Shinichi ;   et al. | 2014-01-23 |
Method for manufacturing single crystal Grant 8,580,032 - Narushima , et al. November 12, 2 | 2013-11-12 |
Process for production of silicon single crystal, and highly doped N-type semiconductor substrate Grant 8,574,363 - Kawazoe , et al. November 5, 2 | 2013-11-05 |
Manufacturing method for silicon single crystal Grant 8,535,439 - Narushima , et al. September 17, 2 | 2013-09-17 |
Silicon single crystal pull-up apparatus having a sliding sample tube Grant 8,518,180 - Narushima , et al. August 27, 2 | 2013-08-27 |
Method of dopant injection, N-type silicon single-crystal, doping apparatus and pull-up device Grant 8,409,347 - Kawazoe , et al. April 2, 2 | 2013-04-02 |
Dopant implanting method and doping apparatus Grant 8,283,241 - Narushima , et al. October 9, 2 | 2012-10-09 |
Semiconductor single crystal manufacturing device and manufacturing method Grant 8,187,383 - Kubota , et al. May 29, 2 | 2012-05-29 |
Method for manufacturing single crystal Grant 8,110,042 - Narushima , et al. February 7, 2 | 2012-02-07 |
Process for production of silicon single crystal Grant 8,043,428 - Kawazoe , et al. October 25, 2 | 2011-10-25 |
Processes For Production Of Silicon Ingot, Silicon Wafer And Epitaxial Wafer , And Silicon Ingot App 20110140241 - Kawazoe; Shinichi ;   et al. | 2011-06-16 |
Silicon Single Crystal Pull-up Apparatus App 20110132257 - Narushima; Yasuhito ;   et al. | 2011-06-09 |
Silicon Single Crystal Pull-up Apparatus App 20110120367 - Narushima; Yasuhito ;   et al. | 2011-05-26 |
Method Of Manufacturing Silicon Single Crystal App 20110114011 - NARUSHIMA; Yasuhito ;   et al. | 2011-05-19 |
Method Of Producing Single Crystal Silicon App 20110056428 - Uto; Masayuki ;   et al. | 2011-03-10 |
Process For Production Of Silicon Single Crystal, And Highly Doped N-type Semiconductor Substrate App 20110049438 - Kawazone; Shinichi ;   et al. | 2011-03-03 |
Producing Method And Apparatus Of Silicon Single Crystal, And Silicon Single Crystal Ingot App 20100294999 - Narushima; Yasuhito ;   et al. | 2010-11-25 |
Method Of Manufacturing Monocrystal, Flow Straightening Cylinder, And Monocrystal Pulling-up Device App 20100212580 - Kawazoe; Shinichi ;   et al. | 2010-08-26 |
Manufacturing Method For Silicon Single Crystal App 20100175612 - NARUSHIMA; Yasuhito ;   et al. | 2010-07-15 |
Dopant Implanting Method And Doping Apparatus App 20100151667 - Narushima; Yasuhito ;   et al. | 2010-06-17 |
Process For Production Of Silicon Single Crystal, And Silicon Single Crystal Substrate App 20100133485 - Kawazoe; Shinichi ;   et al. | 2010-06-03 |
Method For Manufacturing Single Crystal App 20100071612 - Narushima; Yasuhito ;   et al. | 2010-03-25 |
Method For Manufacturing Single Crystal App 20100050931 - Narushima; Yasuhito ;   et al. | 2010-03-04 |
Doping Apparatus And Method For Manufacturing Silicon Single Crystal App 20100031871 - Narushima; Yasuhito ;   et al. | 2010-02-11 |
Method Of Dopant Injection, N-type Silicon Single-crystal, Doping Apparatus And Pull-up Device App 20090314996 - Kawazoe; Shinichi ;   et al. | 2009-12-24 |
Method Of Injecting Dopant Gas App 20090145350 - Narushima; Yasuhito ;   et al. | 2009-06-11 |
Semiconductor Single Crystal Manufacturing Device and Manufacturing Method App 20090120352 - Kubota; Toshimichi ;   et al. | 2009-05-14 |
Silicon Single Crystal Pulling Device And Graphite Member Used Therein App 20080078322 - Kawazoe; Shinichi ;   et al. | 2008-04-03 |
Apparatus for fabricating single-crystal silicon Grant 6,071,341 - Shimanuki , et al. June 6, 2 | 2000-06-06 |
Method of fabricating silicon single crystals Grant 5,968,262 - Saishouji , et al. October 19, 1 | 1999-10-19 |
Apparatus for fabricating a single-crystal semiconductor Grant 5,853,480 - Kubota , et al. December 29, 1 | 1998-12-29 |
Semiconductor single-crystal pulling apparatus Grant 5,824,152 - Kubota , et al. October 20, 1 | 1998-10-20 |
Method for controlling task process and device thereof Grant 4,612,418 - Takeda , et al. September 16, 1 | 1986-09-16 |