loadpatents
Patent applications and USPTO patent grants for Kubota; Takeo.The latest application filed is for "method for manufacturing semiconductor device".
Patent | Date |
---|---|
Method for manufacturing semiconductor device Grant 10,777,424 - Kubota Sept | 2020-09-15 |
Method For Manufacturing Semiconductor Device App 20190267247 - Kubota; Takeo | 2019-08-29 |
Method for manufacturing semiconductor device Grant 8,748,289 - Nakanishi , et al. June 10, 2 | 2014-06-10 |
Polishing apparatus and polishing method Grant 8,641,480 - Nakanishi , et al. February 4, 2 | 2014-02-04 |
Method For Manufacturing Semiconductor Device App 20130237033 - NAKANISHI; Masayuki ;   et al. | 2013-09-12 |
Method for manufacturing semiconductor device Grant 8,445,360 - Nakanishi , et al. May 21, 2 | 2013-05-21 |
Polishing Method App 20110256811 - NAKANISHI; Masayuki ;   et al. | 2011-10-20 |
Polishing Apparatus And Polishing Method App 20110217906 - NAKANISHI; Masayuki ;   et al. | 2011-09-08 |
Method For Manufacturing Semiconductor Device App 20110207294 - NAKANISHI; Masayuki ;   et al. | 2011-08-25 |
Fabricating method of nonvolatile semiconductor storage apparatus Grant 7,888,139 - Matsui , et al. February 15, 2 | 2011-02-15 |
Polishing apparatus and polishing method Grant 7,744,445 - Kubota , et al. June 29, 2 | 2010-06-29 |
Fabricating Method Of Nonvolatile Semiconductor Storage Apparatus App 20100144062 - MATSUI; Yukiteru ;   et al. | 2010-06-10 |
Peripheral processing method and method of manufacturing a semiconductor device Grant 7,638,439 - Kubota , et al. December 29, 2 | 2009-12-29 |
Method For Fabricating A Semiconductor Device App 20090191706 - Kubota; Takeo | 2009-07-30 |
Polishing apparatus and polishing method App 20090017730 - Kubota; Takeo ;   et al. | 2009-01-15 |
Polishing method for semiconductor wafer and polishing apparatus for semiconductor wafer App 20080113590 - Kubota; Takeo ;   et al. | 2008-05-15 |
Polishing method and polishing liquid Grant 7,354,861 - Nakamura , et al. April 8, 2 | 2008-04-08 |
Peripheral processing method and method of manufacturing a semiconductor device App 20070264822 - Kubota; Takeo ;   et al. | 2007-11-15 |
Polishing method and polishing system Grant 7,172,492 - Kubota February 6, 2 | 2007-02-06 |
Substrate processing method and semiconductor device manufacturing method App 20070000873 - Kubota; Takeo ;   et al. | 2007-01-04 |
Polishing method and polishing system App 20060068684 - Kubota; Takeo | 2006-03-30 |
Substrate processing method and substrate processing apparatus Grant 7,014,529 - Kubota , et al. March 21, 2 | 2006-03-21 |
Method of judging residual film by optical measurement Grant 6,984,532 - Kubota , et al. January 10, 2 | 2006-01-10 |
Method of inspecting process for manufacturing semiconductor device and method of manufacturing semiconductor device Grant 6,743,645 - Kubota , et al. June 1, 2 | 2004-06-01 |
Method of judging residual film by optical measurement App 20030197859 - Kubota, Takeo ;   et al. | 2003-10-23 |
Method of inspecting process for manufacturing semiconductor device and method of manufacturing semiconductor device App 20020142498 - Kubota, Takeo ;   et al. | 2002-10-03 |
Method of manufacturing semiconductor device Grant 6,429,134 - Kubota , et al. August 6, 2 | 2002-08-06 |
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