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Piezoelectric thin film resonator and manufacturing method thereof Grant 8,776,334 - Fujii , et al. July 15, 2 | 2014-07-15 |
Method for producing piezoelectric thin-film resonator Grant 8,726,475 - Fujii , et al. May 20, 2 | 2014-05-20 |
Piezoelectric electronic component, process for producing the same, and communication apparatus Grant 8,123,966 - Kubo , et al. February 28, 2 | 2012-02-28 |
Piezoelectric Thin-film Resonator And Method For Producing The Same App 20090000091 - FUJII; Hidetoshi ;   et al. | 2009-01-01 |
Piezoelectric thin-film resonator and method for producing the same Grant 7,436,102 - Fujii , et al. October 14, 2 | 2008-10-14 |
Piezoelectric Thin Film Resonator And Manufacturing Method Thereof App 20080178444 - Fujii; Hidetoshi ;   et al. | 2008-07-31 |
Piezoelectric filter Grant 7,378,922 - Kubo , et al. May 27, 2 | 2008-05-27 |
Piezoelectric Electronic Component, Process for Producing the Same, and Communication Apparatus App 20080099428 - Kubo; Ryuichi ;   et al. | 2008-05-01 |
Piezoelectric electronic component, and production method therefor, and communication equipment Grant 7,342,351 - Kubo , et al. March 11, 2 | 2008-03-11 |
Piezoelectric thin film resonator Grant 7,327,209 - Fujii , et al. February 5, 2 | 2008-02-05 |
Hermetically sealing a package to include a barrier metal Grant 7,259,032 - Murata , et al. August 21, 2 | 2007-08-21 |
Piezoelectric thin film resonator and manufacturing method thereof App 20070152540 - Fujii; Hidetoshi ;   et al. | 2007-07-05 |
Piezoelectric thin film resonator App 20070152775 - Fujii; Hidetoshi ;   et al. | 2007-07-05 |
Piezoelectric filter App 20070115079 - Kubo; Ryuichi ;   et al. | 2007-05-24 |
Piezoelectric electronic component, and production method therefor, and communication equipment App 20070013268 - Kubo; Ryuichi ;   et al. | 2007-01-18 |
Piezoelectric resonator, piezoelectric filter, and communication apparatus Grant 7,161,447 - Nomura , et al. January 9, 2 | 2007-01-09 |
Piezoelectric thin-film resonator and method for producing the same App 20060097823 - Fujii; Hidetoshi ;   et al. | 2006-05-11 |
Manufacturing method of electronic device App 20040100164 - Murata, Koji ;   et al. | 2004-05-27 |
Infrared sensor Grant 6,720,559 - Kubo April 13, 2 | 2004-04-13 |
Piezoelectric resonator, piezoelectric filter, and communication apparatus App 20040056735 - Nomura, Tadashi ;   et al. | 2004-03-25 |
Infrared detecting element, infrared two-dimensional image sensor, and method of manufacturing the same Grant 6,674,081 - Hashimoto , et al. January 6, 2 | 2004-01-06 |
Infrared detecting element, infrared two-dimensional image sensor, and method of manufacturing the same Grant 6,635,495 - Hashimoto , et al. October 21, 2 | 2003-10-21 |
Infrared detecting element, infrared two-dimensional image sensor, and method of manufacturing the same App 20030066967 - Hashimoto, Kazuhiko ;   et al. | 2003-04-10 |
Infrared sensor App 20020069909 - Kubo, Ryuichi | 2002-06-13 |
Infrared sensor App 20020066477 - Kubo, Ryuichi | 2002-06-06 |
Infrared detecting element, infrared two-dimensional image sensor, and method of manufcturing the same App 20020005485 - Hashimoto, Kazuhiko ;   et al. | 2002-01-17 |
Apparatus and method for forming thin film at low temperature and high deposition rate App 20020004266 - Hashimoto, Kazuhiko ;   et al. | 2002-01-10 |
Thermal type infrared sensing device, fabrication method for thermal type infrared sensing device, and infrared imaging system and infrared imaging apparatus Grant 6,262,418 - Hashimoto , et al. July 17, 2 | 2001-07-17 |