Patent | Date |
---|
Film deposition method Grant 11,404,265 - Kubo , et al. August 2, 2 | 2022-08-02 |
Deposition method Grant 11,170,999 - Kubo , et al. November 9, 2 | 2021-11-09 |
Method for depositing a silicon nitride film and film deposition apparatus Grant 11,075,074 - Kato , et al. July 27, 2 | 2021-07-27 |
Method for depositing a silicon nitride film and film deposition apparatus Grant 10,748,758 - Kato , et al. A | 2020-08-18 |
Deposition Method App 20200251326 - Kind Code | 2020-08-06 |
Film Deposition Method App 20200243330 - KUBO; Kazumi ;   et al. | 2020-07-30 |
Method for depositing a silicon nitride film and film deposition apparatus Grant 10,643,837 - Kato , et al. | 2020-05-05 |
Film deposition method of depositing film and film deposition apparatus Grant 10,636,648 - Kubo , et al. | 2020-04-28 |
Deposition Method App 20200017968 - KATO; Hitoshi ;   et al. | 2020-01-16 |
Film Deposition Method Of Depositing Film And Film Deposition Apparatus App 20190172700 - KUBO; Kazumi ;   et al. | 2019-06-06 |
Method For Depositing A Silicon Nitride Film And Film Deposition Apparatus App 20190051512 - KATO; Hitoshi ;   et al. | 2019-02-14 |
Method For Depositing A Silicon Nitride Film And Film Deposition Apparatus App 20190051511 - KATO; Hitoshi ;   et al. | 2019-02-14 |
Method For Depositing A Silicon Nitride Film And Film Deposition Apparatus App 20190051513 - KATO; Hitoshi ;   et al. | 2019-02-14 |
Control Device, Substrate Processing System, Substrate Processing Method, And Program App 20170278699 - Kasai; Takahito ;   et al. | 2017-09-28 |
Method and apparatus for forming oxide film on carbon film Grant 8,518,834 - Kakimoto , et al. August 27, 2 | 2013-08-27 |
Method And Apparatus For Forming Oxide Film On Carbon Film App 20120164844 - KAKIMOTO; Akinobu ;   et al. | 2012-06-28 |
Method Of Cleaning A Thin Film Forming Apparatus, Thin Film Forming Method, And Thin Film Forming Apparatus App 20120015525 - ENDO; Atsushi ;   et al. | 2012-01-19 |
Film formation method and apparatus for semiconductor process Grant 7,696,106 - Okada , et al. April 13, 2 | 2010-04-13 |
Film formation method and apparatus for semiconductor process Grant 7,637,268 - Kato , et al. December 29, 2 | 2009-12-29 |
Film formation method and apparatus for semiconductor process App 20090029562 - Okada; Mitsuhiro ;   et al. | 2009-01-29 |
Mouthpiece for Flattening Wrinkles App 20080193897 - Kubo; Kazumi ;   et al. | 2008-08-14 |
Film formation method and apparatus for semiconductor process App 20060288935 - Kato; Hitoshi ;   et al. | 2006-12-28 |
Method of forming dielectric film Grant 7,105,362 - Takahashi , et al. September 12, 2 | 2006-09-12 |
Method of forming dielectric film App 20060008969 - Takahashi; Tsuyoshi ;   et al. | 2006-01-12 |
Fabrication process of a semiconductor device Grant 6,953,731 - Shinriki , et al. October 11, 2 | 2005-10-11 |
Optical component fixing method and optical component support Grant 6,907,059 - Miura , et al. June 14, 2 | 2005-06-14 |
Fabrication process of a semiconductor device App 20030236001 - Shinriki, Hiroshi ;   et al. | 2003-12-25 |
1-aryl-substituted azole, non-linear optical material and novel molecular crystal containing same and method and module for the conversion of light wavelength using same Grant 5,310,918 - Uchino , et al. May 10, 1 | 1994-05-10 |