Kubista; David J.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Kubista; David J..The latest application filed is for "methods for forming small-scale capacitor structures".

Company Profile

0.17.18

Kubista; David J. - Nampa ID US

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Methods and systems for controlling temperature during microfeature workpiece processing, E.G., CVD deposition Grant 8,518,184 - Beaman , et al. August 27, 2	2013-08-27
Methods For Forming Small-scale Capacitor Structures App 20130166057 - Zheng; Lingyi A. ; et al.	2013-06-27
Methods for forming small-scale capacitor structures Grant 8,384,192 - Zheng , et al. February 26, 2	2013-02-26
Methods For Forming Small-scale Capacitor Structures App 20110163416 - Zheng; Lingyi A. ; et al.	2011-07-07
Methods for forming small-scale capacitor structures Grant 7,906,393 - Zheng , et al. March 15, 2	2011-03-15
Methods And Systems For Controlling Temperature During Microfeature Workpiece Processing, E.g., Cvd Deposition App 20100282164 - Beaman; Kevin L. ; et al.	2010-11-11
Methods and systems for controlling temperature during microfeature workpiece processing, E.G. CVD deposition Grant 7,771,537 - Beaman , et al. August 10, 2	2010-08-10
Systems for depositing material onto workpieces in reaction chambers and methods for removing byproducts from reaction chambers Grant 7,647,886 - Kubista , et al. January 19, 2	2010-01-19
Methods and apparatus for processing microfeature workpieces, e.g., for depositing materials on microfeature workpieces Grant 7,422,635 - Zheng , et al. September 9, 2	2008-09-09
Methods and apparatus for processing microfeature workpieces; methods for conditioning ALD reaction chambers Grant 7,344,755 - Beaman , et al. March 18, 2	2008-03-18
Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces Grant 7,279,398 - Basceri , et al. October 9, 2	2007-10-09
Methods and systems for controlling temperature during microfeature workpiece processing, e.g., CVD deposition Grant 7,258,892 - Beaman , et al. August 21, 2	2007-08-21
Microfeature workpiece processing apparatus and methods for batch deposition of materials on microfeature workpieces Grant 7,235,138 - Zheng , et al. June 26, 2	2007-06-26
Methods and apparatus for processing microfeature workpieces, e.g., for depositing materials on microfeature workpieces App 20060213440 - Zheng; Lingyi A. ; et al.	2006-09-28
Methods and apparatus for processing microfeature workpieces, e.g., for depositing materials on microfeature workpieces App 20060205187 - Zheng; Lingyi A. ; et al.	2006-09-14
Methods and systems for controlling temperature during microfeature workpiece processing, E.G. CVD deposition App 20060204649 - Beaman; Kevin L. ; et al.	2006-09-14
Systems for depositing material onto workpieces in reaction chambers and methods for removing byproducts from reaction chambers App 20060196538 - Kubista; David J. ; et al.	2006-09-07
Microfeature workpiece processing apparatus and methods for batch deposition of materials on microfeature workpieces App 20060198955 - Zheng; Lingyi A. ; et al.	2006-09-07
Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces App 20060121689 - Basceri; Cem ; et al.	2006-06-08
Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces Grant 7,056,806 - Basceri , et al. June 6, 2	2006-06-06
Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces App 20060115957 - Basceri; Cem ; et al.	2006-06-01
Methods for forming small-scale capacitor structures App 20050164466 - Zheng, Lingyi A. ; et al.	2005-07-28
Methods and systems for controlling temperature during microfeature workpiece processing, e.g., CVD deposition App 20050126489 - Beaman, Kevin L. ; et al.	2005-06-16
Systems for depositing material onto workpieces in reaction chambers and methods for removing byproducts from reaction chambers App 20050081786 - Kubista, David J. ; et al.	2005-04-21
Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces App 20050059261 - Basceri, Cem ; et al.	2005-03-17
Methods and apparatus for processing microfeature workpieces, e.g., for depositing materials on microfeature workpieces App 20050045102 - Zheng, Lingyi A. ; et al.	2005-03-03
Methods and apparatus for processing microfeature workpieces; methods for conditioning ALD reaction chambers App 20050039680 - Beaman, Kevin L. ; et al.	2005-02-24
Apparatus and process of improving atomic layer deposition chamber performance Grant 6,758,911 - Campbell , et al. July 6, 2	2004-07-06
Apparatus and process of improving atomic layer deposition chamber performance Grant 6,716,284 - Campbell , et al. April 6, 2	2004-04-06
Apparatus and process of improving atomic layer deposition chamber performance App 20030070618 - Campbell, Philip H. ; et al.	2003-04-17
Apparatus and process of improving atomic layer deposition chamber performance App 20030070609 - Campbell, Philip H. ; et al.	2003-04-17
Apparatus and process of improving atomic layer deposition chamber performance Grant 6,461,436 - Campbell , et al. October 8, 2	2002-10-08
Sputtering with collinator cleaning within the sputtering chamber Grant 5,409,587 - Sandhu , et al. April 25, 1	1995-04-25

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