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Inspection method and apparatus and lithographic processing cell
Grant RE49,199 - Mos , et al. September 6, 2 | 2022-09-06 |
Metrology method, target and substrate
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Metrology method, patterning device, apparatus and computer program
Grant 11,385,553 - Zhou , et al. July 12, 2 | 2022-07-12 |
Metrology Method, Target And Substrate
App 20220057192 - BHATTACHARYYA; Kaustuve ; et al. | 2022-02-24 |
Method And Apparatus For Inspection And Metrology
App 20220027437 - MOS; Everhardus Cornelis ; et al. | 2022-01-27 |
Metrology method, target and substrate
Grant 11,204,239 - Bhattacharyya , et al. December 21, 2 | 2021-12-21 |
Method and apparatus for inspection and metrology
Grant 11,170,072 - Mos , et al. November 9, 2 | 2021-11-09 |
Metrology Method, Patterning Device, Apparatus And Computer Program
App 20210255553 - ZHOU; Zili ; et al. | 2021-08-19 |
Method of controlling a patterning process, lithographic apparatus, metrology apparatus lithographic cell and associated computer program
Grant 11,048,174 - Kubis , et al. June 29, 2 | 2021-06-29 |
Metrology method, patterning device, apparatus and computer program
Grant 10,996,570 - Zhou , et al. May 4, 2 | 2021-05-04 |
Method and apparatus to correct for patterning process error
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Metrology Method, Target And Substrate
App 20200348125 - BHATTACHARYYA; Kaustuve ; et al. | 2020-11-05 |
Method Of Controlling A Patterning Process, Lithographic Apparatus, Metrology Apparatus Lithographic Cell And Associated Compute
App 20200233311 - KUBIS; Michael ; et al. | 2020-07-23 |
Metrology method, target and substrate
Grant 10,718,604 - Bhattacharyya , et al. | 2020-07-21 |
Determining edge roughness parameters
Grant 10,634,490 - Jak , et al. | 2020-04-28 |
Metrology Method, Target And Substrate
App 20190346256 - BHATTACHARYYA; Kaustuve ; et al. | 2019-11-14 |
Metrology method, target and substrate
Grant 10,386,176 - Bhattacharyya , et al. A | 2019-08-20 |
Determining Edge Roughness Parameters
App 20180364036 - JAK; Martin Jacobus Johan ; et al. | 2018-12-20 |
Method And Apparatus To Correct For Patterning Process Error
App 20180307135 - TEN BERGE; Peter ; et al. | 2018-10-25 |
Metrology method and inspection apparatus, lithographic system and device manufacturing method
Grant 9,946,167 - Smilde , et al. April 17, 2 | 2018-04-17 |
Method And Apparatus For Inspection And Metrology
App 20180067900 - MOS; Everhardus Cornelis ; et al. | 2018-03-08 |
Method to determine the usefulness of alignment marks to correct overlay, and a combination of a lithographic apparatus and an overlay measurement system
Grant 9,454,084 - Lyulina , et al. September 27, 2 | 2016-09-27 |
Substrate and Patterning Device for Use in Metrology, Metrology Method and Device Manufacturing Method
App 20160179019 - VAN DER SCHAAR; Maurits ; et al. | 2016-06-23 |
Substrate and patterning device for use in metrology, metrology method and device manufacturing method
Grant 9,331,022 - Van Der Schaar , et al. May 3, 2 | 2016-05-03 |
Method of applying a pattern to a substrate, device manufacturing method and lithographic apparatus for use in such methods
Grant 9,291,916 - Van Der Sanden , et al. March 22, 2 | 2016-03-22 |
Metrology Method, Target And Substrate
App 20160061589 - BHATTACHARYYA; Kaustuve ; et al. | 2016-03-03 |
Metrology Method and Inspection Apparatus, Lithographic System and Device Manufacturing Method
App 20160033877 - SMILDE; Hendrik Jan Hidde ; et al. | 2016-02-04 |
Device manufacturing method and associated lithographic apparatus, inspection apparatus, and lithographic processing cell
Grant 9,163,935 - Den Boef , et al. October 20, 2 | 2015-10-20 |
Metrology method and apparatus, and device manufacturing method
Grant 9,158,194 - Koolen , et al. October 13, 2 | 2015-10-13 |
Metrology method and inspection apparatus, lithographic system and device manufacturing method
Grant 9,140,998 - Smilde , et al. September 22, 2 | 2015-09-22 |
Methods and scatterometers, lithographic systems, and lithographic processing cells
Grant 9,081,303 - Cramer , et al. July 14, 2 | 2015-07-14 |
Metrology method and apparatus, and device manufacturing method
Grant 9,069,264 - Warnaar , et al. June 30, 2 | 2015-06-30 |
Method of Applying a Pattern to a Substrate, Device Manufacturing Method and Lithographic Apparatus for Use in Such Methods
App 20150153656 - VAN DER SANDEN; Stefan Cornelis Theodorus ; et al. | 2015-06-04 |
Method To Determine The Usefulness Of Alignment Marks To Correct Overlay, And A Combination Of A Lithographic Apparatus And An Overlay Measurement System
App 20150146188 - Lyulina; Irina ; et al. | 2015-05-28 |
Methods and scatterometers, lithographic systems, and lithographic processing cells
Grant 8,994,944 - Cramer , et al. March 31, 2 | 2015-03-31 |
Method of applying a pattern to a substrate, device manufacturing method and lithographic apparatus for use in such methods
Grant 8,976,355 - Van Der Sanden , et al. March 10, 2 | 2015-03-10 |
Method and apparatus for determining an overlay error
Grant 8,908,147 - Den Boef , et al. December 9, 2 | 2014-12-09 |
Inspection method and apparatus and lithographic processing cell
Grant 8,887,107 - Mos , et al. November 11, 2 | 2014-11-11 |
Substrate and Patterning Device for Use in Metrology, Metrology Method and Device Manufacturing Method
App 20140233031 - VAN DER SCHAAR; Maurits ; et al. | 2014-08-21 |
Methods and Scatterometers, Lithographic Systems, and Lithographic Processing Cells
App 20140139814 - CRAMER; Hugo Augustinus Joseph ; et al. | 2014-05-22 |
Substrate and patterning device for use in metrology, metrology method and device manufacturing method
Grant 8,709,687 - Van Der Schaar , et al. April 29, 2 | 2014-04-29 |
Inspection Method and Apparatus and Lithographic Processing Cell
App 20140089870 - MOS; Everhardus Cornelis ; et al. | 2014-03-27 |
Method of Applying a Pattern to a Substrate, Device Manufacturing Method and Lithographic Apparatus for Use in Such Methods
App 20130230797 - VAN DER SANDEN; Stefan Cornelis Theodorus ; et al. | 2013-09-05 |
Device Manufacturing Method and Associated Lithographic Apparatus, Inspection Apparatus, and Lithographic Processing Cell
App 20130148121 - DEN BOEF; Arie Jeffrey ; et al. | 2013-06-13 |
Metrology Method and Apparatus, and Device Manufacturing Method
App 20130100427 - KOOLEN; Armand Eugene Albert ; et al. | 2013-04-25 |
Substrate and Patterning Device for Use in Metrology, Metrology Method and Device Manufacturing Method
App 20130059240 - Van Der Schaar; Maurits ; et al. | 2013-03-07 |
Metrology Method and Apparatus, and Device Manufacturing Method
App 20130050501 - WARNAAR; Patrick ; et al. | 2013-02-28 |
Metrology Method and Inspection Apparatus, Lithographic System and Device Manufacturing Method
App 20120123581 - SMILDE; Hendrik Jan Hidde ; et al. | 2012-05-17 |
Method and Apparatus for Determining an Overlay Error
App 20120013881 - Den Boef; Arie Jeffrey ; et al. | 2012-01-19 |
Methods and Scatterometers, Lithographic Systems, and Lithographic Processing Cells
App 20110027704 - Cramer; Hugo Augustinus Joseph ; et al. | 2011-02-03 |
Compensation of Process-Induced Displacement
App 20100040983 - Ollendorf; Heinrich ; et al. | 2010-02-18 |
Method for projection of a circuit pattern, which is arranged on a mask, onto a semiconductor wafer
Grant 7,252,913 - Kochan , et al. August 7, 2 | 2007-08-07 |
Method for projection of a circuit pattern, which is arranged on a mask, onto a semiconductor wafer
App 20050050512 - Kochan, Bernd ; et al. | 2005-03-03 |
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