Kubena; Randall L.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Kubena; Randall L..The latest application filed is for "quartz mems piezoelectric resonator for chipscale rf antennae".

Company Profile

11.81.25

Kubena; Randall L. - Oak Park CA
Kubena; Randall L - Oak Park CA
Kubena; Randall L. - Agoura CA
Kubena; Randall L. - Canoga Park CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Noise suppression in a phononic comb Grant 11,431,293 - Kubena , et al. August 30, 2	2022-08-30
Quartz MEMS Piezoelectric Resonator for Chipscale RF Antennae App 20220140813 - Kubena; Randall L. ; et al.	2022-05-05
Antenna Dynamically Matched With Electromechanical Resonators App 20220077588 - WALL; Walter S. ; et al.	2022-03-10
Quartz MEMS piezoelectric resonator for chipscale RF antennae Grant 11,239,823 - Kubena , et al. February 1, 2	2022-02-01
Antenna dynamically matched with electromechanical resonators Grant 11,211,711 - Wall , et al. December 28, 2	2021-12-28
Enhanced stability oscillators using a phononic comb Grant 11,156,897 - Kubena , et al. October 26, 2	2021-10-26
Antenna loaded with electromechanical resonators Grant 11,145,982 - Wall , et al. October 12, 2	2021-10-12
HF-VHF quartz MEMS resonator Grant 11,101,786 - Kubena , et al. August 24, 2	2021-08-24
Enhanced Stability Oscillators Using A Phononic Comb App 20210091748 - KUBENA; Randall L. ; et al.	2021-03-25
Dual magnetic and electric field quartz sensor Grant 10,921,360 - Kubena , et al. February 16, 2	2021-02-16
High dynamic range gyroscope Grant 10,914,585 - Sorenson , et al. February 9, 2	2021-02-09
Broadband integrated RF magnetic antenna Grant 10,819,276 - Kubena , et al. October 27, 2	2020-10-27
High dynamic range gyroscope Grant 10,697,772 - Sorenson , et al.	2020-06-30
Thin MEMS die Grant 10,626,011 - Kubena , et al.	2020-04-21
Integrated quartz MEMS tuning fork resonator/oscillator Grant 10,581,402 - Kubena	2020-03-03
High stability angular sensor Grant 10,571,267 - Sorenson , et al. Feb	2020-02-25
High dynamic range gyroscope Grant 10,444,014 - Sorenson , et al. Oc	2019-10-15
High-Q quartz-based inductor array for antenna matching Grant 10,389,392 - Kubena , et al. A	2019-08-20
Dual Magnetic and Electric Field Quartz Sensor App 20190250198 - Kubena; Randall L. ; et al.	2019-08-15
ALD metal coatings for high Q MEMS structures Grant 10,266,398 - Kubena , et al.	2019-04-23
High-Q quartz-based inductors for high power LF communication Grant 10,177,737 - Kubena , et al. J	2019-01-08
High Q quartz-based MEMS resonators and method of fabricating same Grant 10,141,906 - Chang , et al. Nov	2018-11-27
Integrated quartz MEMS tuning fork resonator/oscillator Grant 10,110,198 - Kubena October 23, 2	2018-10-23
Antenna Dynamically Matched With Electromechanical Resonators App 20180226720 - WALL; Walter S. ; et al.	2018-08-09
Antenna Loaded with Electromechanical Resonators App 20180198211 - WALL; Walter S. ; et al.	2018-07-12
Rounded and curved integrated tethers for quartz resonators Grant 9,991,863 - Kubena , et al. June 5, 2	2018-06-05
High Q quartz-based MEMS resonators and methods of fabricating same Grant 9,985,198 - Chang , et al. May 29, 2	2018-05-29
Quartz resonator with plasma etched tethers for stress isolation from the mounting contacts Grant 9,879,997 - Kubena , et al. January 30, 2	2018-01-30
Resonator assembly comprising a silicon resonator and a quartz resonator Grant 9,250,074 - Kubena , et al. February 2, 2	2016-02-02
Method for producing a disk resonator gyroscope Grant 9,046,541 - Kubena , et al. June 2, 2	2015-06-02
Frequency locking of resonators for improved temperature control of gyroscopes Grant 9,038,459 - Kubena May 26, 2	2015-05-26
Phase noise reduction control loop for oscillators using nonlinear resonator operation Grant 8,994,465 - Kubena , et al. March 31, 2	2015-03-31
Method of manufacturing MEMS based quartz hybrid filters Grant 8,782,876 - Kubena , et al. July 22, 2	2014-07-22
Method of fabrication an ultra-thin quartz resonator Grant 8,769,802 - Chang , et al. July 8, 2	2014-07-08
Quartz-based MEMS resonators and methods of fabricating same Grant 8,765,615 - Chang , et al. July 1, 2	2014-07-01
Quartz-based disk resonator gyro with ultra-thin conductive outer electrodes and method of making same Grant 8,766,745 - Kubena , et al. July 1, 2	2014-07-01
Resonator with a fluid cavity therein Grant 8,593,037 - Kubena , et al. November 26, 2	2013-11-26
Piezoelectric resonator with capacitive sense and/or force rebalance electrodes to control an amplitude of vibration Grant 8,569,937 - Kubena , et al. October 29, 2	2013-10-29
MEMS on-chip inertial navigation system with error correction Grant 8,522,612 - Kubena September 3, 2	2013-09-03
Frequency locking of resonators for improved temperature control of gyroscopes Grant 8,402,824 - Kubena March 26, 2	2013-03-26
Method of fabricating quartz resonators Grant 8,176,607 - Kubena , et al. May 15, 2	2012-05-15
MEMS on-chip inertial navigation system with error correction Grant 8,151,640 - Kubena April 10, 2	2012-04-10
Large area integration of quartz resonators with electronics Grant 8,138,016 - Chang , et al. March 20, 2	2012-03-20
MEMS-based quartz hybrid filters and a method of making the same Grant 7,994,877 - Kubena , et al. August 9, 2	2011-08-09
Low frequency quartz based MEMS resonators and method of fabricating the same Grant 7,851,971 - Chang , et al. December 14, 2	2010-12-14
Integrated quartz oscillator on an active electronic substrate Grant 7,830,074 - Kubena , et al. November 9, 2	2010-11-09
Method of fabricating an ultra thin quartz resonator component Grant 7,802,356 - Chang , et al. September 28, 2	2010-09-28
Quartz-based nanoresonator Grant 7,750,535 - Kubena , et al. July 6, 2	2010-07-06
Cloverleaf microgyroscope with through-wafer interconnects and method of manufacturing a cloverleaf microgyroscope with through-wafer interconnects Grant 7,671,431 - Kubena , et al. March 2, 2	2010-03-02
Low Frequency Quartz Based Mems Resonators And Method Of Fabricating The Same App 20100033062 - CHANG; David T. ; et al.	2010-02-11
Method of fabricating a low frequency quartz resonator Grant 7,647,688 - Chang , et al. January 19, 2	2010-01-19
Disc resonator gyroscopes Grant 7,581,443 - Kubena , et al. September 1, 2	2009-09-01
Large Area Integration Of Quartz Resonators With Electronics App 20090189294 - CHANG; David T. ; et al.	2009-07-30
Method for fabricating quartz-based nanoresonators Grant 7,559,130 - Kubena , et al. July 14, 2	2009-07-14
Method for large scale integration of quartz-based devices Grant 7,555,824 - Chang , et al. July 7, 2	2009-07-07
Cascaded monolithic crystal filter with high out-of-band rejection Grant 7,557,677 - Hsu , et al. July 7, 2	2009-07-07
Quartz-based nanoresonators and method of fabricating same Grant 7,459,099 - Kubena , et al. December 2, 2	2008-12-02
Integrated quartz oscillator on an active electronic susbtrate App 20080258829 - Kubena; Randall L. ; et al.	2008-10-23
Large area integration of quartz resonators with electronics App 20080034575 - Chang; David T. ; et al.	2008-02-14
Micro electrical mechanical system (MEMS) tuning using focused ion beams Grant 7,282,834 - Kubena , et al. October 16, 2	2007-10-16
Method for fabricating quartz-based nanoresonators App 20070216490 - Kubena; Randall L. ; et al.	2007-09-20
Method for fabricating quartz-based nanoresonators App 20070205839 - Kubena; Randall L. ; et al.	2007-09-06
Method for fabricating a resonator Grant 7,237,315 - Kubena , et al. July 3, 2	2007-07-03
Integrated all-Si capacitive microgyro with vertical differential sense and control and process for preparing an integrated all-Si capacitive microgyro with vertical differential sense Grant 7,232,700 - Kubena June 19, 2	2007-06-19
Method of manufacturing a cloverleaf microgyroscope and cloverleaf microgyroscope Grant 7,202,100 - Kubena , et al. April 10, 2	2007-04-10
Disc Resonator Gyroscopes App 20070017287 - Kubena; Randall L. ; et al.	2007-01-25
Cloverleaf microgyroscope with through-wafer interconnects and method of manufacturing a cloverleaf microgyroscope with through-wafer interconnects Grant 7,015,060 - Kubena , et al. March 21, 2	2006-03-21
Single crystal, dual wafer, tunneling sensor or switch with silicon on insulator substrate and a method of making same Grant 6,982,185 - Kubena , et al. January 3, 2	2006-01-03
Dual-wafer tunneling gyroscope and an assembly for making same Grant 6,975,009 - Kubena , et al. December 13, 2	2005-12-13
Micro electrical mechanical system (MEMS) tuning using focused ion beams App 20050269901 - Kubena, Randall L. ; et al.	2005-12-08
Single crystal, dual wafer, tunneling sensor or switch with substrate protrusion and a method of making same Grant 6,951,768 - Kubena , et al. October 4, 2	2005-10-04
Method of fabrication of a micro-channel based integrated sensor for chemical and biological materials Grant 6,933,164 - Kubena August 23, 2	2005-08-23
Micro electrical mechanical system (MEMS) tuning using focused ion beams Grant 6,922,118 - Kubena , et al. July 26, 2	2005-07-26
Quartz-based nanoresonators and method of fabricating same App 20050158905 - Kubena, Randall L. ; et al.	2005-07-21
Microelectromechanical tunneling gyroscope and an assembly for making a microelectromechanical tunneling gyroscope therefrom Grant 6,841,838 - Kubena , et al. January 11, 2	2005-01-11
Single crystal, tunneling and capacitive, three-axes sensor using eutectic bonding and a method of making same Grant 6,835,587 - Kubena , et al. December 28, 2	2004-12-28
A Dual-wafer Tunneling Gyroscope And An Assembly For Making Same App 20040217388 - Kubena, Randall L. ; et al.	2004-11-04
Quartz-based nanoresonators and method of fabricating same App 20040211052 - Kubena, Randall L. ; et al.	2004-10-28
Micro electrical mechanical system (MEMS) tuning using focused ion beams App 20040085159 - Kubena, Randall L. ; et al.	2004-05-06
Single crystal, dual wafer, tunneling sensor and a method of making same Grant 6,730,978 - Kubena , et al. May 4, 2	2004-05-04
Single crystal, tunneling and capacitive, three-axes sensor using eutectic bonding and a method of making same App 20040048403 - Kubena, Randall L. ; et al.	2004-03-11
Microgyro tuning using focused ion beams Grant 6,698,287 - Kubena , et al. March 2, 2	2004-03-02
Single crystal, tunneling and capacitive, three-axes sensor using eutectic bonding and a method of making same Grant 6,674,141 - Kubena , et al. January 6, 2	2004-01-06
Single crystal, dual wafer, tunneling sensor and a method of making same App 20030207487 - Kubena, Randall L. ; et al.	2003-11-06
Single crystal dual wafer, tunneling sensor and a method of making same Grant 6,630,367 - Kubena , et al. October 7, 2	2003-10-07
Single crystal, dual wafer, tunneling sensor or switch with substrate protrusion and a method of making same App 20030151104 - Kubena, Randall L. ; et al.	2003-08-14
Single crystal, dual wafer, tunneling sensor or switch with silicon on insulator substrate and a method of making same App 20030141562 - Kubena, Randall L. ; et al.	2003-07-31
Single crystal, dual wafer, tunneling sensor or switch with silicon on insulator substrate and a method of making same Grant 6,580,138 - Kubena , et al. June 17, 2	2003-06-17
Microgyro tuning using focused ion beams App 20030101792 - Kubena, Randall L. ; et al.	2003-06-05
Method of manufacturing a dual wafer tunneling gyroscope Grant 6,555,404 - Kubena , et al. April 29, 2	2003-04-29
Method of fabrication of a micro-channel based integrated sensor for chemical and biological materials App 20030045019 - Kubena, Randall L.	2003-03-06
Method of manufacturing a dual wafer tunneling gyroscope App 20030013246 - Kubena, Randall L. ; et al.	2003-01-16
Method of in-situ displacement/stress control in electroplating Grant 6,238,539 - Joyce , et al. May 29, 2	2001-05-29
Tunneling-based rate gyros with simple drive and sense axis coupling Grant 6,109,105 - Kubena , et al. August 29, 2	2000-08-29
Tunneling rotation sensor Grant 5,905,202 - Kubena , et al. May 18, 1	1999-05-18
Single-wafer tunneling sensor and low-cost IC manufacturing method Grant 5,596,194 - Kubena , et al. January 21, 1	1997-01-21
Selective area nucleation and growth method for metal chemical vapor deposition using focused ion beams Grant 4,908,226 - Kubena , et al. March 13, 1	1990-03-13

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