Patent | Date |
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Charged particle beam inspection of ungrounded samples Grant 11,448,607 - Kuan September 20, 2 | 2022-09-20 |
Micro LED display panel Grant 11,366,153 - Kuo , et al. June 21, 2 | 2022-06-21 |
Method And System For Inspecting An Euv Mask App 20210172891 - Weng; Guochong ;   et al. | 2021-06-10 |
Method and system for inspecting an EUV mask Grant 10,775,325 - Weng , et al. Sept | 2020-09-15 |
Dynamic Determination Of A Sample Inspection Recipe Of Charged Particle Beam Inspection App 20200286710 - CHEN; Zhong-wei ;   et al. | 2020-09-10 |
Micro LED Display Panel App 20200225277 - Kuo; Tzu-Yi ;   et al. | 2020-07-16 |
Charged Particle Beam Inspection Of Ungrounded Samples App 20200088657 - KUAN; Chiyan | 2020-03-19 |
Method And System For Inspecting An Euv Mask App 20190170671 - WENG; Guochong ;   et al. | 2019-06-06 |
Method and system for inspecting an EUV mask Grant 10,088,438 - Weng , et al. October 2, 2 | 2018-10-02 |
Structure electron beam inspection system for inspecting extreme ultraviolet mask and structure for discharging extreme ultraviolet mask Grant 10,054,556 - Wang , et al. August 21, 2 | 2018-08-21 |
Method and system for inspecting and grounding an EUV mask Grant 9,859,089 - Weng , et al. January 2, 2 | 2018-01-02 |
Method And System For Inspecting An Euv Mask App 20170052129 - Weng; Guochong ;   et al. | 2017-02-23 |
Structure Electron Beam Inspection System For Inspecting Extreme Ultraviolet Mask And Structure For Discharging Extreme Ultraviolet Mask App 20170053774 - WANG; You-Jin ;   et al. | 2017-02-23 |
Structure electron beam inspection system for inspecting extreme ultraviolet mask and structure for discharging extreme ultraviolet mask Grant 9,572,237 - Wang , et al. February 14, 2 | 2017-02-14 |
Method and system for enhancing image quality Grant 9,436,985 - Kuan , et al. September 6, 2 | 2016-09-06 |
Method and System for Inspecting an EUV Mask App 20150325402 - Weng; Guochong ;   et al. | 2015-11-12 |
Charged particle beam apparatus Grant 9,177,758 - Chen , et al. November 3, 2 | 2015-11-03 |
Structure Electron Beam Inspection System For Inspecting Extreme Ultraviolet Mask And Structure For Discharging Extreme Ultraviolet Mask App 20150305131 - WANG; You-Jin ;   et al. | 2015-10-22 |
Reticle operation system Grant 9,164,399 - Wang , et al. October 20, 2 | 2015-10-20 |
Structure electron beam inspection system for inspecting extreme ultraviolet mask and structure for discharging extreme ultraviolet mask Grant 9,113,538 - Wang , et al. August 18, 2 | 2015-08-18 |
Charged Particle Beam Apparatus App 20150144788 - Chen; Zhongwei ;   et al. | 2015-05-28 |
Method And System For Inspecting An Euv Mask App 20150102220 - Weng; Guoching ;   et al. | 2015-04-16 |
Method and system for enhancing image quality Grant 9,002,097 - Kuan , et al. April 7, 2 | 2015-04-07 |
Method for inspecting EUV reticle and apparatus thereof Grant 8,692,193 - Kuan , et al. April 8, 2 | 2014-04-08 |
Structure For Discharging Extreme Ultraviolet Mask App 20140027634 - WANG; You-Jin ;   et al. | 2014-01-30 |
Structure for discharging extreme ultraviolet mask Grant 8,575,573 - Wang , et al. November 5, 2 | 2013-11-05 |
Charged particle system for reticle/wafer defects inspection and review Grant 8,519,333 - Kuan , et al. August 27, 2 | 2013-08-27 |
Reticle Operation System App 20130176549 - Wang; Youjin ;   et al. | 2013-07-11 |
Structure For Discharging Extreme Ultraviolet Mask App 20120292509 - WANG; You-Jin ;   et al. | 2012-11-22 |
Charged Particle System For Reticle / Wafer Defects Inspection And Review App 20120280125 - KUAN; CHIYAN ;   et al. | 2012-11-08 |
Substrate and die defect inspection method Grant 8,295,580 - Kuan October 23, 2 | 2012-10-23 |
Method For Inspecting Euv Reticle And Apparatus Thereof App 20120228494 - KUAN; CHIYAN ;   et al. | 2012-09-13 |
Method for inspecting EUV reticle and apparatus thereof Grant 8,217,349 - Kuan , et al. July 10, 2 | 2012-07-10 |
Method For Inspecting Euv Reticle And Apparatus Thereof App 20120032076 - KUAN; CHIYAN ;   et al. | 2012-02-09 |
Substrate Inspection Method App 20110052040 - KUAN; CHIYAN | 2011-03-03 |
Site stepping for electron beam micro analysis Grant 7,115,866 - Kroeze , et al. October 3, 2 | 2006-10-03 |