| Patent | Date |
|---|
Apparatus and method of removing photoresist layer
Grant 11,090,696 - Chang , et al. August 17, 2 | 2021-08-17 |
Method And System For Processing Substrate In Semiconductor Fabrication
App 20200316654 - JHUAN; Chun-Syuan ; et al. | 2020-10-08 |
Methods for processing substrate in semiconductor fabrication
Grant 10,780,461 - Jhuan , et al. Sept | 2020-09-22 |
Apparatus And Method Of Removing Photoresist Layer
App 20200094298 - CHANG; Jui-Chuan ; et al. | 2020-03-26 |
Single wafer cleaning tool with H.sub.2SO.sub.4 recycling
Grant 10,510,527 - Hsiao , et al. Dec | 2019-12-17 |
Integrated platform for improved wafer manufacturing quality
Grant 10,497,557 - Ku , et al. De | 2019-12-03 |
Semiconductor apparatus and method of removing photoresist layer on substrate
Grant 10,486,204 - Chang , et al. Nov | 2019-11-26 |
Method for forming semiconductor device structure
Grant 10,276,469 - Yu , et al. | 2019-04-30 |
Chemical dispense system with reduced contamination
Grant 10,161,545 - Pan , et al. Dec | 2018-12-25 |
Methods for transporting wafers between wafer holders and chambers
Grant 9,997,384 - Ku , et al. June 12, 2 | 2018-06-12 |
Photoresist Removal
App 20180047580 - YU; Shang-Yuan ; et al. | 2018-02-15 |
System and method for an etch process with silicon concentration control
Grant 9,887,095 - Chang , et al. February 6, 2 | 2018-02-06 |
Cleaning composition and method for semiconductor device fabrication
Grant 9,881,816 - Li , et al. January 30, 2 | 2018-01-30 |
Photoresist removal
Grant 9,805,946 - Yu , et al. October 31, 2 | 2017-10-31 |
Wafer cleaning
Grant 9,781,994 - Yu , et al. October 10, 2 | 2017-10-10 |
Apparatus and methods for movable megasonic wafer probe
Grant 9,764,364 - Chang Chien , et al. September 19, 2 | 2017-09-19 |
Aqueous cleaning techniques and compositions for use in semiconductor device manufacture
Grant 9,728,533 - Chou , et al. August 8, 2 | 2017-08-08 |
Method for controlling surface charge on wafer surface in semiconductor fabrication
Grant 9,704,714 - Yu , et al. July 11, 2 | 2017-07-11 |
Wafer transport method
Grant 9,601,360 - Chen , et al. March 21, 2 | 2017-03-21 |
Method of etching and cleaning wafers
Grant 9,583,352 - Tsai , et al. February 28, 2 | 2017-02-28 |
Chemical Dispense System with Reduced Contamination
App 20170023158 - Pan; Rong-Shyan ; et al. | 2017-01-26 |
Method And System For Processing Substrate In Semiconductor Fabrication
App 20160336200 - JHUAN; Chun-Syuan ; et al. | 2016-11-17 |
Chemical dispense system with reduced contamination
Grant 9,494,261 - Pan , et al. November 15, 2 | 2016-11-15 |
Mechanisms for cleaning wafer and scrubber
Grant 9,478,444 - Lyu , et al. October 25, 2 | 2016-10-25 |
Method For Forming Semiconductor Device Structure
App 20160307816 - YU; Weibo ; et al. | 2016-10-20 |
Method For Controlling Surface Charge On Wafer Surface In Semiconductor Fabrication
App 20160307757 - YU; Weibo ; et al. | 2016-10-20 |
Wafer Transport Method
App 20160276186 - CHEN; Jyun-Chao ; et al. | 2016-09-22 |
Mechanisms for wafer cleaning
Grant 9,349,617 - Yu , et al. May 24, 2 | 2016-05-24 |
Semiconductor Apparatus And Method Of Removing Photoresist Layer On Substrate
App 20160129484 - CHANG; Jui-Chuan ; et al. | 2016-05-12 |
Semiconductor device and method of manufacture
Grant 9,263,337 - Chou , et al. February 16, 2 | 2016-02-16 |
Method Of Etching And Cleaning Wafers
App 20150357198 - TSAI; Wen-Chang ; et al. | 2015-12-10 |
Loading port, system for etching and cleaning wafers and method of use
Grant 9,136,149 - Tsai , et al. September 15, 2 | 2015-09-15 |
Integrated Platform For Improved Wafer Manufacturing Quality
App 20150255270 - Ku; Shao-Yen ; et al. | 2015-09-10 |
Method and system for energized and pressurized liquids for cleaning/etching applications in semiconductor manufacturing
Grant 9,117,760 - Hsu , et al. August 25, 2 | 2015-08-25 |
Integrated platform for improved wafer manufacturing quality
Grant 9,064,807 - Ku , et al. June 23, 2 | 2015-06-23 |
Apparatus to improve internal wafer temperature profile
Grant 9,048,089 - Hsu , et al. June 2, 2 | 2015-06-02 |
Mechanisms For Wafer Cleaning
App 20150144159 - YU; Shang-Yuan ; et al. | 2015-05-28 |
Apparatus and Methods for Movable Megasonic Wafer Probe
App 20150107634 - Chang Chien; Ying-Hsueh ; et al. | 2015-04-23 |
Aqueous Cleaning Techniques And Compositions For Use In Semiconductor Device Manufacture
App 20150108578 - Chou; Chun-Li ; et al. | 2015-04-23 |
Photoresist Removal
App 20150064928 - Yu; Shang-Yuan ; et al. | 2015-03-05 |
Mechanisms For Cleaning Wafer And Scrubber
App 20150027489 - LYU; Tai-Liang ; et al. | 2015-01-29 |
Apparatus and methods for movable megasonic wafer probe
Grant 8,926,762 - Chien , et al. January 6, 2 | 2015-01-06 |
Aqueous cleaning techniques and compositions for use in semiconductor device manufacturing
Grant 8,916,429 - Chou , et al. December 23, 2 | 2014-12-23 |
System and Method for an Etch Process with Silicon Concentration Control
App 20140273303 - Chang; Fu-Yi ; et al. | 2014-09-18 |
Integrated Platform for Improved Wafer Manufacturing Quality
App 20140242804 - Ku; Shao-Yen ; et al. | 2014-08-28 |
Apparatus to Improve Internal Wafer Temperature Profile
App 20140224785 - Hsu; Yu-Yen ; et al. | 2014-08-14 |
Chemical Dispense System with Reduced Contamination
App 20140224334 - Pan; Rong-Shyan ; et al. | 2014-08-14 |
Cleaning Composition And Method For Semiconductor Device Fabrication
App 20140216499 - Li; Chia-Wen ; et al. | 2014-08-07 |
Single Wafer Cleaning Tool with H2SO4 Recycling
App 20140216500 - Hsiao; Chien-Wen ; et al. | 2014-08-07 |
Method And System For Energized And Pressurized Liquids For Cleaning/etching Applications In Semiconductor Manufacturing
App 20140213063 - HSU; Yu-Yen ; et al. | 2014-07-31 |
Wafer Cleaning
App 20140158155 - Yu; Shang-Yuan ; et al. | 2014-06-12 |
Loading Port, System For Etching And Cleaning Wafers And Method Of Use
App 20140141541 - TSAI; Wen-Chang ; et al. | 2014-05-22 |
Integrated apparatus to assure wafer quality and manufacturability
Grant 8,616,821 - Ku , et al. December 31, 2 | 2013-12-31 |
Integrated apparatus to assure wafer quality and manufacturability
Grant 08616821 - | 2013-12-31 |
Aqueous Cleaning Techniques and Compositions for use in Semiconductor Device Manufacturing
App 20130288436 - Chou; Chun-Li ; et al. | 2013-10-31 |
Cleaning process for semiconductor device fabrication
Grant 8,518,634 - Yeh , et al. August 27, 2 | 2013-08-27 |
Methods for Transporting Wafers Between Wafer Holders and Chambers
App 20130142594 - Ku; Shao-Yen ; et al. | 2013-06-06 |
Semiconductor Device and Method of Manufacture
App 20130109140 - Chou; Chun-Li ; et al. | 2013-05-02 |
Apparatus and Methods for Movable Megasonic Wafer Probe
App 20130056031 - Chien; Ying-Hsueh Chang ; et al. | 2013-03-07 |
Cleaning Process For Semiconductor Device Fabrication
App 20120202156 - Yeh; Ming-Hsi ; et al. | 2012-08-09 |
Integrated Apparatus To Assure Wafer Quality And Manufacturability
App 20120051872 - Ku; Shao-Yen ; et al. | 2012-03-01 |
Nitride film wet stripping
Grant 8,105,851 - Ku , et al. January 31, 2 | 2012-01-31 |
Method of fabricating high-k metal gate devices
Grant 7,776,757 - Lin , et al. August 17, 2 | 2010-08-17 |
Method Of Fabricating High-k Metal Gate Devices
App 20100178772 - Lin; Simon Su-Horng ; et al. | 2010-07-15 |
Method And Apparatus For Cleaning Semiconductor Device Fabrication Equipment Using Supercritical Fluids
App 20100126531 - KU; Shao-Yen ; et al. | 2010-05-27 |
Method of manufacturing double diffused drains in semiconductor devices
Grant 7,585,737 - Chen , et al. September 8, 2 | 2009-09-08 |
Method of manufacturing double diffused drains in semiconductor devices
App 20080132024 - Chen; Hung-Lin ; et al. | 2008-06-05 |
Successful and easy method to remove polysilicon film
Grant 6,703,320 - Ku March 9, 2 | 2004-03-09 |
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