Patent | Date |
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Enhanced Doping Using Alloy Based Sources App 20220205133 - Kryliouk; Olga ;   et al. | 2022-06-30 |
Method of decontamination of process chamber after in-situ chamber clean Grant 9,932,670 - Su , et al. April 3, 2 | 2018-04-03 |
Coalesced Nanowire Structures With Interstitial Voids And Method For Manufacturing The Same App 20170170261 - Svensson; Patrik ;   et al. | 2017-06-15 |
Coalesced nanowire structures with interstitial voids and method for manufacturing the same Grant 9,570,651 - Svensson , et al. February 14, 2 | 2017-02-14 |
Nanopyramid sized opto-electronic structure and method for manufacturing of same Grant 9,444,007 - Kryliouk , et al. September 13, 2 | 2016-09-13 |
Method of forming a group III-nitride crystalline film on a patterned substrate by hydride vapor phase epitaxy (HVPE) Grant 9,431,477 - Kryliouk , et al. August 30, 2 | 2016-08-30 |
Formation of group III-V material layers on patterned substrates Grant 9,196,795 - Su , et al. November 24, 2 | 2015-11-24 |
Coalesced Nanowire Structures With Interstitial Voids And Method For Manufacturing The Same App 20150221821 - Svensson; Patrik ;   et al. | 2015-08-06 |
Nanopyramid Sized Opto-Electronic Structure and Method for Manufacturing of Same App 20150207033 - KRYLIOUK; Olga ;   et al. | 2015-07-23 |
Coalesced nanowire structures with interstitial voids and method for manufacturing the same Grant 9,035,278 - Svensson , et al. May 19, 2 | 2015-05-19 |
Group III-nitrides on Si substrates using a nanostructured interlayer Grant 8,946,674 - Kryliouk , et al. February 3, 2 | 2015-02-03 |
Nanopyramid sized opto-electronic structure and method for manufacturing of same Grant 8,921,141 - Kryliouk , et al. December 30, 2 | 2014-12-30 |
Formation Of Group Iii-v Material Layers On Patterned Substrates App 20140367696 - Su; Jie ;   et al. | 2014-12-18 |
Formation of group III-V material layers on patterned substrates Grant 8,765,501 - Su , et al. July 1, 2 | 2014-07-01 |
Growth of group III-V material layers by spatially confined epitaxy Grant 8,716,049 - Su , et al. May 6, 2 | 2014-05-06 |
Method Of Decontamination Of Process Chamber After In-situ Chamber Clean App 20140116470 - SU; Jie ;   et al. | 2014-05-01 |
Nanopyramid Sized Opto-Electronic Structure and Method for Manufacturing of Same App 20140077220 - KRYLIOUK; Olga ;   et al. | 2014-03-20 |
HVPE chamber hardware Grant 8,568,529 - Ishikawa , et al. October 29, 2 | 2013-10-29 |
Method of forming a group III-nitride crystalline film on a patterned substrate by hydride vapor phase epitaxy (HVPE) Grant 8,507,304 - Kryliouk , et al. August 13, 2 | 2013-08-13 |
HVPE precursor source hardware Grant 8,491,720 - Ishikawa , et al. July 23, 2 | 2013-07-23 |
Coalesced Nanowire Structures With Interstitial Voids And Method For Manufacturing The Same App 20130075693 - SVENSSON; Patrik ;   et al. | 2013-03-28 |
Mocvd Fabrication Of Group Iii-nitride Materials Using In-situ Generated Hydrazine Or Fragments There From App 20120258581 - Brown; Karl ;   et al. | 2012-10-11 |
Plasma-assisted Mocvd Fabrication Of P-type Group Iii-nitride Materials App 20120258580 - Brown; Karl ;   et al. | 2012-10-11 |
Light Emitting Diode With Enhanced Quantum Efficiency And Method Of Fabrication App 20120235116 - Su; Jie ;   et al. | 2012-09-20 |
Group III-nitrides on SI substrates using a nanostructured interlayer Grant 8,268,646 - Kryliouk , et al. September 18, 2 | 2012-09-18 |
Dome assembly for a deposition chamber Grant D664,172 - Ishikawa , et al. July 24, 2 | 2012-07-24 |
Crack free multilayered devices, methods of manufacture thereof and articles comprising the same Grant 8,222,057 - Kryliouk , et al. July 17, 2 | 2012-07-17 |
Substrate Pretreatment For Subsequent High Temperature Group Iii Depositions App 20120156863 - MELNIK; Yuriy ;   et al. | 2012-06-21 |
Methods for fabricating group III nitride structures with a cluster tool Grant 8,183,132 - Nijhawan , et al. May 22, 2 | 2012-05-22 |
Mocvd Single Chamber Split Process For Led Manufacturing App 20120111272 - KRYLIOUK; OLGA | 2012-05-10 |
Indium surfactant assisted HVPE of high quality gallium nitride and gallium nitride alloy films Grant 8,148,241 - Su , et al. April 3, 2 | 2012-04-03 |
Substrate pretreatment for subsequent high temperature group III depositions Grant 8,138,069 - Melnik , et al. March 20, 2 | 2012-03-20 |
MOCVD single chamber split process for LED manufacturing Grant 8,110,889 - Kryliouk February 7, 2 | 2012-02-07 |
Method for growth of nitrogen face (N-face) polarity compound nitride semiconductor device with integrated processing system Grant 8,080,466 - Su , et al. December 20, 2 | 2011-12-20 |
Group Iii-nitride N-type Doping App 20110263111 - Melnik; Yuriy ;   et al. | 2011-10-27 |
Formation Of Group Iii-v Material Layers On Patterned Substrates App 20110210425 - Su; Jie ;   et al. | 2011-09-01 |
Growth Of Group Iii-v Material Layers By Spatially Confined Epitaxy App 20110204378 - Su; Jie ;   et al. | 2011-08-25 |
Reclamation Of Scrap Materials For Led Manufacturing App 20110171758 - SU; JIE ;   et al. | 2011-07-14 |
Nano-spherical Group Iii-nitride Materials App 20110140071 - Kryliouk; Olga ;   et al. | 2011-06-16 |
Method Of Decontamination Of Process Chamber After In-situ Chamber Clean App 20110117728 - Su; Jie ;   et al. | 2011-05-19 |
Method For In-situ Cleaning Of Deposition Systems App 20110079251 - Kryliouk; Olga ;   et al. | 2011-04-07 |
Nanocrystalline Diamond-structured Carbon Coating Of Silicon Carbide App 20110076400 - Kryliouk; Olga ;   et al. | 2011-03-31 |
Crack Free Multilayered Devices, Methods Of Manufacture Thereof And Articles Comprising The Same App 20110042683 - Kryliouk; Olga ;   et al. | 2011-02-24 |
Growth Of N-face Led With Integrated Processing System App 20110033966 - SU; JIE ;   et al. | 2011-02-10 |
Method And Apparatus For Dry Cleaning A Cooled Showerhead App 20110030615 - GRIFFIN; KEVIN ;   et al. | 2011-02-10 |
Method Of Forming Led Structures App 20110027973 - Su; Jie ;   et al. | 2011-02-03 |
Indium Surfactant Assisted Hvpe Of High Quality Gallium Nitride And Gallium Nitride Alloy Films App 20110027974 - Su; Jie ;   et al. | 2011-02-03 |
Method Of Forming A Group Iii-nitride Crystalline Film On A Patterned Substrate By Hydride Vapor Phase Epitaxy (hvpe) App 20110012109 - Kryliouk; Olga ;   et al. | 2011-01-20 |
METHOD OF FORMING IN-SITU PRE-GaN DEPOSITION LAYER IN HVPE App 20100279020 - Melnik; Yuriy ;   et al. | 2010-11-04 |
Substrate Pretreatment For Subsequent High Temperature Group Iii Depositions App 20100273318 - Melnik; Yuriy ;   et al. | 2010-10-28 |
Mocvd Single Chamber Split Process For Led Manufacturing App 20100273290 - Kryliouk; Olga | 2010-10-28 |
Decontamination Of Mocvd Chamber Using Nh3 Purge After In-situ Cleaning App 20100273291 - Kryliouk; Olga ;   et al. | 2010-10-28 |
Hvpe Precursor Source Hardware App 20100258052 - ISHIKAWA; TETSUYA ;   et al. | 2010-10-14 |
Cluster Tool For Leds App 20100261340 - NIJHAWAN; SANDEEP ;   et al. | 2010-10-14 |
Hvpe Chamber Hardware App 20100258049 - Ishikawa; Tetsuya ;   et al. | 2010-10-14 |
Hvpe Showerhead Design App 20100215854 - Burrows; Brian H. ;   et al. | 2010-08-26 |
Group Iii-nitrides On Si Substrates Using A Nanostructured Interlayer App 20100029064 - Kryliouk; Olga ;   et al. | 2010-02-04 |
Method For Depositing Group Iii/v Compounds App 20090149008 - Kryliouk; Olga ;   et al. | 2009-06-11 |
Showerhead Design With Precursor Source App 20090136652 - Washington; Lori D. ;   et al. | 2009-05-28 |
Hvpe Showerhead Design App 20080314311 - Burrows; Brian H. ;   et al. | 2008-12-25 |
Showerhead Design With Precursor Pre-mixing App 20080314317 - BURROWS; BRIAN H. ;   et al. | 2008-12-25 |
Group III-nitrides on Si substrates using a nanostructured interlayer App 20070108466 - Kryliouk; Olga ;   et al. | 2007-05-17 |
GaN growth on Si using ZnO buffer layer Grant 7,001,791 - Kryliouk , et al. February 21, 2 | 2006-02-21 |
Group III-nitride on Si using epitaxial BP buffer layer Grant 6,967,355 - Kryliouk , et al. November 22, 2 | 2005-11-22 |
Group III-nitride growth on Si substrate using oxynitride interlayer Grant 6,906,351 - Kryliouk , et al. June 14, 2 | 2005-06-14 |
Group III-nitride on Si using epitaxial BP buffer layer App 20050087746 - Kryliouk, Olga ;   et al. | 2005-04-28 |
Group III-nitride growth on Si substrate using oxynitride interlayer App 20050032345 - Kryliouk, Olga ;   et al. | 2005-02-10 |
GaN growth on Si using ZnO buffer layer App 20040201030 - Kryliouk, Olga ;   et al. | 2004-10-14 |
Method and apparatus for producing group-III nitrides Grant 6,350,666 - Kryliouk February 26, 2 | 2002-02-26 |
Method and apparatus for producing group-III nitrides App 20010006845 - Kryliouk, Olga | 2001-07-05 |
Method and apparatus for producing group-III nitrides Grant 6,218,280 - Kryliouk , et al. April 17, 2 | 2001-04-17 |