Krupyshev; Alexander
Patent Applications and Registrations
Patent applications and USPTO patent grants for Krupyshev; Alexander.The latest application filed is for "automatic wafer centering method and apparatus".
- Krupyshev; Alexander - Chelmsford MA
| Patent | Date |
|---|---|
| Automatic Wafer Centering Method And Apparatus App 20210375657 - Krupyshev; Alexander ; et al. | 2021-12-02 |
| Automatic wafer centering method and apparatus Grant 11,088,004 - Krupyshev , et al. August 10, 2 | 2021-08-10 |
| Substrate Processing Apparatus App 20210183675 - Krupyshev; Alexander ; et al. | 2021-06-17 |
| Load Lock Fast Pump Vent App 20210175096 - HOFMEISTER; Christopher ; et al. | 2021-06-10 |
| Substrate Process Apparatus App 20200395232 - Krupyshev; Alexander ; et al. | 2020-12-17 |
| Load lock fast pump vent Grant 10,854,478 - Hofmeister , et al. December 1, 2 | 2020-12-01 |
| Substrate Transport Apparatus App 20200161152 - Caveney; Robert T. ; et al. | 2020-05-21 |
| Load Lock Fast Pump Vent App 20200126820 - HOFMEISTER; Christopher ; et al. | 2020-04-23 |
| Load lock fast pump vent Grant 10,541,157 - Hofmeister , et al. Ja | 2020-01-21 |
| Automatic Wafer Centering Method And Apparatus App 20190237351 - KRUPYSHEV; Alexander ; et al. | 2019-08-01 |
| Substrate transport apparatus Grant 10,134,621 - Caveney , et al. November 20, 2 | 2018-11-20 |
| Method And Apparatus For Substrate Transport App 20180308728 - KRUPYSHEV; Alexander ; et al. | 2018-10-25 |
| Load Lock Fast Pump Vent App 20180226280 - HOFMEISTER; Christopher ; et al. | 2018-08-09 |
| Load Lock Fast Pump Vent App 20180114708 - HOFMEISTER; Christopher ; et al. | 2018-04-26 |
| Substrate Processing Apparatus App 20160329234 - Krupyshev; Alexander ; et al. | 2016-11-10 |
| Load lock chamber Grant 9,478,446 - Hofmeister , et al. October 25, 2 | 2016-10-25 |
| Compact substrate transport system Grant 9,401,294 - Hofmeister , et al. July 26, 2 | 2016-07-26 |
| Substrate Transport Apparatus App 20150206782 - Caveney; Robert T. ; et al. | 2015-07-23 |
| Substrate processing apparatus Grant 8,960,099 - Hosek , et al. February 24, 2 | 2015-02-24 |
| Substrate Processing Apparatus App 20150013910 - Krupyshev; Alexander ; et al. | 2015-01-15 |
| Multiple dimension position sensor Grant 8,803,513 - Hosek , et al. August 12, 2 | 2014-08-12 |
| Load Lock Chamber App 20140178157 - Hofmeister; Christopher ; et al. | 2014-06-26 |
| Load lock fast pump vent Grant 8,662,812 - Hofmeister , et al. March 4, 2 | 2014-03-04 |
| Compact Substrate Transport System App 20140044504 - Hofmeister; Christopher ; et al. | 2014-02-13 |
| Compact substrate transport system Grant 8,562,271 - Hofmeister , et al. October 22, 2 | 2013-10-22 |
| Load Lock Fast Pump Vent App 20130078057 - Hofmeister; Christopher ; et al. | 2013-03-28 |
| Load lock fast pump vent Grant 8,272,825 - Hofmeister , et al. September 25, 2 | 2012-09-25 |
| Multiple Dimension Position Sensor App 20120223597 - Hosek; Martin ; et al. | 2012-09-06 |
| Multiple dimension position sensor Grant 8,129,984 - Hosek , et al. March 6, 2 | 2012-03-06 |
| Multiple Dimension Position Sensor App 20090224750 - Hosek; Martin ; et al. | 2009-09-10 |
| Substrate Processing Apparatus App 20090162179 - Hosek; Martin ; et al. | 2009-06-25 |
| Load Lock Fast Pump Vent App 20090016855 - Hofmeister; Christopher ; et al. | 2009-01-15 |
| Compact Substrate Transport System App 20090003976 - Hofmeister; Christopher ; et al. | 2009-01-01 |
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