loadpatents
Patent applications and USPTO patent grants for Kruizinga; Borgert.The latest application filed is for "measurement system, lithographic apparatus and device manufacturing method".
Patent | Date |
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Measurement system, lithographic apparatus and device manufacturing method Grant 11,009,800 - Nienhuys , et al. May 18, 2 | 2021-05-18 |
Measurement System, Lithographic Apparatus And Device Manufacturing Method App 20200379360 - Nienhuys; Han-Kwang ;   et al. | 2020-12-03 |
Beam delivery apparatus and method Grant 10,580,545 - Banine , et al. | 2020-03-03 |
High resolution broadband monolithic spectrometer and method Grant 10,508,951 - Kruizinga , et al. Dec | 2019-12-17 |
High Resolution Broadband Monolithic Spectrometer And Method App 20190017869 - KRUIZINGA; Borgert ;   et al. | 2019-01-17 |
Lithographic Method App 20180081278 - NIKIPELOV; Andrey Alexandrovich ;   et al. | 2018-03-22 |
Radiation System App 20180031982 - NIENHUYS; Han-Kwang ;   et al. | 2018-02-01 |
Lithographic method Grant 9,823,572 - Nikipelov , et al. November 21, 2 | 2017-11-21 |
Beam Delivery Apparatus And Method App 20160225477 - BANINE; Vadim Yevgenyevich ;   et al. | 2016-08-04 |
Depolarizer, telescope and remote sensing device and method Grant 9,383,490 - Kruizinga , et al. July 5, 2 | 2016-07-05 |
Lithographic Method App 20160147161 - NIKIPELOV; Andrey Alexandrovich ;   et al. | 2016-05-26 |
Anamorphotic telescope Grant 9,304,300 - Visser , et al. April 5, 2 | 2016-04-05 |
Depolarizer, Telescope And Remote Sensing Device And Method App 20140320852 - Kruizinga; Borgert ;   et al. | 2014-10-30 |
Illumination system for use in a stereolithography apparatus Grant 8,873,024 - Jamar , et al. October 28, 2 | 2014-10-28 |
Illumination system for use in a stereolithography apparatus Grant 8,836,916 - Jamar , et al. September 16, 2 | 2014-09-16 |
SLM calibration Grant 8,717,535 - Visser , et al. May 6, 2 | 2014-05-06 |
Lithographic apparatus and sensor therefor Grant 8,629,418 - Van De Kerkhof , et al. January 14, 2 | 2014-01-14 |
Grating for EUV-radiation, method for manufacturing the grating and wavefront measurement system Grant 8,559,108 - Kruizinga , et al. October 15, 2 | 2013-10-15 |
Liquid filled lens element, lithographic apparatus comprising such an element and device manufacturing method Grant 8,237,912 - Boom , et al. August 7, 2 | 2012-08-07 |
Illumination System for Use in a Stereolithography Apparatus App 20120063131 - Jamar; Jacobus Hubertus Theodoor ;   et al. | 2012-03-15 |
Illumination System for Use in a Stereolithography Apparatus App 20120057143 - Jamar; Jacobus Hubertus Theodoor ;   et al. | 2012-03-08 |
Liquid Filled Lens Element, Lithographic Apparatus Comprising Such An Element And Device Manufacturing Method App 20110194096 - BOOM; Herman ;   et al. | 2011-08-11 |
Liquid filled lens element, lithographic apparatus comprising such an element and device manufacturing method Grant 7,969,549 - Boom , et al. June 28, 2 | 2011-06-28 |
Grating For Euv-radiation, Method For Manufacturing The Grating And Wavefront Measurement System App 20100284064 - Kruizinga; Borgert ;   et al. | 2010-11-11 |
SLM Calibration App 20090244506 - Visser; Huibert ;   et al. | 2009-10-01 |
Sensor for use in a lithographic apparatus Grant 7,453,078 - Kok , et al. November 18, 2 | 2008-11-18 |
Sensor for use in a lithographic apparatus App 20080007844 - Kok; Haico Victor ;   et al. | 2008-01-10 |
Liquid filled lens element, lithographic apparatus comprising such an element and device manufacturing method App 20080002168 - Boom; Herman ;   et al. | 2008-01-03 |
Sensor for use in a lithographic apparatus Grant 7,282,701 - Kok , et al. October 16, 2 | 2007-10-16 |
Sensor for use in a lithographic apparatus App 20070108377 - Kok; Haico Victor ;   et al. | 2007-05-17 |
Sensor for use in a lithographic apparatus App 20060192093 - Kok; Haico Victor ;   et al. | 2006-08-31 |
Imaging apparatus Grant 7,023,525 - Bleeker , et al. April 4, 2 | 2006-04-04 |
Imaging apparatus App 20040239909 - Bleeker, Arno Jan ;   et al. | 2004-12-02 |
Imaging apparatus Grant 6,778,257 - Bleeker , et al. August 17, 2 | 2004-08-17 |
Imaging apparatus App 20030030781 - Bleeker, Arno Jan ;   et al. | 2003-02-13 |
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