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Lithographic apparatus and stage system Grant 9,097,990 - Van Der Toorn , et al. August 4, 2 | 2015-08-04 |
Lithographic apparatus and a method of operating the lithographic apparatus Grant 8,441,609 - Kadijk , et al. May 14, 2 | 2013-05-14 |
Lithographic Apparatus And Stage System App 20120242271 - VAN DER TOORN; Jan-Gerard Cornelis ;   et al. | 2012-09-27 |
Lithographic processing cell, lithographic apparatus, track and device manufacturing method Grant 7,679,715 - Kruijswijk , et al. March 16, 2 | 2010-03-16 |
Lithographic processing cell and device manufacturing method Grant 7,646,468 - Kruijswijk January 12, 2 | 2010-01-12 |
Lithographic Apparatus And A Method Of Operating The Lithographic Apparatus App 20090323045 - KADIJK; Edwin Cornelis ;   et al. | 2009-12-31 |
Lithographic processing cell and device manufacturing method Grant 7,616,291 - Kruijswijk , et al. November 10, 2 | 2009-11-10 |
Lithographic processing cell, lithographic apparatus, track and device manufacturing method App 20080266538 - Kruijswijk; Stefan Geerte ;   et al. | 2008-10-30 |
Lithographic processing cell, lithographic apparatus, track and device manufacturing method Grant 7,403,259 - Kruijswijk , et al. July 22, 2 | 2008-07-22 |
Lithographic apparatus, illumination system, illumination controller and control method Grant 7,297,911 - Kruijswijk , et al. November 20, 2 | 2007-11-20 |
Lithographic processing cell and device manufacturing method App 20070229792 - Kruijswijk; Stefan Geerte ;   et al. | 2007-10-04 |
Lithographic apparatus, patterning device and device manufacturing method App 20070146670 - Kruijswijk; Stefan Geerte | 2007-06-28 |
Lithographic apparatus, device manufacturing method and device manufactured therewith Grant 7,230,675 - Kruijswijk , et al. June 12, 2 | 2007-06-12 |
Lithographic apparatus and device manufacturing method Grant 7,224,440 - Kruijswijk , et al. May 29, 2 | 2007-05-29 |
Lithographic apparatus, illumination system, illumination controller and control method App 20070018071 - Kruijswijk; Stefan Geerte ;   et al. | 2007-01-25 |
Lithographic apparatus and device manufacturing method App 20060139599 - Kruijswijk; Stefan Geerte ;   et al. | 2006-06-29 |
Lithographic apparatus, device manufacturing method and device manufactured therewith App 20060119812 - Kruijswijk; Stefan Geerte ;   et al. | 2006-06-08 |
Lithographic apparatus with alignment subsystem, device manufacturing method, and device manufactured thereby Grant 7,002,667 - Levasier , et al. February 21, 2 | 2006-02-21 |
Lithographic apparatus with alignment subsystem, device manufacturing method, using alignment, and alignment structure Grant 6,995,831 - Levasier , et al. February 7, 2 | 2006-02-07 |
Lithographic processing cell, lithographic apparatus, track and device manufacturing method App 20050206868 - Kruijswijk, Stefan Geerte ;   et al. | 2005-09-22 |
Lithographic apparatus with alignment subsystem, device manufacturing method, and device manufactured thereby App 20050146699 - Levasier, Leon Martin ;   et al. | 2005-07-07 |
Lithographic apparatus with alignment subsystem, device manufacturing method, and device manufactured thereby App 20040179184 - Levasier, Leon Martin ;   et al. | 2004-09-16 |