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Patent applications and USPTO patent grants for Krokhmal; Alexander.The latest application filed is for "small-angle x-ray scatterometry".
Patent | Date |
---|---|
X-ray tube Grant 11,302,508 - Krokhmal , et al. April 12, 2 | 2022-04-12 |
Small-Angle X-Ray Scatterometry App 20220042933 - Dikopoltsev; Alex ;   et al. | 2022-02-10 |
Small-angle x-ray scatterometry Grant 11,181,490 - Dikopoltsev , et al. November 23, 2 | 2021-11-23 |
Small-angle x-ray scatterometry App 20210285898 - Dikopoltsev; Alex ;   et al. | 2021-09-16 |
X-ray detection optics for small-angle X-ray scatterometry Grant 10,976,270 - Wormington , et al. April 13, 2 | 2021-04-13 |
Wafer alignment for small-angle x-ray scatterometry Grant 10,976,269 - Vinshtein , et al. April 13, 2 | 2021-04-13 |
X-ray source optics for small-angle X-ray scatterometry Grant 10,976,268 - Wormington , et al. April 13, 2 | 2021-04-13 |
X-ray Tube App 20200168427 - Krokhmal; Alexander ;   et al. | 2020-05-28 |
X-ray detection optics for small-angle X-ray scatterometry App 20190323974 - Wormington; Matthew ;   et al. | 2019-10-24 |
Wafer alignment for small-angle X-ray scatterometry App 20190323976 - Vinshtein; Yuri ;   et al. | 2019-10-24 |
X-ray source optics for small-angle X-ray scatterometry App 20190323975 - Wormington; Matthew ;   et al. | 2019-10-24 |
Fast measurement of X-ray diffraction from tilted layers Grant 8,437,450 - Wall , et al. May 7, 2 | 2013-05-07 |
Fast Measurement Of X-ray Diffraction From Tilted Layers App 20120140889 - Wall; John ;   et al. | 2012-06-07 |
X-ray measurement of properties of nano-particles Grant 7,680,243 - Yokhin , et al. March 16, 2 | 2010-03-16 |
Target alignment for X-ray scattering measurements Grant 7,600,916 - Yokhin , et al. October 13, 2 | 2009-10-13 |
Multifunction X-ray analysis system Grant 7,551,719 - Yokhin , et al. June 23, 2 | 2009-06-23 |
X-ray measurement of properties of nano-particles App 20090067573 - Yokhin; Boris ;   et al. | 2009-03-12 |
Multi-detector EDXRD Grant 7,321,652 - Yokhin , et al. January 22, 2 | 2008-01-22 |
Target alignment for x-ray scattering measurements App 20070286344 - Yokhin; Boris ;   et al. | 2007-12-13 |
Multi-detector Edxrd App 20070058779 - YOKHIN; Boris ;   et al. | 2007-03-15 |
Multifunction X-ray analysis system App 20060062351 - Yokhin; Boris ;   et al. | 2006-03-23 |
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