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Patent applications and USPTO patent grants for Kroemer; Ulrich.The latest application filed is for "tungsten nitride atomic layer deposition processes".
Patent | Date |
---|---|
Tungsten nitride atomic layer deposition processes Grant 7,745,329 - Wang , et al. June 29, 2 | 2010-06-29 |
Tungsten Nitride Atomic Layer Deposition Processes App 20080305629 - Wang; Shulin ;   et al. | 2008-12-11 |
Tungsten nitride atomic layer deposition processes Grant 7,429,516 - Wang , et al. September 30, 2 | 2008-09-30 |
Tungsten Nitride Atomic Layer Deposition Processes App 20070020924 - Wang; Shulin ;   et al. | 2007-01-25 |
Cyclical deposition of tungsten nitride for metal oxide gate electrode Grant 7,115,499 - Wang , et al. October 3, 2 | 2006-10-03 |
Cyclical deposition of tungsten nitride for metal oxide gate electrode App 20050176240 - Wang, Shulin ;   et al. | 2005-08-11 |
Cyclical deposition of tungsten nitride for metal oxide gate electrode Grant 6,833,161 - Wang , et al. December 21, 2 | 2004-12-21 |
Cyclical deposition of tungsten nitride for metal oxide gate electrode App 20030161952 - Wang, Shulin ;   et al. | 2003-08-28 |
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