loadpatents
Patent applications and USPTO patent grants for Kroeker; Tony.The latest application filed is for "single wafer load lock with internal wafer transport".
Patent | Date |
---|---|
Single wafer load lock with internal wafer transport Grant 6,719,516 - Kroeker April 13, 2 | 2004-04-13 |
Single Wafer Load Lock With Internal Wafer Transport App 20020031420 - KROEKER, TONY | 2002-03-14 |
Single wafer load lock with internal wafer transport App 20010041122 - Kroeker, Tony | 2001-11-15 |
Mechanically clamping robot wrist Grant 6,222,337 - Kroeker , et al. April 24, 2 | 2001-04-24 |
Single motor control for substrate handler in processing system Grant 6,057,662 - McAndrew , et al. May 2, 2 | 2000-05-02 |
Mechanically clamping robot wrist Grant 5,955,858 - Kroeker , et al. September 21, 1 | 1999-09-21 |
Dual plane robot Grant 5,789,878 - Kroeker , et al. August 4, 1 | 1998-08-04 |
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