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Integrated system and method Grant 11,294,164 - April 5, 2 | 2022-04-05 |
Charged particle beam source and a method for assembling a charged particle beam source Grant 11,189,451 - Asulin , et al. November 30, 2 | 2021-11-30 |
Method and system for evaluating objects Grant 11,177,048 - November 16, 2 | 2021-11-16 |
Cleanliness monitor and a method for monitoring a cleanliness of a vacuum chamber Grant 11,049,704 - Ruach-Nir , et al. June 29, 2 | 2021-06-29 |
Charged Particle Beam Source And A Method For Assembling A Charged Particle Beam Source App 20210175040 - Asulin; Itay ;   et al. | 2021-06-10 |
Method And System For Evaluating Objects App 20210151214 - Krivts (Krayvitz); Igor ;   et al. | 2021-05-20 |
Integrated System And Method App 20210026123 - Krivts (Krayvitz); Igor ;   et al. | 2021-01-28 |
Charged particle beam source and a method for assembling a charged particle beam source Grant 10,886,092 - Asulin , et al. January 5, 2 | 2021-01-05 |
Charged Particle Beam Source And A Method For Assembling A Charged Particle Beam Source App 20200234907 - Asulin; Itay ;   et al. | 2020-07-23 |
System for inspecting and reviewing a sample Grant 10,177,048 - Frosien , et al. J | 2019-01-08 |
System and method for forming a sealed chamber Grant 10,056,274 - Rice , et al. August 21, 2 | 2018-08-21 |
Method and system for moving a substrate Grant 10,049,904 - Adan , et al. August 14, 2 | 2018-08-14 |
System and method for forming a sealed chamber Grant 9,997,328 - Rice , et al. June 12, 2 | 2018-06-12 |
System and method for attaching a mask to a mask holder Grant 9,829,809 - Avneri , et al. November 28, 2 | 2017-11-28 |
Slit valve with a pressurized gas bearing Grant 9,587,749 - Rice , et al. March 7, 2 | 2017-03-07 |
System And Method For Forming A Sealed Chamber App 20160268097 - Rice; Michael R. ;   et al. | 2016-09-15 |
System For Inspecting And Reviewing A Sample App 20160260642 - Frosien; Juergen ;   et al. | 2016-09-08 |
System And Method For Attaching A Mask To A Mask Holder App 20160161869 - Avneri; Israel ;   et al. | 2016-06-09 |
System And Method For Forming A Sealed Chamber App 20160163570 - Rice; Michael R. ;   et al. | 2016-06-09 |
Slit Valve With A Pressurized Gas Bearing App 20150075659 - Rice; Michael R. ;   et al. | 2015-03-19 |
Conductive element for electrically coupling an EUVL mask to a supporting chuck Grant 8,772,737 - July 8, 2 | 2014-07-08 |
Conductive Element For Electrically Coupling An Euvl Mask To A Supporting Chuck App 20130075605 - Krivts (Krayvitz); Igor ;   et al. | 2013-03-28 |
Integrated in situ scanning electronic microscope review station in semiconductor wafers and photomasks optical inspection system Grant 7,428,850 - Naftali , et al. September 30, 2 | 2008-09-30 |
Particle trap for electrostatic chuck Grant 7,317,606 - Petrov , et al. January 8, 2 | 2008-01-08 |
Integrated in situ scanning electronic microscope review station in semiconductor wafers and photomasks optical inspection system App 20070022831 - Naftali; Ron ;   et al. | 2007-02-01 |
Beam directing system and method for use in a charged particle beam column Grant 7,112,803 - Petrov , et al. September 26, 2 | 2006-09-26 |
Particle trap for electrostatic chuck App 20060126261 - Petrov; Igor ;   et al. | 2006-06-15 |
Beam directing system and method for use in a charged particle beam column App 20060016988 - Petrov; Igor ;   et al. | 2006-01-26 |